1. Thin film capacitor (2001-2005)
• What for?
– Low inductance capacitive devices in power
supply decoupling applications.
• As digital electronic systems continue to operate at
higher and higher frequencies, the use of low
inductance decoupling capacitors continues to increase.
The parasitic inductance of the devices themselves can
be reduced by the reverse-geometry multi-terminaltion
design. The reverse-geometry design enables magnetic
flux to be cancelled.
1

2. Thin film capacitor (2001-2005)
• What for?
– Low inductance capacitive devices in power
supply decoupling applications.
2
Electric Current
(From top electrode)
Electric Current
(From botom electrode)
Dielectric material
Magnetic Ffux
Solder ball
+ +-
-

3. Thin film capacitor (2001-2005)
• What is the problem for the decoupling
applications? … DC electrical degradation
3

4. Thin film capacitor (2001-2005)
• What for?
– Tunable RF capacitors which are controlled through a
bias voltage.
4

5. Thin film capacitor (2001-2005)
• What is the problem for tunable RF applications?
... There is always a little bit of lag time for tuned
capacitance to be settled after applying the
bias.
5

6. Thin film capacitor (2001-2005)
• What is the problem for tunable RF applications?
... Lag time resulting from the narrow depletion
accompanied with the electron detrapping.
6

7. Thin film capacitor (2001-2005)
• What is the problem for tunable RF applications?
... Lag time resulting from the narrow depletion
accompanied with the electron detrapping.
7

8. http://toruhara.page.tl/3-.--Solid_Solid-Interface.htm
8
Thin film capacitor (2001-2005)