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“Say cheese....”


                                  High-Speed Single-Photon Camera
                                                         Fabrizio Guerrieri



    Advisor: Prof. Franco Zappa
    Co-advisor: Dr. Simone Tisa
    Tutor: Prof. Angelo Geraci
“Say cheese....”


                   What am I going to talk about?



   MOTIVATIONS          THE MAKING OF            FROM THE DEVICE...
     & IDEAS           THE SPAD CAMERA      ... TO THE APPLICATIONS (3)
MOTIVATIONS
          Demanding imaging applications require

     Extreme sensitivity     AND high-speed
MOTIVATIONS
                Demanding imaging applications require

           Extreme sensitivity      AND high-speed
                                                            HIGH-SENSITIVITY
                                                            HIGH-SPEED
      EM-CCD
                 EB-CCD
       I-CCD
                                   RR AYS
                            PA DA
                          S
                                                 CMOS APS
Standard
CCD
IMAGER SPECIFICATIONS
   REQUIREMENT                 PROPOSED SOLUTION                     RISK
Single-Photon sensitivity            SPAD detector

      High-speed
                             Completely independent pixels
   ( > 10 kframe/s )

   High pixel number                     > 100

     Compactness            Use of HV-CMOS compatible tech

   Additional features      Global shutter, programmability...


                                                  Increasing risk:
SPAD ARRAYS

HIGH PERFORMANCE ARRAY
• Large pixel diameter
• Moderate number of pixels
• Limited by the ext. Electronics
                                      CUSTOM TECH

DENSE ARRAY
• Small pixel diameter
• Large number of pixels
• Possibility of smart pixels


                                    STANDARD CMOS TECH
ACTIVE QUENCHING CIRCUIT




 Group’s State-of-the-Art   VLQC
ARRAY ARCHITECTURE      INTEGRATED
                     QUENCHING CIRCUIT

    CMOS SPAD
     (20µm)



                                8 BIT
                              COUNTER




 GLOBAL
 SIGNALS
                          INTERNAL
                           BUFFER
                           MEMORY
ARRAY OPERATIONS
ARRAY OPERATIONS
ARRAY OPERATIONS
ARRAY OPERATIONS
PIXEL LAYOUT



 20 μm

                        100 μm




               100 μm
SPAD ARRAYS




VLQC   SMART PIXEL




                      LINEAR 32x1 ARRAY                32x32 SPAD IMAGER
                32 counting and timing channels   1,024 parallel counting channels
                     Single-photon sensitivity       Single-photon sensitivity
                       Up to 312.5 kframe/s             Up to 100 kframe/s
SPAD IMAGER




• 1024 parallel channels   • Programmable to read-out any pixel sub-
• Global shutter             portion to increase max frame-rate
• Up to 100 kframe/s
SPAD IMAGER
Experimental measurements




                 Up to 45% Single-Photon Det. Efficiency
                 75% DCR < 4 kcps at room temperature
                     Negligible crosstalk probability
IMAGER SPECIFICATIONS

     REQUIREMENT                IMPLEMENTED SOLUTION
  Single-Photon sensitivity          CMOS SPAD detector             ✔
        High-speed            “Smart” pixel comprising everything
     ( > 10 kframe/s )           necessary to count photons
                                                                    ✔
     High pixel number               32x32 CMOS imager              ✔
       Compactness               100x100 μm pixel dimension         ✔
     Additional features       Global shutter, programmability...   ✔
SPAD CAMERA
SPAD CAMERA




              • FPGA-based high-speed electronics
              • Requires only USB cable to work: Plug’n’Play
              • Developed cross-platform software
SPAD CAMERA




                            770 μs

• Easy to use
• 40 kframe/s
• Low light level at such
  a high speed
SUB-RAYLEIGH IMAGING @ MIT
Conventional imaging with non-diffraction limited optics
SUB-RAYLEIGH IMAGING @ MIT
Conventional imaging with diffraction limited optics




                                         Rayleigh bound
                                              Stripe size
SUB-RAYLEIGH IMAGING @ MIT
    Setup modi cations to apply the Sub-Rayleight technique

                                                                               2
1
   Movable
                                                                   N-Photon
   focused
                                                                   Detection
laser beam




                                                               ?
                                            Rayleigh bound
                                                 Stripe size
SUB-RAYLEIGH IMAGING @ MIT
 Sub-Rayleigh imaging with diffraction limited optics




   Movable
                                                           N-Photon
   focused
                                                           Detection
laser beam




                                        Rayleigh bound
                                             Stripe size
                                    Sub-Rayleigh bound
SUB-RAYLEIGH IMAGING @ MIT




     Good optics                  Bad optics                  Bad optics
          +                           +                           +
 Conventional imaging        Conventional imaging        Sub-Rayleigh imaging

               Imaging beyond the Rayleigh limit is possible by
               •Scanning the object by a focused light spot
               •Employing N-Photon detection strategy
               Improvement goes as about the square root of N
HIGH THROUGHPUT FCS @ UCLA
                       Fluorescent analyte ows or diffuses
                       through a small excitation volume
                       emitting uorescence bursts

                       Fluorescence Correlation Spectroscopy
                       (FCS) analyses the uorescence intensity
                        uctuations using temporal
                       autocorrelation
HIGH THROUGHPUT FCS @ UCLA
 To work well only     PROBLEM!                       SOLUTION!
                                     Need faster
one particle at time      Long                     Multi-spot parallel
                                     acquisition
  should enter the     acquisition                  FCS acquisitions
                                     of FCS data
 excitation volume       times!
HIGH THROUGHPUT FCS @ UCLA
 To work well only       PROBLEM!                            SOLUTION!
                                         Need faster
one particle at time        Long                          Multi-spot parallel
                                         acquisition
  should enter the       acquisition                       FCS acquisitions
                                         of FCS data
 excitation volume         times!


            A very sensitive and high-speed device is required!
                    SPAD arrays as enabling technology
HIGH THROUGHPUT FCS @ UCLA




LCOS-SLM and SPAD array
  enabling technologies
HIGH THROUGHPUT FCS @ UCLA




         8x8 ACF with rescaling
          100 nm beads in H2O

 Curves overlap and can be tted
3D IMAGING
    Indirect-ToF
    •Modulated light illuminates
    the scene
    •A very sensitive detector
    measure the re ected light
    •Depth information can be
    extracted calculating the
    waveform phase shift:

              Δt
            L= c
              2



€
3D IMAGING
                       How did a 2D camera become “3D capable”?




Light source + driver + waveform generator + new FPGA rmware
3D IMAGING
             Depth resolution:
             3 – 9 mm
             Scene depth:
             30 cm
             Measurement time:
             10 s




               Good results but
              need to speed the
              acquisition up to
              get movie-like 3D
                  imaging
CONCLUSIONS
                                     Group SoA




                                 My work




VLQC                                                       3D
        Pixel                                            Imaging
                                                   FCS
                32x32    SPAD       Sub-Rayleigh
                Array   Camera        Imaging
CONCLUSIONS
          Novel SPAD quenching circuit
          •Small footprint
          •Small parasitic capacitance
          •Compatible with CMOS SPAD technology
          •Reduced afterpulsing and good timing




VLQC                                                                     3D
        Pixel                                                          Imaging
                                                                 FCS
                      32x32            SPAD       Sub-Rayleigh
                      Array           Camera        Imaging
CONCLUSIONS
          Smart pixel architecture
          •20-μm CMOS SPAD detector
          •Front-end electronics (VLQC)
          •Counting and buffer digital logic




VLQC                                                                     3D
        Pixel                                                          Imaging
                                                                 FCS
                        32x32             SPAD    Sub-Rayleigh
                        Array            Camera     Imaging
CONCLUSIONS
          32x32 CMOS SPAD imager
          •1,024 indipendent photon counting channels
          •Single-photon sensitivity
          •Up to 100 kframe/s




VLQC                                                                       3D
        Pixel                                                            Imaging
                                                                   FCS
                       32x32            SPAD        Sub-Rayleigh
                       Array           Camera         Imaging
CONCLUSIONS
          SPAD camera
          •High-speed digital FPGA-based system electronics
          •Plug’n’play device. Power supplies from USB
          •Cross-platform user-friendly user interface
          •Optics




VLQC                                                                        3D
        Pixel                                                             Imaging
                                                                    FCS
                       32x32             SPAD        Sub-Rayleigh
                       Array            Camera         Imaging
CONCLUSIONS
          Sub-Rayleigh imaging @
          •Experimentally demonstrated and developed novel imaging technique
          •Full project responsability
          •SPAD camera as enabling technology




VLQC                                                                             3D
        Pixel                                                                  Imaging
                                                                     FCS
                       32x32            SPAD        Sub-Rayleigh
                       Array           Camera         Imaging
CONCLUSIONS
          Fluorescence Correlation Spectroscopy @
          •Proof of concept for high-troughput FCS on 1,024 parallel channels
          •Customization of SPAD camera for FCS
          •Promising preliminary experimental results




VLQC                                                                              3D
        Pixel                                                                   Imaging
                                                                          FCS
                        32x32             SPAD         Sub-Rayleigh
                        Array            Camera          Imaging
CONCLUSIONS
          3D imaging @ Polimi
          •Developed and conceived technique to use SPAD camera in 3D imaging
          •Very good preliminary experiments




VLQC                                                                              3D
        Pixel                                                                   Imaging
                                                                      FCS
                       32x32            SPAD        Sub-Rayleigh
                       Array           Camera         Imaging
PHD FACTS
Achievements/Awards
                                             PhD doctoral school
• Physical Review Letters as rst author      Courses’ grade: all A (8 courses)
  (IF=7.33)                                  Attended extra non-mandatory courses
• Progetto Rocca fellowship
                                             Publications
• My research helped the group to submit
  and win an European grant.                 Total papers: 29
                                             Conference talks: 6
• Laser Focus World Award
  “Commendation for excellence in                      Other
  technical communications”                        Magazine
• Co-author of 2 invited conference papers   Conf. co-author
• ESSDERC08: special congratulation by       Conf. 1st author
  conference committee
                                                     Journal
• PhDay 2008 1° year student award
                                                                0   3   5   8   10

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High-Speed Single-Photon SPAD Camera

  • 1. “Say cheese....” High-Speed Single-Photon Camera Fabrizio Guerrieri Advisor: Prof. Franco Zappa Co-advisor: Dr. Simone Tisa Tutor: Prof. Angelo Geraci
  • 2. “Say cheese....” What am I going to talk about? MOTIVATIONS THE MAKING OF FROM THE DEVICE... & IDEAS THE SPAD CAMERA ... TO THE APPLICATIONS (3)
  • 3. MOTIVATIONS Demanding imaging applications require Extreme sensitivity AND high-speed
  • 4. MOTIVATIONS Demanding imaging applications require Extreme sensitivity AND high-speed HIGH-SENSITIVITY HIGH-SPEED EM-CCD EB-CCD I-CCD RR AYS PA DA S CMOS APS Standard CCD
  • 5. IMAGER SPECIFICATIONS REQUIREMENT PROPOSED SOLUTION RISK Single-Photon sensitivity SPAD detector High-speed Completely independent pixels ( > 10 kframe/s ) High pixel number > 100 Compactness Use of HV-CMOS compatible tech Additional features Global shutter, programmability... Increasing risk:
  • 6. SPAD ARRAYS HIGH PERFORMANCE ARRAY • Large pixel diameter • Moderate number of pixels • Limited by the ext. Electronics CUSTOM TECH DENSE ARRAY • Small pixel diameter • Large number of pixels • Possibility of smart pixels STANDARD CMOS TECH
  • 7. ACTIVE QUENCHING CIRCUIT Group’s State-of-the-Art VLQC
  • 8. ARRAY ARCHITECTURE INTEGRATED QUENCHING CIRCUIT CMOS SPAD (20µm) 8 BIT COUNTER GLOBAL SIGNALS INTERNAL BUFFER MEMORY
  • 13. PIXEL LAYOUT 20 μm 100 μm 100 μm
  • 14. SPAD ARRAYS VLQC SMART PIXEL LINEAR 32x1 ARRAY 32x32 SPAD IMAGER 32 counting and timing channels 1,024 parallel counting channels Single-photon sensitivity Single-photon sensitivity Up to 312.5 kframe/s Up to 100 kframe/s
  • 15. SPAD IMAGER • 1024 parallel channels • Programmable to read-out any pixel sub- • Global shutter portion to increase max frame-rate • Up to 100 kframe/s
  • 16. SPAD IMAGER Experimental measurements Up to 45% Single-Photon Det. Efficiency 75% DCR < 4 kcps at room temperature Negligible crosstalk probability
  • 17. IMAGER SPECIFICATIONS REQUIREMENT IMPLEMENTED SOLUTION Single-Photon sensitivity CMOS SPAD detector ✔ High-speed “Smart” pixel comprising everything ( > 10 kframe/s ) necessary to count photons ✔ High pixel number 32x32 CMOS imager ✔ Compactness 100x100 μm pixel dimension ✔ Additional features Global shutter, programmability... ✔
  • 19. SPAD CAMERA • FPGA-based high-speed electronics • Requires only USB cable to work: Plug’n’Play • Developed cross-platform software
  • 20. SPAD CAMERA 770 μs • Easy to use • 40 kframe/s • Low light level at such a high speed
  • 21. SUB-RAYLEIGH IMAGING @ MIT Conventional imaging with non-diffraction limited optics
  • 22. SUB-RAYLEIGH IMAGING @ MIT Conventional imaging with diffraction limited optics Rayleigh bound Stripe size
  • 23. SUB-RAYLEIGH IMAGING @ MIT Setup modi cations to apply the Sub-Rayleight technique 2 1 Movable N-Photon focused Detection laser beam ? Rayleigh bound Stripe size
  • 24. SUB-RAYLEIGH IMAGING @ MIT Sub-Rayleigh imaging with diffraction limited optics Movable N-Photon focused Detection laser beam Rayleigh bound Stripe size Sub-Rayleigh bound
  • 25. SUB-RAYLEIGH IMAGING @ MIT Good optics Bad optics Bad optics + + + Conventional imaging Conventional imaging Sub-Rayleigh imaging Imaging beyond the Rayleigh limit is possible by •Scanning the object by a focused light spot •Employing N-Photon detection strategy Improvement goes as about the square root of N
  • 26. HIGH THROUGHPUT FCS @ UCLA Fluorescent analyte ows or diffuses through a small excitation volume emitting uorescence bursts Fluorescence Correlation Spectroscopy (FCS) analyses the uorescence intensity uctuations using temporal autocorrelation
  • 27. HIGH THROUGHPUT FCS @ UCLA To work well only PROBLEM! SOLUTION! Need faster one particle at time Long Multi-spot parallel acquisition should enter the acquisition FCS acquisitions of FCS data excitation volume times!
  • 28. HIGH THROUGHPUT FCS @ UCLA To work well only PROBLEM! SOLUTION! Need faster one particle at time Long Multi-spot parallel acquisition should enter the acquisition FCS acquisitions of FCS data excitation volume times! A very sensitive and high-speed device is required! SPAD arrays as enabling technology
  • 29. HIGH THROUGHPUT FCS @ UCLA LCOS-SLM and SPAD array enabling technologies
  • 30. HIGH THROUGHPUT FCS @ UCLA 8x8 ACF with rescaling 100 nm beads in H2O Curves overlap and can be tted
  • 31. 3D IMAGING Indirect-ToF •Modulated light illuminates the scene •A very sensitive detector measure the re ected light •Depth information can be extracted calculating the waveform phase shift: Δt L= c 2 €
  • 32. 3D IMAGING How did a 2D camera become “3D capable”? Light source + driver + waveform generator + new FPGA rmware
  • 33. 3D IMAGING Depth resolution: 3 – 9 mm Scene depth: 30 cm Measurement time: 10 s Good results but need to speed the acquisition up to get movie-like 3D imaging
  • 34. CONCLUSIONS Group SoA My work VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 35. CONCLUSIONS Novel SPAD quenching circuit •Small footprint •Small parasitic capacitance •Compatible with CMOS SPAD technology •Reduced afterpulsing and good timing VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 36. CONCLUSIONS Smart pixel architecture •20-μm CMOS SPAD detector •Front-end electronics (VLQC) •Counting and buffer digital logic VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 37. CONCLUSIONS 32x32 CMOS SPAD imager •1,024 indipendent photon counting channels •Single-photon sensitivity •Up to 100 kframe/s VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 38. CONCLUSIONS SPAD camera •High-speed digital FPGA-based system electronics •Plug’n’play device. Power supplies from USB •Cross-platform user-friendly user interface •Optics VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 39. CONCLUSIONS Sub-Rayleigh imaging @ •Experimentally demonstrated and developed novel imaging technique •Full project responsability •SPAD camera as enabling technology VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 40. CONCLUSIONS Fluorescence Correlation Spectroscopy @ •Proof of concept for high-troughput FCS on 1,024 parallel channels •Customization of SPAD camera for FCS •Promising preliminary experimental results VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 41. CONCLUSIONS 3D imaging @ Polimi •Developed and conceived technique to use SPAD camera in 3D imaging •Very good preliminary experiments VLQC 3D Pixel Imaging FCS 32x32 SPAD Sub-Rayleigh Array Camera Imaging
  • 42. PHD FACTS Achievements/Awards PhD doctoral school • Physical Review Letters as rst author Courses’ grade: all A (8 courses) (IF=7.33) Attended extra non-mandatory courses • Progetto Rocca fellowship Publications • My research helped the group to submit and win an European grant. Total papers: 29 Conference talks: 6 • Laser Focus World Award “Commendation for excellence in Other technical communications” Magazine • Co-author of 2 invited conference papers Conf. co-author • ESSDERC08: special congratulation by Conf. 1st author conference committee Journal • PhDay 2008 1° year student award 0 3 5 8 10