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FINE CHARACTERIZATION OF
NANOSCALE MATERIALS
BY TEM METHODS
Daniel M. Ugarte
Dept. Física Aplicada, Instituto de Física Gleb Wataghin-IFGW
Univ. Estadual de Campinas- UNICAMP, Campinas SP BRAZIL
Outline:
Introduction : Science progress: Ideas vs Tools
& new TEM paradigm (instrumentation)
TEM studies of Nanosystems:
Semiconductor NWs: defects & lattice distortion
Precession Electron Diffr. (PED): Screw disloc. +Torsion (Eshelby Twist)
Nanoparticles Characterization: beyond imaging
Pair Distrib. Function (PDF+PED)
Challenging aspects: an Unsolved Equation
Complex instrumentation & Human Resources Formation
Summary & …
Epilogue & aknowledgments
LEGO, danês ”leg godt”
“Play well!!!"
by Richard Feymann (December 29th 1959)
There's Plenty of Room at the Bottom
…arrange the atoms the way we want;
…greater range of possible properties
…possible by laws of physics. …
see individual atoms distinctly?
… importance of improving the electron microscope
not against the laws of diffraction of the electron.
The Nobel Prize
in Physics 1965
SCIENCE,
VOL 338, 14 DEC 2012
Achieving Great Scientific Progress
Thomas Kuhn (1922-1996) 100 Years
The Structure of Scientific Revolutions (1962)
“paradigm” (system of ideas “) discontinuous shift from one paradigm to other
Image and Logic (1997) Peter Galison
A different view of history…dominated by tools (nuclear physics, astronomy,...
XX century greatest scient. discovery: DNA (X-ray diffraction)
normal science ???? in Kuhn Picture
2008 KAVLI PRIZE
in Nanoscience
Geometrical parameters
(Radius, Helicity)
conductors, insulator, semiconductor
no doping needed
Future ...Electronics (bottom-up)...
Nature 354, 56 (07 November 1991)
NW
Axis
Sumio Iijima
Discovery of Carbon nanotubes
Helicity!!!!! e-Diffraction:
Atomic resolution imaging
HRTEM seeing atoms (counting layers)
Semiconductor Metallic
EF
EF
Lagos et al, PRL 106, 055501 (2011)
Tamb ~ 300 K
Maureen Lagos
2012 CAPES Prize
PhD Physics
(Present:
Prof. MacMaster U.)
In-situ: Mechanical Elongation of atomic-szie Au wires (T dependence)
T ~ 150 K
Uncorrected TEM
+ Liq . N2 holder
TEM Paradigm Shifter: Aberration Correction
TEM is based on
magnetic lenses
Cylindrically Symm.
Magn. Lenses
are alway convergent
𝐶 → 𝜃
Strong Spherical aberration
Lorentz force
Multipolar Magnetic Lenses
S
S
N
N
N
S
F
B
v
Breaking
rotational symmetry
(limitation for ~ 50 ys)
Sub-ångström resolution
imaging and chemical analysis
using electron beams."
The Kavli Prize
in Nanoscience
2020
M. Haider, H. Rose, K. Urban, O. L. Krivanek
Kavli Prize Week Sept. 3-9 2022; Oslo & Trondheim, Norway.
Thomas, et al, CPL 631 (2015) 103
The rapidly changing face of TEM electron microscopy
Tomography
1D
Spectrum
3D
Data set
4D
Data set
Real Space
Shape, Atomic posit.
Spectroscopic
3D reconstruction
Reciprocal Space
3D reconstruction
Big Data
Machine learning
New Detectors
Quantitative Anal;
Spectr, Diffr & images
In-situ: T, Gazes,
liquids, etc.
Radiation Damage (Low dose)
Proteins << 1 e/Å2
STEM, maps 106 -109 e/Å2
Ptychography
(phase)
Electron Diffraction mapping (multiple Scattering)
Dynamical 𝒉𝒌𝒍 𝒉𝒌𝒍
𝟐
Wide
beam
STEM
Narrow beam
(4D STEM)
translating unknown structures or processes into
quantifiable, physically meaningful descriptors
and model representations.
Qualitative
Quantitative comparisons
(Residue)
Refinement
Model/ Simulations
Machine learning
TEM Characterization of NP:
Imaging most popular
LNNano, Campinas
Murilo Moreira
AuAg
Atomic Resolution
Electron
diffraction
Critical issues
Beam damage
Low Statistic
(few nanoparticles)
103 e-/Å2
104-106 e-/Å2
Low Dose approaches for
Structural Characterization
Alternatives to Imaging ??
Wide beam
Projection
Narrow beam
Scanning
HAADF
PRL 124, 106105(2020)
100 nm
6 e-/A2
beam  ~5 nm
Macpherson et al, Nature 294, 607 (2022)
Pt
perovskite
(extremely beam sensitive)
Cs0.05FA0.78MA0.17Pb(I0.83Br0.17)3
FA formamidinium
MA methylammonium
Direct Detection Camera
512x512 (medipix)
Electron Diffraction
Molecules Crystallography
(Cryo MicroED experiments)
Dimension < µm
Mass: Mx-Ray ~ Me x 104
Dose < 5 e-/Å2
Pharmaceutical Industry
Electron diff Pattern under “quase” Kinematical conditions
Precession Electron Diffraction- PED
Midgley & Eggeman IUCrJ 2 (2015) 126
Vincent & Midgley,
Ultramic.
53 (1994) 271.
Precession
de-Scan
Static Diff pattern
Hollow cone
Convent. Precess.
e-
Beam
y
z
x
Crystal orientation
(hkil)
along e-beam Direction
In Sample coord.
ND
PED
+nm Probe
+Fast Adq.
(SPED)
+ Pattern. Matching
(Kinem. patterns)
Post-Processing
Rauch, E. F. et al.. Microsc. Anal. 22, S5–S8 (2008).
ACOM
(Autom. Crystal orient. map)
Maps of Crystal
orientation and phases
Outline:
Introduction : generating novel ideas/concepts (NANO )
& new TEM paradigm (instrumentation)
TEM studies of Nanosystems:
Semiconductor NWs: defects & lattice distortion
Precession Electron Diffr.: Screw dislocation +Torsion (Eshelby Twist)
Nanoparticles Characterization: beyond imaging
Pair Distrib. Function (PDF+PED)
Challenging aspects: an Unsolved Equation
Complex instrumentation & Human Resources Formation
Summary & …
Epilogue & aknowledgments
Long and Short NWs
(~2 µm & > 4 µm )
[0-110] [2-1-10]
CBED
(1 nm probe)
InP NWs (Wurzite)
(0.14 ± 0.01 ) °/nm
30°Rot
Screw
dislocation
Frank
Model Growth
III-V Semiconductor Nanowires
CBE Reactor (Chem. Beam Epitaxy)- UNICAMP
Prof. Monica Cotta
Tizei et al.,
PRL 107, 195503 (2011)
P
In
BF-STEM:
periodical contrast bands
Crystal Torsion
Luiz Tizei
Present:
CNRS-Orsay FR
VLS-Au Catalyst.
Eshelby twist (50s- Classical Elasticity Theory)
Eshelby JD, J. App. Phys. 24, 176 (1953)
First observation 2008:
Branched NWs PbSe and PbS
Bierman MJ et al,
Science 320, 1060 (2008)
Screw
Dislocation
(Torque)
+
Free surface
(whisker or NW)
Double Helix Tower
Stockholm
Turning Torso, Malmö
Finite cylinder with
Axial Screw Dislocation)
𝟐
Torsion
B Burgers vector
R radius
ND= Crystal Normal
(hki 0)

e-beam
1) Torsion (Eshelby Twist)
2) Screw Dislocation
z
x
y
L
𝑁
𝑁
[0001] Crystal
Helicoidal Planes
Eshelby Twist (axial screw Dislocation)
InP NW (Wurtzite)
e-
Beam
y
z
x
PED yields
Crystal orientation
(hkil)
along
e-beam Direction
In Sample coord.)
ND
Disoreintation vs.
Reference Wire axis
P
In
High Spatial Resolution PED
(HSR-PED) or 4D STEM
Torsion
Screw
Dislocation
CM300-F 200 kV, ASTAR
prec. Angle 0.5 deg.,
Patterns 144x144 pixels
Dept. Mat. Sci. Metal.
Univ. Cambridge UK
0001 -2110
-1010
Torsion rate |A|
(0.070±0.002) °/nm
3D NW shape
(hki0)
 3D determination of wire shape
VADF
f
3D
2D
300 nm
0
L
y
z
x
𝟐
Wire do not need to be perfectly oriented
(InP beam sensitive)
Ugarte et al, Nano Research 12, 939 (2019)
(hkil)
SPED 10 ms/pixel
Rotation 100 hz
PED pattern 144 X 144 pixels
~20000 pix
Highly distorted
Precession
de-Scan
Static pattern
100-1000 frames/s
Got linear response
Intensity-
Quantitative
ED Crystallography
1) Monocrystal
2) Pair Distrib.Function
PDF (+PED)
PED
Brazda et al, Science 364, 667 (2019)
Optical
recording
Phosporous
screen
e-Powder
Diffr.
Hoque et al,
J. Phys. Chem C 123.19894 (2019)
Correa et al,
ACS Applied Nanomat 4, 12541 (2021)
1) ACOM
(Autom. Crystal orient. map)
Post- processing 4D-STEM
Ihkl
-based
In-column camera
(CCD,CMOS, DDC)
2) Ring
Pattern
Prof. Dr. Arturo Ponce
Dept. Phys. Astron.
UTexas (Santo Antônio).
Jeol 2010F
TVIPS F416 detector CMOS
(16 bits, 4096x4096 bits).
Quantitative Comparison
Intensities Ihkil
(Experim. vs. Model)
Intensity
2)
V-ADF
20 nm
1) Template Matching
Diff. Pattern
Library
Cross-
correlation
Best fit
Kinematical
pattern
Refinement
3 Optimized Parameters
Torsion angle
C-axis Orientation
Scaling Intensity Factor
( ~80-100 s/pattern)
Correa et al, unpublished
ACOM (Autom. Crystal orient. map)
2-beam modeling
Dynam. Diffr. Approx.
Rauch et al, Symmetry 13, 1675 (2021)
Atomic scatt. factor Z
No Bragg angle dependence
Gjonnes, Ultram. 69,1 (1997) Oleynikov et al, Ultram. 107, 523 (2007)
Applied Ln to
Experim
Intensities
+
Cross Correl.
Template Matching
py4DSTEM (freeware)
Ophus et al, Microsc Microanal. 28. 390 (2022), .
Pyxem (freeware, Hyperspy)
McLaren et al, Microsc,&Microana, 26, 1110 (2020).
Cautaerts et al, Ultramicr.237, 113517 (2022)
Rauch et al,
Symmetry
13, 1675 (2021)
Expected: 0.017 ± 0.002 °/𝑛𝑚
Refinment ~60-80 s/pixel
R ~20 %
As expected using 2-beam model
Palatinus et al, Acta Cryst. B 71, 740 (2016)
Template Matching Refinement Ihkl
𝑅 =
∑ 𝐼 − 𝐼 𝐼
∑ 𝐼
𝒃
𝒄
𝒅
𝒂
y
z
x
X0.1
X0.15
Twist Rate Values
(0.006 ± 0.001) °/nm
Outline:
Introduction : generating novel ideas/concepts (NANO )
& new TEM paradigm (instrumentation)
TEM studies of Nanosystems:
Semiconductor NWs: defects & lattice distortion
Precession Electron Diffr.: Screw dislocation +Torsion (Eshelby Twist)
Nanoparticles Characterization: beyond imaging
Pair Distrib. Function (PDF+PED)
Challenging aspects: an Unsolved Equation
Complex instrumentation & Human Resources Formation
Summary & …
Epilogue & aknowledgments
Gaz
Coil AuAg
Cluster source
Cylindrical sputtering
1 3 5 [nm]
Counts
Mass-selected Cluster (Prof. Varlei)
Varlei Murilo (Ph.D)
Mach. Learning,
EDS-STEM
Leonardo (Ph.D.)
PED, ePDF
Diffraction
de Sá A. et al, J. Vac. Sci. Technol. B, 32, 061804 (2014)
Quantitative EDS on NP
(Big data, Mach. Learn.,, etc.)
( Inv Talk: V. Rodrigues,
Symp. L, X Micromat, Wedn. 28/09 , 14.30 )
Statistical validity of derived conclusion?
Low Dose approaches vs Imaging
(1-10 e/Å2 vs 106 e/Å2 )
Pair Distribution Function based on PED
Complex Polycyrst. Structure???
AuAg alloy NP
Titan Themis
i) e-Diffraction-based PDF
Abeykoon et al. (Billingue group), Z. Kristallogr. 227, 248 (2012)
SUePDF Software, Tran et al, J. Appl. Cryst. 50, 304 (2017)
Need of additional methods for quantitative and rapid
structural characterization of nanomaterials
Billingue & Levin, The Problem with determining atomic Structure at the Nanoscale, Science, 316, 561 (2007)
Pair Distribution Function (PDF)
Alternative for Crystallography in NANO
(peak broadening, etc.)
Billinge SJL. The nanostructure problem. Physics 3, 25 (2010)
Billinge SJL. The rise of the X-ray PDF method.
Phil. Trans. R. Soc. A 377: 20180413 (2019 )
Quantitative information may be
extracted from PDFs
using modeling.
JATOBÁ beamline high-energy, high-photon flux beam
focused on m size full X-ray scattering technique
+ PED
( 𝒉𝒌𝒍 𝒉𝒌𝒍
𝟐
)
Tutorial on
Powder X-ray Diffr.
for Characterizing
Nanoscale Materials
ACS Nano 13, 7359
(2019)
CdS spher. NP
Pair Distribution Function
- Suited for materials without long-range order
(Amorphous, Nanoparticles)
- Sensitive to NP domain structure
- Describes the distances between pairs of atoms
Start:
Powder Diffraction
(Reciprocal Space)
Reduced PDF
(Real Space)
Fourier T
to
Real Space
ePDFAllows
Mean Information
Minimal Sample Mass
(<ng)
Low Dose ( < 10 e-/Å2)
Quantitative
Crystallography
(Model vs Measurement)
2
Underneath the Bragg Peaks:
T. Egami and S.J.L. Billinge (2003)
Pair Distribution Function (PDF)
Mid-range
Short Range
SAED = 39% PED = 22%
Implementation of ePDF + PED
cryo-TEM holder (Gatan 915)
JEOL 2010F at 200 kV.
ASTAR Nanomegas
16-megapixel F416
CMOS camera (TVIPS)
U-Texas San Antonio
(Prof. A. Ponce)
Using Simple
Kinematical Modeling Software: SuePDF + DiffPy
Electron Diffraction:
Special Needs
Home-made Software (Python)
Aim: TEM specificity
- Astigmatism correction and pattern centering
- Azimuthal integration
- Background subtraction & normalization
- PDF calculation
- Powder diff. simulation: Debye Scattering Eq.
- Residue Calculation: Quantitative
6 nm
5 -10 nm
(Measured)
Astigm Corr.: F. Niekiel et al., Ultramic., 2017, 176, 161
DSE: B.D. Hall et al., Computer in Phys., 1991, 5, 414
Data Analysis
L. M. Correa
IFGW, Brazil.
Pair Distrib.Function (PDF) Based on PED
Composition : CAu ~70%
Mean Diameter : 6 nm
Mass : ≈ 2000 NPs or 4 fg
AuAg NP
PED 2.0º
- Not at all a fancy TEM
- TECNAI G2 200kV (LaB6),
(Univ. Fed. São Carlos)
- CCD Orius (Axial Cam!!!)
- RT , Dose = 10 e-/Å2
Cluster Source:
de Sá A. D. T., et
al.,
J. Vac. Sci. Technol.
B, 2014, 32, 061804
Data Processing (home-made)
1st Condition, Total Scatt. Conservation
2nd Condition, High Q
Equal
Background Substraction
Simultaneous Optimization
potential function (Q –n)
+
a-C Substrate (measured)
a-C
Simulation Powder Diff. Pattern (Debye Eq.)
Hall &, Monot, Computers in Physics 5, 414 (1991)
Non-periodic struct.
Disorder, etc.
( ) ( )
fcc
Dh Ico
Four different models
(a) fcc;
(b) single twinned fcc;
(c) Dh; decahedral,
bco-Body-Cent.-Orthorombic;
(d) Ih Icosahedral (rombohedral)
Why Dh is better?
A twin defect shows local order different from fcc or bco
Dh provides the correct balance
of local order and medium-range order
(different tetrhedra have
well established orientation relationship)
Optimization Results for SAED/PED
PED smaller residues
Quantitative comparison with
Kinematical diffraction modeling.
Only2 Parameters Optimization:
1) Debye-Waller 2) NP diameter
Complex Sample: Size distribution,
apparent agglomeration, polycrystalline??
Only 3 Parameters:
(1) Debye-Waller
Size Distribution ((2) mean and (3) width)
NP Structure
Decahedral
Considering Size Distribution
Structure Description (Residue):
Our Conventional TEM: 15%
Synchrotron: 12 to 17%
Correa et al., ACS Applied Nanomat. 2021, 4, 11, 12541
15%
20%
22%
23%
Longer r (bigger NP, stronger Dynamic. Effects)
Outline:
Introduction : generating novel ideas/concepts (NANO )
& new TEM paradigm (instrumentation)
TEM studies of Nanosystems:
Semiconductor NWs: defects & lattice distortion
Precession Electron Diffr.: Screw dislocation +Torsion (Eshelby Twist)
Nanoparticles Characterization: beyond imaging
Pair Distrib. Function (PDF+PED)
Challenging aspects: an Unsolved Equation
Complex instrumentation & Human Resources Formation
Summary & …
Epilogue & aknowledgments
“reproducibility crisis”, (U.S. National Academies of Science)
poor and incorrect materials data analysis in the literature.
analysis of XPS data in journals that emphasize next generation materials,
30% of the analyses are completely incorrect (Linford and Major, 2019).
proliferation of advanced analytical instruments seem to
have exceeded the world’s supply of expertise
to collect, interpret, and review the results obtained from them.
NOT “Black-box”
Push-botton Operators
need for reproducibility
For research results to have longevity and impact,
others must be able to replicate it, build on it
and take it in new directions
Nature, 608, 9 (4 August 2022)
Retraction Watch (Ivan Oransky)
evidence from surveys, studies and reports
~1 in 50 papers (~2%)
meet at least one criteria for retraction the
(Committee on Public. Ethics, non-profit collective in
Eastleigh, UK)
(actual rate 0.1%) 1/1000
A single method is rarely enough
electronic, magnetic, structural, thermal and many more …..
“Big” Facilities: Powerful “EXPENSIVE” machines
(ex. Synchrotron, state-of-the-art TEM, supercomputers,…)
“Small” science (universities)
individual-investigator laboratory
Dept, Ints., University
Materials characterization and the
evolution of material Sciences
CNPEM
Sirius
LMNANO
Tools OK
Higher impact....
?????
What about Ideas?
Human Resources
Formation
Starting research program,
questions, studying, testing,
routine work, Basic Infrastructure
Understanding
focusing ideas
Developing intuition
Consolidating
expertise/tech. ability
profound question!!
viable answer
time
Cutting-edge study
(ex. 10 hs TEM)
(Big Facility)
Bottom-up
1000
hs
.
TEM
Summary
- Electron nano-crystallography: PED (Tomography)
2022 new section of IUCrJ dedicated to e- crystallography
- Scanning Electron Diffraction (4D-STEM) strong growth
Strain nm-resolution (ACOM based on intesities Ihkl)
low dose 5-10 e/Å2 ,PED Patterns->Machine learning
- e-PDF+PED: Quantitative statistical information NP ensemble
sample (< pgr) Low dose (10 e/Å2) Low profile TEM!!!!
- Quantitative Chemical Composition inside few-nm NPs (EDS , ML)
Not presented ( Inv Talk: V. Rodrigues, Symp. L, X Micromat, Wedn. 14.30)
Funding (SPED NW):
Funding (ePDF): Advanced Microscopy Center at UTSA.
Dept.of Defense The Welch Foundation NSF
Brazil: CNPq, FAPESP, UNICAMP,CAPES
Epilogue & Aknowledgments: A few more slides
Start an Electron Microscopy Facility (90´s)
300kV
HRTEM
LV-SEM
FEG-SEM 200kV CTEM 200kV FEG-TEM
1999 2007-2009 Objectives (Since 1994)
1) To operate as an
“Actual” open
multi-user laboratory
(not Feudal, not sycophantic)
2) To train human resources
(Users/Students must operate the
microscope by themselves)
Best way to induce change
Education/ Teaching Young researchers
Still inside this endless battle!!
(Since 1994 .....
still many operational windmills.
“José Arana Varela” Award, XX B-MRS Meeting (SBPMat )
Annual SBPMat Award for Contribution to Braz. Materials Science
2002 (J.A.Varela, E. Longo, E. Leite)
UNESP, UFSCar
FEG-TEM Expansion, Fapesp Sci. Dir.
1998 (Christian Colliex-
Lab. Phys. Sol., U. Paris Sud)
1994 (Prof. Cecilia Salvadori-USP)
Drive CPS-Caxambu MG-CPS
Quotation Sample Prep. Lab.
(Clatches periode)
Feb 2000 Nov 2000 Dec 1998, Daniela, Paulinho, Varlei
LNLS Directors: Cylon, Aldo, Ricardo Initial LME Team
9th Nov 2020,
SBPMat Recognition
Placa gravada com os dizeres:
A Sociedade Brasileira de Pesquisa de Materiais (SBPMat)
homenageia a contribuição fundamental de Ricardo Rodrigues
para o êxito do desenvolvimento e implantação das
fontes brasileiras de luz síncrotron UVX e Sirius,
que colocaram o Brasil
na vanguarda mundial da pesquisa em materiais.

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FINE CHARACTERIZATION OF NANOSCALE MATERIALS BY TEM METHODS

  • 1. FINE CHARACTERIZATION OF NANOSCALE MATERIALS BY TEM METHODS Daniel M. Ugarte Dept. Física Aplicada, Instituto de Física Gleb Wataghin-IFGW Univ. Estadual de Campinas- UNICAMP, Campinas SP BRAZIL
  • 2. Outline: Introduction : Science progress: Ideas vs Tools & new TEM paradigm (instrumentation) TEM studies of Nanosystems: Semiconductor NWs: defects & lattice distortion Precession Electron Diffr. (PED): Screw disloc. +Torsion (Eshelby Twist) Nanoparticles Characterization: beyond imaging Pair Distrib. Function (PDF+PED) Challenging aspects: an Unsolved Equation Complex instrumentation & Human Resources Formation Summary & … Epilogue & aknowledgments
  • 3. LEGO, danês ”leg godt” “Play well!!!" by Richard Feymann (December 29th 1959) There's Plenty of Room at the Bottom …arrange the atoms the way we want; …greater range of possible properties …possible by laws of physics. … see individual atoms distinctly? … importance of improving the electron microscope not against the laws of diffraction of the electron. The Nobel Prize in Physics 1965 SCIENCE, VOL 338, 14 DEC 2012 Achieving Great Scientific Progress Thomas Kuhn (1922-1996) 100 Years The Structure of Scientific Revolutions (1962) “paradigm” (system of ideas “) discontinuous shift from one paradigm to other Image and Logic (1997) Peter Galison A different view of history…dominated by tools (nuclear physics, astronomy,... XX century greatest scient. discovery: DNA (X-ray diffraction) normal science ???? in Kuhn Picture
  • 4. 2008 KAVLI PRIZE in Nanoscience Geometrical parameters (Radius, Helicity) conductors, insulator, semiconductor no doping needed Future ...Electronics (bottom-up)... Nature 354, 56 (07 November 1991) NW Axis Sumio Iijima Discovery of Carbon nanotubes Helicity!!!!! e-Diffraction: Atomic resolution imaging HRTEM seeing atoms (counting layers) Semiconductor Metallic EF EF
  • 5. Lagos et al, PRL 106, 055501 (2011) Tamb ~ 300 K Maureen Lagos 2012 CAPES Prize PhD Physics (Present: Prof. MacMaster U.) In-situ: Mechanical Elongation of atomic-szie Au wires (T dependence) T ~ 150 K Uncorrected TEM + Liq . N2 holder
  • 6. TEM Paradigm Shifter: Aberration Correction TEM is based on magnetic lenses Cylindrically Symm. Magn. Lenses are alway convergent 𝐶 → 𝜃 Strong Spherical aberration Lorentz force Multipolar Magnetic Lenses S S N N N S F B v Breaking rotational symmetry (limitation for ~ 50 ys) Sub-ångström resolution imaging and chemical analysis using electron beams." The Kavli Prize in Nanoscience 2020 M. Haider, H. Rose, K. Urban, O. L. Krivanek Kavli Prize Week Sept. 3-9 2022; Oslo & Trondheim, Norway.
  • 7. Thomas, et al, CPL 631 (2015) 103 The rapidly changing face of TEM electron microscopy Tomography 1D Spectrum 3D Data set 4D Data set Real Space Shape, Atomic posit. Spectroscopic 3D reconstruction Reciprocal Space 3D reconstruction Big Data Machine learning New Detectors Quantitative Anal; Spectr, Diffr & images In-situ: T, Gazes, liquids, etc. Radiation Damage (Low dose) Proteins << 1 e/Å2 STEM, maps 106 -109 e/Å2 Ptychography (phase) Electron Diffraction mapping (multiple Scattering) Dynamical 𝒉𝒌𝒍 𝒉𝒌𝒍 𝟐 Wide beam STEM Narrow beam (4D STEM)
  • 8. translating unknown structures or processes into quantifiable, physically meaningful descriptors and model representations. Qualitative Quantitative comparisons (Residue) Refinement Model/ Simulations Machine learning
  • 9. TEM Characterization of NP: Imaging most popular LNNano, Campinas Murilo Moreira AuAg Atomic Resolution Electron diffraction Critical issues Beam damage Low Statistic (few nanoparticles) 103 e-/Å2 104-106 e-/Å2 Low Dose approaches for Structural Characterization Alternatives to Imaging ?? Wide beam Projection Narrow beam Scanning HAADF PRL 124, 106105(2020) 100 nm 6 e-/A2 beam  ~5 nm Macpherson et al, Nature 294, 607 (2022) Pt perovskite (extremely beam sensitive) Cs0.05FA0.78MA0.17Pb(I0.83Br0.17)3 FA formamidinium MA methylammonium Direct Detection Camera 512x512 (medipix)
  • 10. Electron Diffraction Molecules Crystallography (Cryo MicroED experiments) Dimension < µm Mass: Mx-Ray ~ Me x 104 Dose < 5 e-/Å2 Pharmaceutical Industry
  • 11. Electron diff Pattern under “quase” Kinematical conditions Precession Electron Diffraction- PED Midgley & Eggeman IUCrJ 2 (2015) 126 Vincent & Midgley, Ultramic. 53 (1994) 271. Precession de-Scan Static Diff pattern Hollow cone Convent. Precess. e- Beam y z x Crystal orientation (hkil) along e-beam Direction In Sample coord. ND PED +nm Probe +Fast Adq. (SPED) + Pattern. Matching (Kinem. patterns) Post-Processing Rauch, E. F. et al.. Microsc. Anal. 22, S5–S8 (2008). ACOM (Autom. Crystal orient. map) Maps of Crystal orientation and phases
  • 12. Outline: Introduction : generating novel ideas/concepts (NANO ) & new TEM paradigm (instrumentation) TEM studies of Nanosystems: Semiconductor NWs: defects & lattice distortion Precession Electron Diffr.: Screw dislocation +Torsion (Eshelby Twist) Nanoparticles Characterization: beyond imaging Pair Distrib. Function (PDF+PED) Challenging aspects: an Unsolved Equation Complex instrumentation & Human Resources Formation Summary & … Epilogue & aknowledgments
  • 13. Long and Short NWs (~2 µm & > 4 µm ) [0-110] [2-1-10] CBED (1 nm probe) InP NWs (Wurzite) (0.14 ± 0.01 ) °/nm 30°Rot Screw dislocation Frank Model Growth III-V Semiconductor Nanowires CBE Reactor (Chem. Beam Epitaxy)- UNICAMP Prof. Monica Cotta Tizei et al., PRL 107, 195503 (2011) P In BF-STEM: periodical contrast bands Crystal Torsion Luiz Tizei Present: CNRS-Orsay FR VLS-Au Catalyst.
  • 14. Eshelby twist (50s- Classical Elasticity Theory) Eshelby JD, J. App. Phys. 24, 176 (1953) First observation 2008: Branched NWs PbSe and PbS Bierman MJ et al, Science 320, 1060 (2008) Screw Dislocation (Torque) + Free surface (whisker or NW) Double Helix Tower Stockholm Turning Torso, Malmö Finite cylinder with Axial Screw Dislocation) 𝟐 Torsion B Burgers vector R radius
  • 15. ND= Crystal Normal (hki 0)  e-beam 1) Torsion (Eshelby Twist) 2) Screw Dislocation z x y L 𝑁 𝑁 [0001] Crystal Helicoidal Planes Eshelby Twist (axial screw Dislocation) InP NW (Wurtzite) e- Beam y z x PED yields Crystal orientation (hkil) along e-beam Direction In Sample coord.) ND Disoreintation vs. Reference Wire axis P In High Spatial Resolution PED (HSR-PED) or 4D STEM Torsion Screw Dislocation CM300-F 200 kV, ASTAR prec. Angle 0.5 deg., Patterns 144x144 pixels Dept. Mat. Sci. Metal. Univ. Cambridge UK
  • 16. 0001 -2110 -1010 Torsion rate |A| (0.070±0.002) °/nm 3D NW shape (hki0)  3D determination of wire shape VADF f 3D 2D 300 nm 0 L y z x 𝟐 Wire do not need to be perfectly oriented (InP beam sensitive) Ugarte et al, Nano Research 12, 939 (2019) (hkil)
  • 17. SPED 10 ms/pixel Rotation 100 hz PED pattern 144 X 144 pixels ~20000 pix Highly distorted Precession de-Scan Static pattern 100-1000 frames/s Got linear response Intensity- Quantitative ED Crystallography 1) Monocrystal 2) Pair Distrib.Function PDF (+PED) PED Brazda et al, Science 364, 667 (2019) Optical recording Phosporous screen e-Powder Diffr. Hoque et al, J. Phys. Chem C 123.19894 (2019) Correa et al, ACS Applied Nanomat 4, 12541 (2021) 1) ACOM (Autom. Crystal orient. map) Post- processing 4D-STEM Ihkl -based In-column camera (CCD,CMOS, DDC) 2) Ring Pattern
  • 18. Prof. Dr. Arturo Ponce Dept. Phys. Astron. UTexas (Santo Antônio). Jeol 2010F TVIPS F416 detector CMOS (16 bits, 4096x4096 bits). Quantitative Comparison Intensities Ihkil (Experim. vs. Model) Intensity 2) V-ADF 20 nm 1) Template Matching Diff. Pattern Library Cross- correlation Best fit Kinematical pattern Refinement 3 Optimized Parameters Torsion angle C-axis Orientation Scaling Intensity Factor ( ~80-100 s/pattern) Correa et al, unpublished ACOM (Autom. Crystal orient. map) 2-beam modeling Dynam. Diffr. Approx. Rauch et al, Symmetry 13, 1675 (2021) Atomic scatt. factor Z No Bragg angle dependence Gjonnes, Ultram. 69,1 (1997) Oleynikov et al, Ultram. 107, 523 (2007)
  • 19. Applied Ln to Experim Intensities + Cross Correl. Template Matching py4DSTEM (freeware) Ophus et al, Microsc Microanal. 28. 390 (2022), . Pyxem (freeware, Hyperspy) McLaren et al, Microsc,&Microana, 26, 1110 (2020). Cautaerts et al, Ultramicr.237, 113517 (2022) Rauch et al, Symmetry 13, 1675 (2021) Expected: 0.017 ± 0.002 °/𝑛𝑚 Refinment ~60-80 s/pixel R ~20 % As expected using 2-beam model Palatinus et al, Acta Cryst. B 71, 740 (2016) Template Matching Refinement Ihkl 𝑅 = ∑ 𝐼 − 𝐼 𝐼 ∑ 𝐼 𝒃 𝒄 𝒅 𝒂 y z x X0.1 X0.15 Twist Rate Values (0.006 ± 0.001) °/nm
  • 20. Outline: Introduction : generating novel ideas/concepts (NANO ) & new TEM paradigm (instrumentation) TEM studies of Nanosystems: Semiconductor NWs: defects & lattice distortion Precession Electron Diffr.: Screw dislocation +Torsion (Eshelby Twist) Nanoparticles Characterization: beyond imaging Pair Distrib. Function (PDF+PED) Challenging aspects: an Unsolved Equation Complex instrumentation & Human Resources Formation Summary & … Epilogue & aknowledgments
  • 21. Gaz Coil AuAg Cluster source Cylindrical sputtering 1 3 5 [nm] Counts Mass-selected Cluster (Prof. Varlei) Varlei Murilo (Ph.D) Mach. Learning, EDS-STEM Leonardo (Ph.D.) PED, ePDF Diffraction de Sá A. et al, J. Vac. Sci. Technol. B, 32, 061804 (2014) Quantitative EDS on NP (Big data, Mach. Learn.,, etc.) ( Inv Talk: V. Rodrigues, Symp. L, X Micromat, Wedn. 28/09 , 14.30 ) Statistical validity of derived conclusion? Low Dose approaches vs Imaging (1-10 e/Å2 vs 106 e/Å2 ) Pair Distribution Function based on PED Complex Polycyrst. Structure??? AuAg alloy NP Titan Themis
  • 22. i) e-Diffraction-based PDF Abeykoon et al. (Billingue group), Z. Kristallogr. 227, 248 (2012) SUePDF Software, Tran et al, J. Appl. Cryst. 50, 304 (2017) Need of additional methods for quantitative and rapid structural characterization of nanomaterials Billingue & Levin, The Problem with determining atomic Structure at the Nanoscale, Science, 316, 561 (2007) Pair Distribution Function (PDF) Alternative for Crystallography in NANO (peak broadening, etc.) Billinge SJL. The nanostructure problem. Physics 3, 25 (2010) Billinge SJL. The rise of the X-ray PDF method. Phil. Trans. R. Soc. A 377: 20180413 (2019 ) Quantitative information may be extracted from PDFs using modeling. JATOBÁ beamline high-energy, high-photon flux beam focused on m size full X-ray scattering technique + PED ( 𝒉𝒌𝒍 𝒉𝒌𝒍 𝟐 ) Tutorial on Powder X-ray Diffr. for Characterizing Nanoscale Materials ACS Nano 13, 7359 (2019) CdS spher. NP
  • 23. Pair Distribution Function - Suited for materials without long-range order (Amorphous, Nanoparticles) - Sensitive to NP domain structure - Describes the distances between pairs of atoms Start: Powder Diffraction (Reciprocal Space) Reduced PDF (Real Space) Fourier T to Real Space ePDFAllows Mean Information Minimal Sample Mass (<ng) Low Dose ( < 10 e-/Å2) Quantitative Crystallography (Model vs Measurement) 2 Underneath the Bragg Peaks: T. Egami and S.J.L. Billinge (2003) Pair Distribution Function (PDF) Mid-range Short Range
  • 24. SAED = 39% PED = 22% Implementation of ePDF + PED cryo-TEM holder (Gatan 915) JEOL 2010F at 200 kV. ASTAR Nanomegas 16-megapixel F416 CMOS camera (TVIPS) U-Texas San Antonio (Prof. A. Ponce) Using Simple Kinematical Modeling Software: SuePDF + DiffPy Electron Diffraction: Special Needs
  • 25. Home-made Software (Python) Aim: TEM specificity - Astigmatism correction and pattern centering - Azimuthal integration - Background subtraction & normalization - PDF calculation - Powder diff. simulation: Debye Scattering Eq. - Residue Calculation: Quantitative 6 nm 5 -10 nm (Measured) Astigm Corr.: F. Niekiel et al., Ultramic., 2017, 176, 161 DSE: B.D. Hall et al., Computer in Phys., 1991, 5, 414 Data Analysis L. M. Correa IFGW, Brazil. Pair Distrib.Function (PDF) Based on PED Composition : CAu ~70% Mean Diameter : 6 nm Mass : ≈ 2000 NPs or 4 fg AuAg NP PED 2.0º - Not at all a fancy TEM - TECNAI G2 200kV (LaB6), (Univ. Fed. São Carlos) - CCD Orius (Axial Cam!!!) - RT , Dose = 10 e-/Å2 Cluster Source: de Sá A. D. T., et al., J. Vac. Sci. Technol. B, 2014, 32, 061804
  • 26. Data Processing (home-made) 1st Condition, Total Scatt. Conservation 2nd Condition, High Q Equal Background Substraction Simultaneous Optimization potential function (Q –n) + a-C Substrate (measured) a-C Simulation Powder Diff. Pattern (Debye Eq.) Hall &, Monot, Computers in Physics 5, 414 (1991) Non-periodic struct. Disorder, etc. ( ) ( ) fcc Dh Ico
  • 27. Four different models (a) fcc; (b) single twinned fcc; (c) Dh; decahedral, bco-Body-Cent.-Orthorombic; (d) Ih Icosahedral (rombohedral) Why Dh is better? A twin defect shows local order different from fcc or bco Dh provides the correct balance of local order and medium-range order (different tetrhedra have well established orientation relationship) Optimization Results for SAED/PED PED smaller residues Quantitative comparison with Kinematical diffraction modeling. Only2 Parameters Optimization: 1) Debye-Waller 2) NP diameter
  • 28. Complex Sample: Size distribution, apparent agglomeration, polycrystalline?? Only 3 Parameters: (1) Debye-Waller Size Distribution ((2) mean and (3) width) NP Structure Decahedral Considering Size Distribution Structure Description (Residue): Our Conventional TEM: 15% Synchrotron: 12 to 17% Correa et al., ACS Applied Nanomat. 2021, 4, 11, 12541 15% 20% 22% 23% Longer r (bigger NP, stronger Dynamic. Effects)
  • 29. Outline: Introduction : generating novel ideas/concepts (NANO ) & new TEM paradigm (instrumentation) TEM studies of Nanosystems: Semiconductor NWs: defects & lattice distortion Precession Electron Diffr.: Screw dislocation +Torsion (Eshelby Twist) Nanoparticles Characterization: beyond imaging Pair Distrib. Function (PDF+PED) Challenging aspects: an Unsolved Equation Complex instrumentation & Human Resources Formation Summary & … Epilogue & aknowledgments
  • 30. “reproducibility crisis”, (U.S. National Academies of Science) poor and incorrect materials data analysis in the literature. analysis of XPS data in journals that emphasize next generation materials, 30% of the analyses are completely incorrect (Linford and Major, 2019). proliferation of advanced analytical instruments seem to have exceeded the world’s supply of expertise to collect, interpret, and review the results obtained from them. NOT “Black-box” Push-botton Operators need for reproducibility For research results to have longevity and impact, others must be able to replicate it, build on it and take it in new directions Nature, 608, 9 (4 August 2022) Retraction Watch (Ivan Oransky) evidence from surveys, studies and reports ~1 in 50 papers (~2%) meet at least one criteria for retraction the (Committee on Public. Ethics, non-profit collective in Eastleigh, UK) (actual rate 0.1%) 1/1000
  • 31. A single method is rarely enough electronic, magnetic, structural, thermal and many more ….. “Big” Facilities: Powerful “EXPENSIVE” machines (ex. Synchrotron, state-of-the-art TEM, supercomputers,…) “Small” science (universities) individual-investigator laboratory Dept, Ints., University Materials characterization and the evolution of material Sciences CNPEM Sirius LMNANO Tools OK Higher impact.... ????? What about Ideas? Human Resources Formation Starting research program, questions, studying, testing, routine work, Basic Infrastructure Understanding focusing ideas Developing intuition Consolidating expertise/tech. ability profound question!! viable answer time Cutting-edge study (ex. 10 hs TEM) (Big Facility) Bottom-up 1000 hs . TEM
  • 32. Summary - Electron nano-crystallography: PED (Tomography) 2022 new section of IUCrJ dedicated to e- crystallography - Scanning Electron Diffraction (4D-STEM) strong growth Strain nm-resolution (ACOM based on intesities Ihkl) low dose 5-10 e/Å2 ,PED Patterns->Machine learning - e-PDF+PED: Quantitative statistical information NP ensemble sample (< pgr) Low dose (10 e/Å2) Low profile TEM!!!! - Quantitative Chemical Composition inside few-nm NPs (EDS , ML) Not presented ( Inv Talk: V. Rodrigues, Symp. L, X Micromat, Wedn. 14.30) Funding (SPED NW): Funding (ePDF): Advanced Microscopy Center at UTSA. Dept.of Defense The Welch Foundation NSF Brazil: CNPq, FAPESP, UNICAMP,CAPES Epilogue & Aknowledgments: A few more slides
  • 33. Start an Electron Microscopy Facility (90´s) 300kV HRTEM LV-SEM FEG-SEM 200kV CTEM 200kV FEG-TEM 1999 2007-2009 Objectives (Since 1994) 1) To operate as an “Actual” open multi-user laboratory (not Feudal, not sycophantic) 2) To train human resources (Users/Students must operate the microscope by themselves) Best way to induce change Education/ Teaching Young researchers Still inside this endless battle!! (Since 1994 ..... still many operational windmills. “José Arana Varela” Award, XX B-MRS Meeting (SBPMat ) Annual SBPMat Award for Contribution to Braz. Materials Science
  • 34. 2002 (J.A.Varela, E. Longo, E. Leite) UNESP, UFSCar FEG-TEM Expansion, Fapesp Sci. Dir. 1998 (Christian Colliex- Lab. Phys. Sol., U. Paris Sud) 1994 (Prof. Cecilia Salvadori-USP) Drive CPS-Caxambu MG-CPS Quotation Sample Prep. Lab. (Clatches periode) Feb 2000 Nov 2000 Dec 1998, Daniela, Paulinho, Varlei LNLS Directors: Cylon, Aldo, Ricardo Initial LME Team
  • 35. 9th Nov 2020, SBPMat Recognition Placa gravada com os dizeres: A Sociedade Brasileira de Pesquisa de Materiais (SBPMat) homenageia a contribuição fundamental de Ricardo Rodrigues para o êxito do desenvolvimento e implantação das fontes brasileiras de luz síncrotron UVX e Sirius, que colocaram o Brasil na vanguarda mundial da pesquisa em materiais.