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SEMINAR GUIDE

PRESENTED BY

MISS LATHA R NAIR

TRIPTI KUMARI

ASSISTANT PROFESSOR

REG NO – 12110081

COMPUTER SCIENCE &
ENGINEERING

S7, CSE, SOE, CUSAT

SOE, CUSAT

ROLL NO - 79
CONTENTS
INTRODUCTION
WHY 3D
BENEFITS OF 3D INTEGRATION
ARCHITECTURE
MANUFACTURING
PERFORMANCE CHARACTERISTICS
CHALLENGES AND ISSUES
CONCLUSIONS
REFERENCES
INTRODUCTION
•

A 3D Integrated Circuit is a chip that has active electronic
components stacked on one or more layers that are integrated
both vertically and horizontally forming a single circuit.

• In the 3-D design architecture, an entire chip is divided into a
number of blocks, and each block is placed on a separate layer
of Si that are stacked on top of each other.

• In a generic 3D IC structure, each die is stacked on top of
another and communicated by Through-Silicon Vias (TSVs).
EVOLUTION IN INTEGRATION
WHY 3D ?
• Multi-core are
bandwidth-hungry:

• Limited caches
• Multi-threading
• Virtualization
“The Bandwidth Challenge”
2.5D VS 3D IC
COMMUNICATION BOTTLENECK
• Architectural issues
• Traditional shared buses do not scale
•

well – bandwidth saturation
Chip IO is pad limited

• Physical issues
• On-chip Interconnects become
•

increasingly slower w.r.t. logic
IOs are increasingly expensive

• Consequences
• Performance losses
• Power/Energy cost
• Design closure issues or infeasibility
BENEFITS OF 3D INTEGRATION
• Reduced wire length
• Total wire length
• Larger circuits produce more
improvement

• Lower power per transistor

• Decreased interconnect delay
• Higher transistor packing
densities
ARCHITECTURE
ARCHITECTURE CONT…

IEEE
ARCHITECTURE CONT…
MANUFACTURING
•

There are four ways to build a 3D IC:

1. Monolithic
2. Wafer-on-Wafer
3. Die-on-Wafer
4. Die On Die
MONOLITHIC
• A technology breakthrough allows the fabrication of
semiconductor devices with multiple thin tiers (<1um) of copper
connected active devices utilizing conventional fab equipment.

• Electronic components and their connections (wiring) are built in
layers on a single semiconductor wafer, which is then diced into
3D ICs.

• There is only one substrate, hence no need for aligning, thinning,
bonding, or through-silicon via.
WAFER-ON-WAFER
• Electronic
components are
built on two or more
semiconductor
wafers, which are
then aligned,
bonded, and diced
into 3D ICs.

• Each wafer may be
thinned before or

Detailed view

Generalized view
SOI
wafers
with bulk
substrate
removed

Layer 5

Inter-layer
bonds

Layer 4
Layer 3

1 m
Layer 2

Metal level
of wafer 1

Bulk wafer
Layer 1

Device
level 1

Bulk Substrate

10 m
500 m
DIE-ON-WAFER
• Electronic components
are built on two
semiconductor wafers.
One wafer is diced; the
singulated dice are
aligned and bonded onto
die sites of the second
wafer

INTER-LAYER
INTERCONNECT

DICE

WAFER
DIE ON DIE
• Electronic components are
built on multiple dice,
which are then aligned and
bonded.

• Thinning and TSV creation
may be done before or after
bonding.
3D FABRICATION TECHNOLOGIES
PERFORMANCE CHARACTERISTICS
• Timing
• Energy
• With shorter interconnects in 3D ICs, both switching energy and
cycle time are expected to be reduced
PERFORMANCE CHARACTERISTICS
CONT…
• Timing
• In current
•

•

technologies, timing
is interconnect
driven.
Reducing
interconnect length in
designs can
dramatically reduce
RC delays and
increase chip
performance
The graph below
shows the results of a
reduction in wire
PERFORMANCE CHARACTERISTICS
CONT…
• Energy
• Wire length
reduction has
an impact on
the cycle time
and the energy
dissipation

• Energy
dissipation
decreases with
the number of
layers used in
CHALLENGES AND ISSUES
1- Clock Distribution in 3D

•

2D clock tree very hard but
feasible (H-Tree,
Differential, Single Ended
Clock Distribution)

•

Minimizing the clock skew
of a clock tree in a complex
3D structure is an
extremely challenging task

Clock Root
CHALLENGES AND ISSUES CONT…
• At runtime,
thermal variations
will introduce
additional timevarying clock
skew, further
increasing design
uncertainty

high number
of vertical vias
CHALLENGES AND ISSUES CONT…
2 - Thermal Issues In 3-D ICs

• Due to reduction in chip size of a 3D implementation, 3D circuits exhibit a sharp increase in
power density

• Analysis of Thermal problems in 3D is necessary to evaluate thermal robustness of different
3D technology and design options.
3 - Reliability Issues In 3-D ICs

• Electro thermal and Thermo-mechanical effects between various active layers can influence
electro-migration and chip performance

• Die yield issues may arise due to mismatches between die yields of different layers, which
affect net yield of 3D chips.
RELIABILITY ENHANCEMENT
• TSV check on reset
• Control use dedicated Vias
in order to establish which
vias are corrupted.
• If 1, 2 and 3 TSVs are OK, the
control set the enable signal
set_to and set_from: broken
path are skipped!
• Pads routing shift as show in
the figure
• Need to define The handling
protocol during the TSVs
check
CONCLUSION
•

3D IC design is a relief to interconnect
driven IC design.

•

Still many manufacturing and
technological difficulties

•

Physical Design needs to consider the
multiple layers of Silicon available.

•

Optimization of both temperature and
wirelength

•

Placement and routing algorithms need to
be modified
REFERENCES
[1] J. Davis, et al., "Interconnect limits on gigascale integration
(GSI) in the 21st century," Proceedings of the IEEE , vol.89, no.3,
pp.305-324, Mar 2001.
[2] Banerjee, K.; Souri, S.J.; Kapur, P.; Saraswat, K.C.; , "3-D ICs: a
novel chip design for improving deep- submicrometer interconnect
performance and systems-on-chip integration," Proceedings of the
IEEE , vol.89, no.5, pp.602-633, May 2001.
THANKYO
U
QUESTIONS
?

IC

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3D IC Presented by Tripti Kumari, School of Engineering, CUSAT

  • 1. SEMINAR GUIDE PRESENTED BY MISS LATHA R NAIR TRIPTI KUMARI ASSISTANT PROFESSOR REG NO – 12110081 COMPUTER SCIENCE & ENGINEERING S7, CSE, SOE, CUSAT SOE, CUSAT ROLL NO - 79
  • 2. CONTENTS INTRODUCTION WHY 3D BENEFITS OF 3D INTEGRATION ARCHITECTURE MANUFACTURING PERFORMANCE CHARACTERISTICS CHALLENGES AND ISSUES CONCLUSIONS REFERENCES
  • 3. INTRODUCTION • A 3D Integrated Circuit is a chip that has active electronic components stacked on one or more layers that are integrated both vertically and horizontally forming a single circuit. • In the 3-D design architecture, an entire chip is divided into a number of blocks, and each block is placed on a separate layer of Si that are stacked on top of each other. • In a generic 3D IC structure, each die is stacked on top of another and communicated by Through-Silicon Vias (TSVs).
  • 5. WHY 3D ? • Multi-core are bandwidth-hungry: • Limited caches • Multi-threading • Virtualization “The Bandwidth Challenge”
  • 7. COMMUNICATION BOTTLENECK • Architectural issues • Traditional shared buses do not scale • well – bandwidth saturation Chip IO is pad limited • Physical issues • On-chip Interconnects become • increasingly slower w.r.t. logic IOs are increasingly expensive • Consequences • Performance losses • Power/Energy cost • Design closure issues or infeasibility
  • 8. BENEFITS OF 3D INTEGRATION • Reduced wire length • Total wire length • Larger circuits produce more improvement • Lower power per transistor • Decreased interconnect delay • Higher transistor packing densities
  • 12. MANUFACTURING • There are four ways to build a 3D IC: 1. Monolithic 2. Wafer-on-Wafer 3. Die-on-Wafer 4. Die On Die
  • 13. MONOLITHIC • A technology breakthrough allows the fabrication of semiconductor devices with multiple thin tiers (<1um) of copper connected active devices utilizing conventional fab equipment. • Electronic components and their connections (wiring) are built in layers on a single semiconductor wafer, which is then diced into 3D ICs. • There is only one substrate, hence no need for aligning, thinning, bonding, or through-silicon via.
  • 14. WAFER-ON-WAFER • Electronic components are built on two or more semiconductor wafers, which are then aligned, bonded, and diced into 3D ICs. • Each wafer may be thinned before or Detailed view Generalized view SOI wafers with bulk substrate removed Layer 5 Inter-layer bonds Layer 4 Layer 3 1 m Layer 2 Metal level of wafer 1 Bulk wafer Layer 1 Device level 1 Bulk Substrate 10 m 500 m
  • 15. DIE-ON-WAFER • Electronic components are built on two semiconductor wafers. One wafer is diced; the singulated dice are aligned and bonded onto die sites of the second wafer INTER-LAYER INTERCONNECT DICE WAFER
  • 16. DIE ON DIE • Electronic components are built on multiple dice, which are then aligned and bonded. • Thinning and TSV creation may be done before or after bonding.
  • 18. PERFORMANCE CHARACTERISTICS • Timing • Energy • With shorter interconnects in 3D ICs, both switching energy and cycle time are expected to be reduced
  • 19. PERFORMANCE CHARACTERISTICS CONT… • Timing • In current • • technologies, timing is interconnect driven. Reducing interconnect length in designs can dramatically reduce RC delays and increase chip performance The graph below shows the results of a reduction in wire
  • 20. PERFORMANCE CHARACTERISTICS CONT… • Energy • Wire length reduction has an impact on the cycle time and the energy dissipation • Energy dissipation decreases with the number of layers used in
  • 21. CHALLENGES AND ISSUES 1- Clock Distribution in 3D • 2D clock tree very hard but feasible (H-Tree, Differential, Single Ended Clock Distribution) • Minimizing the clock skew of a clock tree in a complex 3D structure is an extremely challenging task Clock Root
  • 22. CHALLENGES AND ISSUES CONT… • At runtime, thermal variations will introduce additional timevarying clock skew, further increasing design uncertainty high number of vertical vias
  • 23. CHALLENGES AND ISSUES CONT… 2 - Thermal Issues In 3-D ICs • Due to reduction in chip size of a 3D implementation, 3D circuits exhibit a sharp increase in power density • Analysis of Thermal problems in 3D is necessary to evaluate thermal robustness of different 3D technology and design options. 3 - Reliability Issues In 3-D ICs • Electro thermal and Thermo-mechanical effects between various active layers can influence electro-migration and chip performance • Die yield issues may arise due to mismatches between die yields of different layers, which affect net yield of 3D chips.
  • 24. RELIABILITY ENHANCEMENT • TSV check on reset • Control use dedicated Vias in order to establish which vias are corrupted. • If 1, 2 and 3 TSVs are OK, the control set the enable signal set_to and set_from: broken path are skipped! • Pads routing shift as show in the figure • Need to define The handling protocol during the TSVs check
  • 25. CONCLUSION • 3D IC design is a relief to interconnect driven IC design. • Still many manufacturing and technological difficulties • Physical Design needs to consider the multiple layers of Silicon available. • Optimization of both temperature and wirelength • Placement and routing algorithms need to be modified
  • 26. REFERENCES [1] J. Davis, et al., "Interconnect limits on gigascale integration (GSI) in the 21st century," Proceedings of the IEEE , vol.89, no.3, pp.305-324, Mar 2001. [2] Banerjee, K.; Souri, S.J.; Kapur, P.; Saraswat, K.C.; , "3-D ICs: a novel chip design for improving deep- submicrometer interconnect performance and systems-on-chip integration," Proceedings of the IEEE , vol.89, no.5, pp.602-633, May 2001.