Enviar pesquisa
Carregar
4 pointprobe manual
•
1 gostou
•
540 visualizações
Diego Miranda
Seguir
Manual de esquipamento 4 pontas
Leia menos
Leia mais
Engenharia
Denunciar
Compartilhar
Denunciar
Compartilhar
1 de 8
Baixar agora
Baixar para ler offline
Recomendados
Acoustic Emission Laboratory experiment
Acoustic Emission Laboratory experiment
Pratik Saxena
Lab 8 tensile testing
Lab 8 tensile testing
elsa mesfin
4 tension test
4 tension test
Mukhlis Adam
BIOEN 4250 BIOMECHANICS I Laboratory 4 – Principle Stres.docx
BIOEN 4250 BIOMECHANICS I Laboratory 4 – Principle Stres.docx
tarifarmarie
Spectrophotometer validation 05aug10
Spectrophotometer validation 05aug10
Ruchika Sah
TENSILE TEST REPORT
TENSILE TEST REPORT
musadoto
DATA LOGGER
DATA LOGGER
fatinj cullen
Experiment 4 - Testing of Materials in Tension Object .docx
Experiment 4 - Testing of Materials in Tension Object .docx
SANSKAR20
Recomendados
Acoustic Emission Laboratory experiment
Acoustic Emission Laboratory experiment
Pratik Saxena
Lab 8 tensile testing
Lab 8 tensile testing
elsa mesfin
4 tension test
4 tension test
Mukhlis Adam
BIOEN 4250 BIOMECHANICS I Laboratory 4 – Principle Stres.docx
BIOEN 4250 BIOMECHANICS I Laboratory 4 – Principle Stres.docx
tarifarmarie
Spectrophotometer validation 05aug10
Spectrophotometer validation 05aug10
Ruchika Sah
TENSILE TEST REPORT
TENSILE TEST REPORT
musadoto
DATA LOGGER
DATA LOGGER
fatinj cullen
Experiment 4 - Testing of Materials in Tension Object .docx
Experiment 4 - Testing of Materials in Tension Object .docx
SANSKAR20
Film properties tests and details
Film properties tests and details
Shubham Kumar Gautam
IEEE_2011_Conference
IEEE_2011_Conference
Prasanna Venkatesh
AIAA-2007-05-18
AIAA-2007-05-18
Yahia Abdelhamid
Terahertz Microstrip Patch Antenna Design for detection of Plastic Explosive ...
Terahertz Microstrip Patch Antenna Design for detection of Plastic Explosive ...
IRJET Journal
A round robin project in japan for the evaluation of nondestructive responses...
A round robin project in japan for the evaluation of nondestructive responses...
Alexander Decker
STM in a PTR - J. Meringa
STM in a PTR - J. Meringa
Jeroen Meringa Msc.
Final Paper
Final Paper
George Epstein
A Beginner's Guide to Steel Testings
A Beginner's Guide to Steel Testings
DHA Suffa University
Lab Report Conduction With Free Convection
Lab Report Conduction With Free Convection
HamzaArain8
Nx calrics2019 yano-presentation
Nx calrics2019 yano-presentation
Shinichiro Yano
A study on effect of bowing on a scans using pulse echo ultrasonic technique
A study on effect of bowing on a scans using pulse echo ultrasonic technique
eSAT Journals
Tensile testing-laboratory
Tensile testing-laboratory
Mike Robicon
Laser shock peening presentation
Laser shock peening presentation
kota manish
Ce test report riarudoll.com 国内ラブドール人気 リアルドール通販ショップ
Ce test report riarudoll.com 国内ラブドール人気 リアルドール通販ショップ
ssuseraacecd
Jeol2000 fx inst
Jeol2000 fx inst
José da Silva Rabelo Neto
Tensile test
Tensile test
MoetiManogo
1 Resistivity Equipment Qty Item Parts Number .docx
1 Resistivity Equipment Qty Item Parts Number .docx
honey725342
Chakresh Tiwari Philips report
Chakresh Tiwari Philips report
pranav kapoor
6 NDT1.pptx
6 NDT1.pptx
AdityaBisht34
Strength of maerials
Strength of maerials
Birendra Biru
Manual do px
Manual do px
Diego Miranda
O céu que nos envolve (Astronomia)
O céu que nos envolve (Astronomia)
Diego Miranda
Mais conteúdo relacionado
Semelhante a 4 pointprobe manual
Film properties tests and details
Film properties tests and details
Shubham Kumar Gautam
IEEE_2011_Conference
IEEE_2011_Conference
Prasanna Venkatesh
AIAA-2007-05-18
AIAA-2007-05-18
Yahia Abdelhamid
Terahertz Microstrip Patch Antenna Design for detection of Plastic Explosive ...
Terahertz Microstrip Patch Antenna Design for detection of Plastic Explosive ...
IRJET Journal
A round robin project in japan for the evaluation of nondestructive responses...
A round robin project in japan for the evaluation of nondestructive responses...
Alexander Decker
STM in a PTR - J. Meringa
STM in a PTR - J. Meringa
Jeroen Meringa Msc.
Final Paper
Final Paper
George Epstein
A Beginner's Guide to Steel Testings
A Beginner's Guide to Steel Testings
DHA Suffa University
Lab Report Conduction With Free Convection
Lab Report Conduction With Free Convection
HamzaArain8
Nx calrics2019 yano-presentation
Nx calrics2019 yano-presentation
Shinichiro Yano
A study on effect of bowing on a scans using pulse echo ultrasonic technique
A study on effect of bowing on a scans using pulse echo ultrasonic technique
eSAT Journals
Tensile testing-laboratory
Tensile testing-laboratory
Mike Robicon
Laser shock peening presentation
Laser shock peening presentation
kota manish
Ce test report riarudoll.com 国内ラブドール人気 リアルドール通販ショップ
Ce test report riarudoll.com 国内ラブドール人気 リアルドール通販ショップ
ssuseraacecd
Jeol2000 fx inst
Jeol2000 fx inst
José da Silva Rabelo Neto
Tensile test
Tensile test
MoetiManogo
1 Resistivity Equipment Qty Item Parts Number .docx
1 Resistivity Equipment Qty Item Parts Number .docx
honey725342
Chakresh Tiwari Philips report
Chakresh Tiwari Philips report
pranav kapoor
6 NDT1.pptx
6 NDT1.pptx
AdityaBisht34
Strength of maerials
Strength of maerials
Birendra Biru
Semelhante a 4 pointprobe manual
(20)
Film properties tests and details
Film properties tests and details
IEEE_2011_Conference
IEEE_2011_Conference
AIAA-2007-05-18
AIAA-2007-05-18
Terahertz Microstrip Patch Antenna Design for detection of Plastic Explosive ...
Terahertz Microstrip Patch Antenna Design for detection of Plastic Explosive ...
A round robin project in japan for the evaluation of nondestructive responses...
A round robin project in japan for the evaluation of nondestructive responses...
STM in a PTR - J. Meringa
STM in a PTR - J. Meringa
Final Paper
Final Paper
A Beginner's Guide to Steel Testings
A Beginner's Guide to Steel Testings
Lab Report Conduction With Free Convection
Lab Report Conduction With Free Convection
Nx calrics2019 yano-presentation
Nx calrics2019 yano-presentation
A study on effect of bowing on a scans using pulse echo ultrasonic technique
A study on effect of bowing on a scans using pulse echo ultrasonic technique
Tensile testing-laboratory
Tensile testing-laboratory
Laser shock peening presentation
Laser shock peening presentation
Ce test report riarudoll.com 国内ラブドール人気 リアルドール通販ショップ
Ce test report riarudoll.com 国内ラブドール人気 リアルドール通販ショップ
Jeol2000 fx inst
Jeol2000 fx inst
Tensile test
Tensile test
1 Resistivity Equipment Qty Item Parts Number .docx
1 Resistivity Equipment Qty Item Parts Number .docx
Chakresh Tiwari Philips report
Chakresh Tiwari Philips report
6 NDT1.pptx
6 NDT1.pptx
Strength of maerials
Strength of maerials
Mais de Diego Miranda
Manual do px
Manual do px
Diego Miranda
O céu que nos envolve (Astronomia)
O céu que nos envolve (Astronomia)
Diego Miranda
05 noções de desenho técnico
05 noções de desenho técnico
Diego Miranda
75
75
Diego Miranda
Desenho de-circuito-eletronico-3-capitulo-2-ano
Desenho de-circuito-eletronico-3-capitulo-2-ano
Diego Miranda
Experimentos aiq jan2011
Experimentos aiq jan2011
Diego Miranda
Ci 555
Ci 555
Diego Miranda
Mais de Diego Miranda
(7)
Manual do px
Manual do px
O céu que nos envolve (Astronomia)
O céu que nos envolve (Astronomia)
05 noções de desenho técnico
05 noções de desenho técnico
75
75
Desenho de-circuito-eletronico-3-capitulo-2-ano
Desenho de-circuito-eletronico-3-capitulo-2-ano
Experimentos aiq jan2011
Experimentos aiq jan2011
Ci 555
Ci 555
Último
Call Girls Service Nagpur Tanvi Call 7001035870 Meet With Nagpur Escorts
Call Girls Service Nagpur Tanvi Call 7001035870 Meet With Nagpur Escorts
Call Girls in Nagpur High Profile
AKTU Computer Networks notes --- Unit 3.pdf
AKTU Computer Networks notes --- Unit 3.pdf
ankushspencer015
Porous Ceramics seminar and technical writing
Porous Ceramics seminar and technical writing
rakeshbaidya232001
CCS335 _ Neural Networks and Deep Learning Laboratory_Lab Complete Record
CCS335 _ Neural Networks and Deep Learning Laboratory_Lab Complete Record
Asst.prof M.Gokilavani
APPLICATIONS-AC/DC DRIVES-OPERATING CHARACTERISTICS
APPLICATIONS-AC/DC DRIVES-OPERATING CHARACTERISTICS
KurinjimalarL3
UNIT-II FMM-Flow Through Circular Conduits
UNIT-II FMM-Flow Through Circular Conduits
rknatarajan
The Most Attractive Pune Call Girls Manchar 8250192130 Will You Miss This Cha...
The Most Attractive Pune Call Girls Manchar 8250192130 Will You Miss This Cha...
ranjana rawat
Introduction and different types of Ethernet.pptx
Introduction and different types of Ethernet.pptx
upamatechverse
Booking open Available Pune Call Girls Koregaon Park 6297143586 Call Hot Ind...
Booking open Available Pune Call Girls Koregaon Park 6297143586 Call Hot Ind...
Call Girls in Nagpur High Profile
Java Programming :Event Handling(Types of Events)
Java Programming :Event Handling(Types of Events)
simmis5
result management system report for college project
result management system report for college project
Tonystark477637
KubeKraft presentation @CloudNativeHooghly
KubeKraft presentation @CloudNativeHooghly
sanyuktamishra911
Call for Papers - Educational Administration: Theory and Practice, E-ISSN: 21...
Call for Papers - Educational Administration: Theory and Practice, E-ISSN: 21...
Christo Ananth
(SHREYA) Chakan Call Girls Just Call 7001035870 [ Cash on Delivery ] Pune Esc...
(SHREYA) Chakan Call Girls Just Call 7001035870 [ Cash on Delivery ] Pune Esc...
ranjana rawat
The Most Attractive Pune Call Girls Budhwar Peth 8250192130 Will You Miss Thi...
The Most Attractive Pune Call Girls Budhwar Peth 8250192130 Will You Miss Thi...
ranjana rawat
Roadmap to Membership of RICS - Pathways and Routes
Roadmap to Membership of RICS - Pathways and Routes
M Maged Hegazy, LLM, MBA, CCP, P3O
VIP Call Girls Service Kondapur Hyderabad Call +91-8250192130
VIP Call Girls Service Kondapur Hyderabad Call +91-8250192130
Suhani Kapoor
(ANVI) Koregaon Park Call Girls Just Call 7001035870 [ Cash on Delivery ] Pun...
(ANVI) Koregaon Park Call Girls Just Call 7001035870 [ Cash on Delivery ] Pun...
ranjana rawat
Processing & Properties of Floor and Wall Tiles.pptx
Processing & Properties of Floor and Wall Tiles.pptx
pranjaldaimarysona
Introduction to Multiple Access Protocol.pptx
Introduction to Multiple Access Protocol.pptx
upamatechverse
Último
(20)
Call Girls Service Nagpur Tanvi Call 7001035870 Meet With Nagpur Escorts
Call Girls Service Nagpur Tanvi Call 7001035870 Meet With Nagpur Escorts
AKTU Computer Networks notes --- Unit 3.pdf
AKTU Computer Networks notes --- Unit 3.pdf
Porous Ceramics seminar and technical writing
Porous Ceramics seminar and technical writing
CCS335 _ Neural Networks and Deep Learning Laboratory_Lab Complete Record
CCS335 _ Neural Networks and Deep Learning Laboratory_Lab Complete Record
APPLICATIONS-AC/DC DRIVES-OPERATING CHARACTERISTICS
APPLICATIONS-AC/DC DRIVES-OPERATING CHARACTERISTICS
UNIT-II FMM-Flow Through Circular Conduits
UNIT-II FMM-Flow Through Circular Conduits
The Most Attractive Pune Call Girls Manchar 8250192130 Will You Miss This Cha...
The Most Attractive Pune Call Girls Manchar 8250192130 Will You Miss This Cha...
Introduction and different types of Ethernet.pptx
Introduction and different types of Ethernet.pptx
Booking open Available Pune Call Girls Koregaon Park 6297143586 Call Hot Ind...
Booking open Available Pune Call Girls Koregaon Park 6297143586 Call Hot Ind...
Java Programming :Event Handling(Types of Events)
Java Programming :Event Handling(Types of Events)
result management system report for college project
result management system report for college project
KubeKraft presentation @CloudNativeHooghly
KubeKraft presentation @CloudNativeHooghly
Call for Papers - Educational Administration: Theory and Practice, E-ISSN: 21...
Call for Papers - Educational Administration: Theory and Practice, E-ISSN: 21...
(SHREYA) Chakan Call Girls Just Call 7001035870 [ Cash on Delivery ] Pune Esc...
(SHREYA) Chakan Call Girls Just Call 7001035870 [ Cash on Delivery ] Pune Esc...
The Most Attractive Pune Call Girls Budhwar Peth 8250192130 Will You Miss Thi...
The Most Attractive Pune Call Girls Budhwar Peth 8250192130 Will You Miss Thi...
Roadmap to Membership of RICS - Pathways and Routes
Roadmap to Membership of RICS - Pathways and Routes
VIP Call Girls Service Kondapur Hyderabad Call +91-8250192130
VIP Call Girls Service Kondapur Hyderabad Call +91-8250192130
(ANVI) Koregaon Park Call Girls Just Call 7001035870 [ Cash on Delivery ] Pun...
(ANVI) Koregaon Park Call Girls Just Call 7001035870 [ Cash on Delivery ] Pun...
Processing & Properties of Floor and Wall Tiles.pptx
Processing & Properties of Floor and Wall Tiles.pptx
Introduction to Multiple Access Protocol.pptx
Introduction to Multiple Access Protocol.pptx
4 pointprobe manual
1.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 1 of 8 Copyright © 2003 The University of Texas at Dallas Four-Point Probe Operation Kevin Bautista Thin Film Deposition April 30, 2004 THE UNIVERSITY OF TEXAS AT DALLAS ERIK JONSSON SCHOOL OF ENGINEERING
2.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 2 of 8 Copyright © 2003 The University of Texas at Dallas Four-Point Probe Operation Kevin Bautista April 30, 2004 TABLE OF CONTENTS Four-Point Probe Operation ............................................................................2 1 INTRODUCTION ............................................................................................3 1.1 Purpose ...................................................................................................3 1.2 Scope ......................................................................................................3 1.3 Definitions................................................................................................3 OVERVIEW........................................................................................................3 1.4 Four-Point Probe Overview .....................................................................3 1.5 Limits of Measurement Capability............................................................4 2 Film Thickness Measurement......................................................................4
3.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 3 of 8 Copyright © 2003 The University of Texas at Dallas 1 INTRODUCTION 1.1 Purpose This document describes the procedure for measuring sheet resistance on substrates using the Alessi Four-Point Probe. 1.2 Scope This document describes substrate metrology using the Alessi Four-Point Probe. Parameters such as film thickness, sheet resistance, and bulk resistivity can be evaluated using the Four-Point Probe. 1.3 Definitions Angstrom (Å) A unit used to measure very small lengths, such as wave length. Equal to 10-10 m Substrate The material of which something is made. In this case, a Si wafer or glass slide. Wafer A thin slice of semiconductor (such as silicon) used as a base for an electronic component, or substrate. OVERVIEW 1.4 Four-Point Probe Overview The Four-Point Probe can be used to measure film thickness, but is usually used to measure the sheet resistance of shallow layers (as a result of epitaxy, ion-implant, diffusion or sputtering) and the bulk resistivity of bare wafers. The schematic representation of the Four-Point Probe is shown in Figure 1. The theory behind this is a fixed current is injected into the wafer through the two outer probes, and a voltage is measured between the two inner probes. If probes with uniform spacing s are placed on an infinite slab material, then the resistivity, ρ, is given by ρ = 2πsV/I µOhm-Centimeters for t>>s and ρ = (πt/ln2)V/I µOhm-Centimeters for s>>t,
4.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 4 of 8 Copyright © 2003 The University of Texas at Dallas with t representing the thickness of the thin film. For shallow layers, the above equation gives the sheet resistance as Rs = ρ/t=(πt/ln2)V/I=4.53V/I µOhm-Centimeter for s>>t. The approximation used in the above equations is easily met for shallow layers in silicon. Figure 1 – Four-Point Probe schematic (left) and actual (right). 1.5 Limits of Measurement Capability 1. The probes must be able to make ohmic contact with the material. Gallium Arsenide cannot be probed with this particular model. 2. Very low resistive material (e.g. aluminum, gold, platinum) requires the maximum current from the current source to achieve a reading on the display. Only very thin films (100’s of Angstroms up to 1 micron thickness) can be measured. The current through the probe is best restricted to 10 mA because of heating effects and excessive current density at the probe tips. 3. High sheet resistivity material (e.g. ion implanted silicon wafers, silicon on sapphire) can be measured using very low currents (values of 1 µA or less) and avoiding a greater voltage indication than 200mV. 4. Low level measurements are negatively affected by various sources. 5. Know your substrate. An unclean sample or a sample that has surface doping will lead to inaccurate figures due to an impeded ohmic contact or current leakage. 2 Film Thickness Measurement 1. Powering On the Four-Point Probe 1.1 Turn on the power strip located below the Four-Point Probe (Figure 2). This will activate the vacuum pump, which should be heard, and the top Keithley 2400 source meter display will illuminate.
5.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 5 of 8 Copyright © 2003 The University of Texas at Dallas Figure 2 – Power Strip on 2. Configure the Keithley 2400 Source Meter 2.1 If the Keithley is not illuminated after the power strip is turned on, assure that the power switch, located on the lower left of the source meter, is in the “on” position. 2.2 Press the “CONFIG” key on the front of the instrument. Figure 3 – Select “CONFIG” 2.3 Press the “Ω” key. Figure 4 – Select “ ” 2.4 Use the “right/left” arrow keys to select “SENSE-MODE.” Press “Enter” to select and the following screen will appear.
6.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 6 of 8 Copyright © 2003 The University of Texas at Dallas Figure 5 – Select “4-WIRE” 2.5 Select “4-WIRE” using the “right arrow” key and pressing “ENTER.” 2.6 Exit this menu by pressing “EXIT.” 2.7 The upper right portion of the LCD display should read “4W AUTO.” If not, repeat this procedure. Figure 6 – Resistance measurement display 2.8 Press the “Ω” key to set the instrument to measure resistance. 3. Measure a sample 3.1 Place the sample under the probe head. To get an accurate measurement, the substrate must be placed such that the probe contacts are in the center of the substrate.
7.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 7 of 8 Copyright © 2003 The University of Texas at Dallas Figure 7 – Place wafer under probe 3.2 Press and hold the button on the right front side of the probe platform. This will move the probe tips onto the sample. Figure 8 – Lower the probe onto the wafer 3.3 Press the “Output” button on the right side of the Keithley display, while holding the button on the probe platform. The display will show the resistance measured.
8.
DOCUMENT TITLE: Four-Point
Probe Operation DOCUMENT NUMBER: SP2004-TF-005 EDITION: 1.0 PAGE: 8 of 8 Copyright © 2003 The University of Texas at Dallas Figure 9 – Measure resistance of the sample 3.4 Press the “Output” button again to turn off the output. NOTE: This step must be followed in order to avoid arcing from the probe tips to the substrate. Arcing will damage the equipment as well as the sample being measured. 3.5 Release the button on the probe stand. The probe head will raise. 3.6 Multiply the recorded measured resistance by 4.532. This product is the sheet resistance, in Ω/square, of the film under measurement. 3.7 Multiply the sheet resistance by the film thickness, in cm. This will be the resistivity of the film, in Ω-cm. 3.8 Repeat 3.1 through 3.7 for additional samples. 4 End of Procedure 4.1 Turn off power strip beneath the table.
Baixar agora