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Analog Layout design
1. Introduction to Analog Layout
Design
Dr. S. L. Pinjare
Workshop on Advanced VLSI Laboratory
Cambridge Institute of Technology, Bangalore
30 April 2011
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2. Analog VLSI Design
• Implementation of analog circuits and systems using
integrated circuit technology.
• Unique Features of Analog IC Design
– Geometry
• an important part of the design
– Usually implemented as a mixed analog-digital circuit
• Typically Analog is 20% and digital 80% of the chip area
– Designed at the circuit level
– Customized design
– Analog requires 80% of the design time
– Passes for success: 2-3 for analog, 1 for digital.
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4. Analog Design Flow
Electrical Design
Idea Concept
Define the Design
Comparison with the
Design Specification
Redesign
Implementation
Simulation
Physical
Design
Fabrication
Testing and Product
Development
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5. Analog Design Flow
Electrical Design
Idea Concept
Define the Design
Comparison with the
Design Specification
Redesign
Implementation
Simulation
Physical
Design
Physical Implementation-Layout
Physical Verification-DRC,ERC,LVS,Antenna
Parasitic Extraction and Back Annotation
Fabrication
Testing and Product
Development
30 April 2011
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6. Analog Design Flow
Electrical Design
Idea Concept
Define the Design
Comparison with the
Design Specification
Redesign
Implementation
Simulation
Physical
Design
Physical Implementation-Layout
Physical Verification-DRC,ERC,LVS,Antenna
Parasitic Extraction and Back Annotation
Fabrication
Testing and Product
Development
30 April 2011
Fabrication
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7. Analog Design Flow
Electrical Design
Idea Concept
Define the Design
Comparison with the
Design Specification
Redesign
Implementation
Simulation
Physical
Design
Physical Implementation-Layout
Physical Verification-DRC,ERC,LVS,Antenna
Parasitic Extraction and Back Annotation
Fabrication
Testing and Product
Development
30 April 2011
Fabrication
Testing
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PRODUCT
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8. Skills Required for Analog IC Design
• In general, analog circuits are more complex than
digital.
– Requires an ability to use multiple concepts simultaneously.
– Be able to make appropriate simplifications and assumptions.
– Need to have good knowledge of both modeling and
technology.
– Be able to use simulation correctly.
• (Usage of a simulator)x(Common sense)=Constant
• Simulators are only as good as the models and the knowledge of those
models.
– “all models are wrong, some are useful“
• Be able to learn from failure.
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9. Analog layout Issues
• Issues that are important in digital circuits are still
important in analog layout.
– Eg. Parasitic aware layout.
• Minimize series resistance
– slows down switching speed plus introduces unwanted noise.
• Minimize parasitic capacitance
– slows down switching speed
– Increases power dissipation(Capacitance switching)
• Extra load capacitance
– Need to increase bias current to maintain bandwidth and/or slew
rate.
– Can lead to instability in high gain feedback systems.
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10. Analog layout Issues
• Noise is important in all analog circuits because it limits
dynamic range.
• In general there are two types of noise,
– Random noise and
– Environmental noise.
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11. Analog layout Issues
• Random noise refers to noise generated by resistors and
active devices in an integrated circuit;
• MULTI-GATE FINGER LAYOUT
– reduces the gate resistance of the poly-silicon and the
neutral body region, which are both random noise
sources.
• Generous use of SUBSTRATE PLUGS
– will help to reduce the resistance of the neutral body
region, and thus will minimize the noise contributed by
this resistance.
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12. Analog layout Issues
• Environmental noise
– Crosstalk; Ground bounce etc.
– Generally appears as a common-mode signal.
• Use ‘fully-differential’ circuit design,
– Substrate noise occurs when a large amount digital circuits are
present on a chip. The switching of a large number of circuits
discharges large dynamic currents to the substrate, which
cause the substrate voltage to ‘bounce’.
• The modulation of the substrate voltage can then couple
into analog circuits via the body effect or parasitic
capacitances.
• SUBSTRATE PLUGGING
– minimizes substrate noise because it provides a low
impedance path to ground for the noise current.
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13. Analog layout Issues
• Matching components
• In analog electronics it is often necessary to have
matched pairs of devices with identical electrical
properties, e.g. input transistors of a differential stage,
and current mirror
– In theory two device with the same size have the same
electrical properties.
• In reality there is always process variations
• Matching:
– Layout techniques to minimize the errors introduced by
process variations.
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14. Analog Design components
• Active devices
– Transistors
• N-mos and P-mos
• Passives
– Resistors
– Capacitors
– Inductors
• Implemented using existing layers and masks
– Possibly adding a few extra layers
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15. Analog Design Layout considerations
• Design rules
– Allowance Errors in patterning and etching
• Minimum width
• Minimum spacing
• Minimum enclosure
• Minimum extension
• Process variability
– Parameter variation across the chip
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16. Design rules
• Minimum width
– The minimum width of polygon defines the limits of a fabrication process.
– A violation of the minimum width rules potentially results in an open
circuit in the offending layer.
• An open circuit may be created during fabrication.
• A narrow path may be created during fabrication
– large currents passing through a narrow path cause the path to act
like a fuse.
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17. Design rules
• Minimum spacing:
– To avoid an unwanted short circuit between two polygons
during fabrication,
• S1 > Smin, where Smin is set by process.
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18. Design rules
• Minimum enclosure:
– Apply to polygons on different layers.
– Misalignment between polygons may result in either
unwanted open or short circuit connections.
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19. Design rules
• Minimum extension:
– Some geometries must extend beyond the edge of others by a
minimum value.
• Eg. Gate poly must have a minimum extension beyond the
active area to ensure proper transistor action at the edge.
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20. Design Rules
• Example of the design rules applying to the POLY layer
C3.4 POLY:
Gate Structures and resistors are defined by the poly layer. Minimum design rules
are used for the polylayer. i.e. this is the minimum feature size for this process.
• A ≥ 1.5 µm,(minimum polywidth /Length).
• B ≥ 1.5 µm,(minimum poly to poly distance).
• C ≥ 1.5 µm,(minimum poly-over-oxide overlap).
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21. Unit Matching
• Two electrically equivalent components.
• Draw them identically
–
–
–
–
Both item and surrounding
A and B have same shape in area and perimeter
Identical item?
Do they have the same surrounding?
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22. Unit Matching
• Two electrically equivalent components.
• Draw them identically
–
–
–
–
Both item and surrounding
A and B have same shape in area and perimeter
Identical item?
Do they have the same surrounding?
• No
– Use Dummies to have identical surroundings
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23. Common-centroid layout
• Process variations can locally be approximated with a
linear gradient.
(a): A1 + A2 < B1 + B2
(b): A1 + A2 = B1 + B2 (common-centroid)
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24. Resistors
• All materials have a resistivity
• Typical resistivities
–
–
–
–
Metal layer : 0.1 Ohm/square
n/p-plus contacts and polysilicon: 10-100 Ohm/square
n-well: 1000 Ohm/square
low doped poly silicon: 10 k Ohm/square
• more well defined than n-well, i.e. higher accuracy
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25. Poly-Resistors
• Poly Resistors
– Silicidated poly resistors: 1 − 10 Ohm/sq.
• ≈±30%
– Non-silicidated poly resistors: 50-1000 Ohms per unit area .
• Small parasitic capacitances to substrate.
• Superior linearity.
• High cost due to the extra mask needed to block silicide
layer.
• ≈±20%
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26. Diffusion Resistors
• 1k Ohm/sq
– N-well
• Large parasitic capacitance between n-well and substrate.
• Resistance is strongly terminal voltage-dependent and
highly nonlinear.
– Depletion width varies with terminal voltages.The
cross-section area varies with terminal voltages
• Large error : ≈±40%
• noisy as all disturbances/noise from substrate can be
coupled directly onto the resistors
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27. Resistor Layout
• Standard Resistors: Avoid 90 degree angle. 45 degree is
recommended
1. Resistance at the corners cannot
be estimated accurately
Recommended resistor
layout
2. Current flow at the corner is not
uniform
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28. Resistor Layout
• Dummy resistors are added to
minimizes the effect of
process variation
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29. Shielded Resistors
• Shielding resistors
– Connected to a constant voltage
source
• Prevent self-coupling of the
resistor R/inter-coupling
with others.
Layout of shielded resistors
(S = shielding resistors)
• Widely used in analog/RF
design.
• Caution
– a mutual capacitance between
the resistor and its shield exist.
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30. Layout of Large Resistors
• Use n-well resistors
– have a large sheet resistance.
• Enclosed by a substrate shielding ring, also known as guard ring,
to isolate the resistors from neighboring devices.
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31. Layout of Matched Resistors
• Inter-Digitized Layout
– minimizes the effect of process variation in x-direction.
• Dummy resistors are added to ensure both resistors have
the exactly same environment.
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32. Matched Resistors with Temperature Consideration
• Keep away from power devices
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33. Resistor layout guidelines-Matched resistors
•
•
•
•
•
•
•
Use same material
Identical geometry, same orientation
Close proximity, interdigitate arrayed resistors
Use dummy elements
Place resistors in Low stress area
Place resistors away from power devices
Use electrostatic shielding
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34. Capacitors
• There are naturally capacitors between each layer of
metal, poly silicon or silicon
• Dielectrics between different metal layers have a
thickness of 0.5-1 micron, which gives a rather large
area for a given capacitance.
• Key Parameters
–
–
–
–
Linearity
Parasitic capacitance to substrate
Series resistance - resistance of capacitor plates
Capacitance per unit area
• Larger specific capacitance (capacitance per unit area)
gives smaller area
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35. Types of IC Capacitors
• Poly-diffusion capacitors
– Nonlinear bottom-plate parasitic
capacitance.≈20% of inter-plate
capacitance.
– .6-.8 fF/µm2(≈±5%). Matching
0.2%
• MOS capacitors
– Stable capacitance in strong
inversion
– Non-negligible channel
resistance lowers the quality
factor (Q) of the capacitor
– 0.6 - 0.8 fF/µm2; (≈±5%).
Matching 0.5%
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• Poly-poly capacitors
– Not available in standard
CMOS processes
– 0.3 - 0.5 fF/µm2; (≈±10%).
Matching 0.5%
• Metal-poly capacitors
– Capacitance is small, area
consuming.
– 0.03-0.05 fF/µm2. (≈±25%).
Matching 0.5%
• Metal-metal capacitors
– Capacitance is small, area
consuming
– 0.02-0.04 fF/µm2; (≈±25%).
Matching 0.1%
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36. NON-IDEAL EFFECTS- UNDER-CUT
• Non-uniform undercut &/or edge
fringing field effects change the
value of designed capacitors.
• The area and perimeter ratio is
preserved if we use layout using
unit capacitors.
Ideal case: no undercut
Case 1 Case 2
Area
1:4
Perimeter
Case 1
1:4
1:2
1:4
Typical case: 0.05 undercut
Case 1 Case 2
Area
1:4.46
1:4
P erimeter
1:2.1
1:4
Case 2
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37. NON-IDEAL EFFECTS-Corner Rounding
• Etching always causes corner
rounding to some extent.
• This means that
– 90° corners will be eroded and
– 270° corners will be have
incomplete removal of material
• In order to overcome this
effect use an equal number of
90° & 270° corners
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38. Layout of MOS Capacitors
• Single finger structure
– Large source/substrate & drain/substrate capacitances
– Large gate series resistance
Minimize Gate Series Resistance & Channel Resistance
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39. Layout of MOS Capacitors
• Minimize Gate Series Resistance & Channel Resistance
• Use Multi-Finger Structure
Multi-finger structure minimizes source/substrate &
drain/substrate parasitic capacitances.
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40. Layout of Matched Capacitors
• Minimize the Effect of
Oxide Thickness in both
x and y-directions.
– Common Centroid
Structure.
– Dummy capacitors are
needed to ensure the same
environment for C1 and
C2.
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41. Layout of Matched Capacitors
• C1 and C2 are 2-poly capacitors.
• n-well is employed as a charge
collector to shield the interaction
between the bottom plate and
substrate.
• n-well is biased at multiple
points and connected to a
constant voltage source.
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42. Layout of MOS Transistors
• Criteria for MOS Transistor Layout
– Minimize gate series resistance.
– Minimize source/drain resistances.
– Minimize source/substrate & drain/substrate parasitic
capacitances.
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43. Layout of MOS Transistors
• Large gate series resistance
Most of the current will be
– 7.8±2.5Ohm/sq for typical 0.18μ
shrunk to this side
CMOS processes.
• Large distributed resistance of
source/drain
– 6.8±2.5Ohm/sq for n+ and
7.2±2.5Ohm/sq for p+ in typical
0.18μ CMOS processes.
• Large source/substrate and drain/substrate
parasitic capacitances.
• Non-uniform gate/source/drain voltages.
• Non-uniform current flow
– M1 carries the most current and Mn
carries the least current).
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44. Layout of MOS Transistors
• Minimize Source/Drain Resistances
– Multiple contacts at source/drain
• Better contact at source/drain → high reliability & smaller contact
resistance (R = Rc/N, where N=number of contacts).
– Smaller source/drain resistances (series resistance is negligible but
lateral resistance still exists).
– Large source/substrate and drain/substrate parasitic capacitances.
– Large gate series resistance- Gate is too long.
• Contacts are not allowed on the gate above the channel (high
temperature required to form contacts may destroy the thin gate oxide).
Current is spread
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45. Layout of MOS Transistors
Poly contact at both ends
Folding reduces gate
resistance
No of fingers:
Gate resistance < 0.1 to .5(1/gm)
Results in increase of parasitic capacitance
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46. Layout of MOS Transistors
• Minimize Source/Substrate and Drain/Substrate Parasitic
Capacitances
– Shared sources/drains.
– Reduced silicon area.
Another layout
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47. Antenna Effect
There will be charge accumulation on Metal1 during plasma
etching (of metal1) causing damage to thin gate oxide (Large
metal area)
Avoids antenna effect
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48. Layout of a Cascode circuit
a.
b.
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c.
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49. Layout of Wide transistors
•
•
•
•
Wide transistors need to be split
Parallel connection of n elements (n = 4 for this example)
Contact space is shared among transistors
Parasitic capacitances are reduced (important for high speed )
Note that parasitic capacitors are
lesser at the drain
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50. Effect of wiring resistance
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51. Layout of Matched Transistors
• Matched transistors are used extensively in both analog
and digital CMOS circuits.
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52. Photo-lithographic invariance (PLI)
• Lithography effects different in different direction
• C and D are better
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53. Photo-lithographic invariance (PLI)
• Effect of shadowing
– S/D implant often has an angle.
– Drain/Source can be mirrored
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54. Photo-lithographic invariance (PLI)
• Effect of shadowing :
– Gate aligned
– Parallel gate:
• Two drains have
different surroundings
• Two sources have
different surroundings
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Orientation is important in analog
circuits for matching purposes
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55. Layout of Matched Transistors
• Add dummy
transistors to
improve
symmetry
• Presence of Metal line over
M2 destroys symmetry
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• Replicate Metal line over
M1 improves symmetry
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56. Layout of Matched Transistors
• Gradient along x-axis destroys symmetry
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57. Matching - Summary
• To achieve both common-centroid and PLI matched
transistors has to be split into 4 fingers.
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58. Matched Transistors
• Matched transistors require elaborated layout techniques
• Use inter-digitized layout style
• Averages the process variations among transistors
• Common terminal is like a serpentine
•
Uneven total drain area between M1 and M2.
– This is undesirable for ac conditions: capacitors and other parameters may not be equal
• A more robust approach is needed (Use dummies if needed)
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60. Common Centroid Layouts
• Split into parallel connections of even parts
• Half of them will have the drain at the right side and half at the left
• Be careful how you route the common terminal
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63. Summary
• Use large area to reduce random error
• Common Centroid layout to reduce linear gradient
errors
• Use unit element arrays
• Interdigitize for matching
• Use of symmetry (photolithographic invariance)
• Dummy device for similar vicinity
• Guard rings for isolation
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64. References
• A. Hastings, The Art of Analog Layout, PrenticeHall,2002.
• B. Razavi, Design of Analog CMOS Integrated Circuits,
McGraw-Hill, 2001.
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66. Simulation
• To fully describe the function of a MOS transistor the
fundamental electro-magnetic equations are set up in 2D/3D.
• Coupled non-linear partial deferential equations take long time to
solve.
• Compact models are desired.
– Simple mathematical relations that describes the relation between currents
and voltages.
• There are 3 main types of models (for electrical devices and in
general).
– Physical model parameters have physical meaning
– Empirical parameters have no physical meaning (fitting parameters)
– Table based measured data + interpolation functions
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67. Simulation
• Devices are characterized for a parameter window
where the model becomes valid.
• Validity outside defined parameter window:
– Physical: Good validity.
– Empirical: Have difficulties outside the window and can in
some cases give preposterous results.
– Table based Same or worse than empirical models.
• Physical models with empirical fitting parameters are
common (semi-empirical).
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68. SPICE
• Simulation Program with Integrated Circuit Emphasis
• There are two sides of SPICE:
– The simulator
– The models
• The simulator
– A circuit is described with nodes and elements between nodes.
– For linear circuits the matrix is solved using nodal admittance
analysis.
– Non-linear circuits are solved using iterative methods.
– The basic simulation types are OP, DC, AC and transient
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69. SPICE simulations
• OP Operating Point analysis.
– Solves the currents and voltages in a circuit at one bias condition.
• DC
– Same as OP but does it for one or more swept parameters, e.g. IDS vs.
VDS
• AC
– Linearizes all elements at the bias point. Then a sinusodial signal is
applied on one or more inputs and the frequency is swept.
• Note: since the circuit is linearized no saturation effects will occur
using AC.
• Transient
– One or more time varying signals (e.g. sinusodial, pulses, square waves)
are applied and the time is swept. This simulation does not linearize the
circuit so here saturation effects are present.
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70. Latchup
Latchup may begin when Vout drops below GND due to a noise spike or an
improper circuit hookup (Vout is the base of the lateral NPN Q2). If sufficient
current flows through Rsub to turn on Q2 (I Rsub > 0.7 V ), this will draw
current through Rwell. If the voltage drop across Rwell is high enough, Q1
will also turn on, and a self-sustaining low resistance path between the power
rails is formed. If the gains are such that b1 x b2 > 1, latchup may occur. Once
latchup has begun, the only way to stop it is to reduce the current below a
critical level, usually by removing power from the circuit.
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71. SPICE netlist
*** Top Level Netlist ***
M1 5 5 2 2 CMOSNB L=5u W=15u
M2 6 5 2 2 CMOSNB L=5u W=15u
R1 4 5 380k
VDD 3 0 DC 2.5v AC 0 0
Vout 1 0 DC 0
VSS 2 0 DC -2.5v AC 0 0
*** Control Statements ***
.DC VOUT -2.4 2.5 .1
.PRINT DC ALL
**** Spice models and macro models ****
.MODEL CMOSNB NMOS LEVEL=4 VFB=-9.73E-01
+LVFB=3.67E-01, WVFB=-4.72E-02, PHI=7.46E-01
+LPHI=-1.92E-24, WPHI=8.064E-24
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72. SPICE models
• The first MOS-models came in the begining of the 70's.
–
–
–
–
The first model was called Level 1 MOS model.
The model had 10 parameters (4 process and 6 electrical)
(TPG), TOX, NSUB and XJ from process
UO, VTO and LAMBDA , CGSO, CGDO, CGBO from
electrical
– With a few minor differences the model is described by the
equations
.model Name_model NMOS Level=1
+TPG=1 TOX=10-7 NSUB=1E16 XJ=1E-6
+ UO=600 VTO=1.5 LAMBDA=0.01
+CGSO=1E-16 CGDO=1E-16 CGBO=1E-17
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73. Level 1 MOS model
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74. SPICE models history
• Level 1, L ~> 5 micron, 1970
• Level 2, L ~> 2 micron, 1980
• Level 3, L ~> 1micron, 1981
– Many empirical parameters, numerically better,
– better short channel description.
– Difficulties in finding parameter sets that cover a large
window of lengths.
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75. SPICE models history
• 2nd generation
– BSIM1, L ~> 0.8 micron, 1987
– Berkeley Short Channel IGFET Model 1
– New knowledge about short channel effects. Many fitting
parameters for improved scaling
– BSIM2, L ~> 0.35 micron, 1990
– Improved model continuity, specifically output conductance
and sub-threshold current. Scaling still a problem. Binning
introduced.
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76. SPICE models history
• 3rd generation
– BSIM3, L ~> 0.1 micron, 1994
– Total re-write. The idea was to have a simple model with few physical
parameters.
– Result: Many versions. Many empirical parameters.
– Difficult to extract parameters.
• Philips MOS Model 9 and 11
– Industry approach, With few empirical parameters.
• EKV (Enz-Krummenacher-Vittoz)
– With few empirical parameters, more physical than MM9 and
MM11.
• 4th Generation Model
– BSIM4
• PSP (Penn State University and Philips)
• The latest and most advanced model developed by merging the best
features of the two surface potential-based models: SP and MM11.
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77. Sources of Power-Supply Noise
• The fast rising voltage results in
current drawn from the power supply
leading to frequency-dependent IR
(voltage) drops in the VDD and VSS
traces of the printed circuit board
(PCB) or metal interconnect. This
phenomenon is called ground bounce
on the VSS side.
• The ground bounce is related to the
parasitic inductance of the package
pins of the integrated circuit (IC),
device ground, and system ground.
• The dynamic current can transform
into noise by contributing an amount
of voltage equal to V between the
system ground and device ground
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78. Sources of Power-Supply Noise
• Since various components may share the VDD and VSS planes or
busses as a source of power, any large voltage fluctuations on the
PCB may violate the voltage noise rating of these components.
• Such noise, if not reduced, can produce logical errors and other
undesirable effects.
• The problem is more pronounced if the noise is coupled to the
analog portion of a mixed-signal integrated circuit as it can lead
to jitter, distortion, and reduced performance of the analog
components.
• It is important to properly separate the digital and analog powers
supplies to minimize the noise levels as much as possible in a
mixed-signal environment.
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