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IoT Compatible Components Series
Improving plant productivity using IoT
CC-1466A 3
2 3
Ethernet
PLC
Pilot operated 3, 5-port valve
W4G
(IP65)
Pilot operated 3, 5-port valve
4E
(Space saving)
Pilot operated 3, 5-port valve
4G
(IP20)
Thin electro pneumatic
regulator
MEVT
IT
Control
I/O
Direct drive motor
τDISC
(High precision)
Direct drive motor
AX
(General purpose)
IO-Link
Master
Controller
ECR
Controller
ECG-B
Electric actuator
Slider
EBS-M
Electric actuator
Rod with built-in guide
EBR-M
Electric actuator
Rotary
FGRC
Electric actuator
Rotary
FGRC
Electric actuator
Table
FLCR
Electric actuator
Table
FLCR
Electric actuator
2-finger Gripper
FLSH
Electric actuator
2-finger Gripper
FLSH
Pressure sensor
PPX
Contact sensor
GPS3
Controller
ECG-A
Electric actuator
Slider
EBS-G
Electric actuator
Rod with
built-in guide
EBR-G
Controller
ECR
Controller
ECG-B
Electric actuator
Slider
EBS-M
Electric actuator
Rod with built-in guide
EBR-M
Electric actuator
Rotary
FGRC
Electric actuator
Rotary
FGRC
Electric actuator
Table
FLCR
Electric actuator
Table
FLCR
Electric actuator
2-finger Gripper
FLSH
Electric actuator
2-finger Gripper
FLSH
Controller
ECG-A
Electric actuator
Slider
EBS-G
Electric actuator
Rod with
built-in guide
EBR-G
Electric actuator
2-Finger Gripper
FFLD
(controller integrated)
Flow rate sensor
for air
FSM3
Flow rate controller
for air
FCM
Electro
pneumatic
regulator
EVD
Flow rate sensor
for liquids
WFC
Flow rate sensor
for water
WFK2
Pilot operated
3, 5-port valve
4G
(IP40)
Pneumatic actuator
with length
measurement function
Linear Slide Hand
LSHM-HP2
System configuration
CKD network Components are available in a variety of ways.
With the globalization of production and the declining labor population as a backdrop, components
are required to deal with various networks. CKD is available with products for various industrial
networks at production sites. High productivity is supported by customers through components
which allow collaboration between people and machines.
AIR
HAND
AIR
HAND
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
SENSOR
CONTROLLER
SENSOR
CONTROLLER
RJ45 M12
Electric motion
components
Directional
control valve
Sensor/
controller
Pneumatic
actuator
Compatible
communication
port RJ45
Compatible
communication
port M12
4 5
Correspondence list by product
Product category Product
Compatible controllers
EtherNet/IP DeviceNet EtherCAT
CC-Link IE
Field
CC-Link IE
Field Basic
CC-Link PROFINET
PROFI-BUS
DP
IO-Link
ECG-A ECG-B ECR
Electric motion components
Direct drive motor general purpose
AX1000T/AX2000T/AX4000T/AX7000X
Electric motion components
Direct drive motor high precision
τDISC
Electric motion components
Controller
ECG-A
Electric motion components
Controller
ECG-B
Electric motion components
Controller
ECR
Electric motion components
Electric actuator Slider
EBS-G
Electric motion components
Electric actuator Slider
EBS-M
Electric motion components
Electric actuator Rod with built-in guide
EBR-G
Electric motion components
Electric actuator Rod with built-in guide
EBR-M
Electric motion components
Electric Actuator 2-Finger Gripper
FLSH
Electric motion components
Electric actuator Table
FLCR
Electric motion components
Electric actuator Rotary
FGRC
Electric motion components
Electric Actuator 2-Finger Gripper
FFLD
Pneumatic actuator
Linear Slide Hand with Length Measuring Function
LSHM-HP2
Directional control valve
Pilot operated 3, 5-port valve
4G
Directional control valve
3, 5-port pilot operated valve, plug-in block manifold
W4G
Directional control valve
3, 5-port pilot operated valve PLC compatible block manifold
MN3E/MN4E
Sensor/controller
Compact flow rate controller RAPIFLOW
FCM
Sensor/controller
Electro-pneumatic regulator
EVD
Sensor/controller
Thin electro-pneumatic regulator
MEVT
Sensor/controller
Compact flow rate sensor RAPIFLOW
FSM3
Sensor/controller
Digital pressure sensor
PPX
Sensor/controller
Digital gap switch
GPS3
Sensor/controller
Karman vortex flow rate sensor for water FLUEREX
WFK2
Sensor/controller
Capacitance electromagnetic flow sensor
WFC
Page 6 Page 9 Page 10 Page 14 Page 14 Page 15 Page 18 Page 19 Page 20
EtherNet/IP and DeviceNet are registered trademarks of ODVA.
EtherCAT is a patented Engineering and registered trademark licensed in Germany by Beckhoff Automation GmbH.
CC-Link, CC-Link IE Field and CC-Link IE Field Basic are registered trademarks of the Mitsubishi Electric Corporation.
PROFINET, PROFIBUS and IO-Link are registered trademarks of PROFIBUS User Organization.
6 7
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications


Supported actuators: EBS-G, EBR-G
(Applicable motor size: 35 to 56)

Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP

Power supply voltage: 24 VDC ±10%

Current consumption: 0.4 A or less (control power supply)
Max. 2.8 A or less (power supply)


Degree of protection: IP20
Specifications

Supported actuators: FLSH, FLCR, FGRC
(Applicable motor size: 20 to 35)


Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP


Power supply voltage: 24 VDC ±10%


Current consumption: 0.4 A or less (control power supply)
Max. 2.8 A or less (power supply)


Degree of protection: IP20
Features

Contributes to the reduction of inventory by
connecting to all sizes of 2 models.

Automatic recognition function does not require initial
setting when connecting the actuator and controller


Compact and can be installed adjacently, 38%
of installation space compared to conventional
models. Space saving is realized.


Free download of dedicated software S-Tools from HP
Features


Contributes to the reduction of inventory by
connecting to all sizes of 3 models.


Compact and can be installed adjacently, 41%
of installation space compared to conventional
models. Space saving is realized


Free download of dedicated software S-Tools from HP
Electric motion components controller
ECG-A
Electric motion components controller
ECG-B
Specifications


Max. load capacity (horizontal): 80 kg

Max. speed: 900 mm/s


Repeatability: ±0.01 mm
Features


Reduces equipment stopping time with the
battery-less absolute encoder built-in


Built-in guide reduces need for an additional guide

Mounting holes are provided on top and
bottom of the product for installation
without product disassembly
Electric actuator Rod with built-in guide
EBR-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. load capacity (horizontal): 80 kg


Max. speed: 1100 mm/s

Repeatability: ±0.01 mm
Features

Reduces equipment stopping time
with the battery-less absolute encoder
built-in


An outer rail guide is used to achieve
a compact body with high rigidity


Easy maintenance with the grease
lubrication port provided as standard
Electric actuator Slider
EBS-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
Compatible
controllers
ECG-A
ECG-A
Specifications

Max. torque: 4.66 N m


Allowable moment of inertia: 0.0297 kg m2


Max. angular speed: 200 deg/s
Features

Equivalent capacity and dimensions as pneumatic components

Self-lock mechanism with manual operation

The center of rotation and the center of the actuator
body are coaxial.
Electric actuator Rotary
FGRC
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications


Max. gripping power: 65 N (per finger)


Max. stroke: 14 mm (7 mm per finger)


Max. gripping speed: 15 mm/s (per finger)
Features


Equivalent capacity and dimensions as pneumatic components


Self-lock mechanism with manual operation


Compatible mounting with air hand LSH
Electric Actuator 2-Finger Gripper
FLSH
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications


Max. load capacity (horizontal): 11 kg


Max. speed: 300 mm/s


Max. pressing force: 210 N
Features


Equivalent capacity and dimensions as pneumatic components


High rigidity is achieved with linear guide built-in


Dimensions compatible with pneumatic LCR
Electric actuator Table
FLCR
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
Compatible
controllers
Compatible
controllers
ECG-B
ECG-B
ECG-B
RJ45
RJ45
RJ45
RJ45
RJ45
RJ45
RJ45
8 9
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Specifications


Cylinder bore size: ø20 to ø100


Working pressure range: 0.2 MPa to 0.7 MPa


Degree of protection: IP20
Features


The superb sliding mechanism of the
main valve realizes low friction and
long service life*1


Response time: 12 ms ±2 ms (4G1)


Durability count: 100 million cycles
(single solenoid)*1
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Pilot operated 3, 5-port valve
4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES RJ45
Specifications


Cylinder bore size: ø20 to ø125


Working pressure range: 0.2 MPa to 0.7 MPa


Degree of protection: IP65
Features


The plug-in method enables easy
replacement of valves


Long service life is achieved by
improvements in structure of sliding
section, packing, etc.


Durability: 60 million cycles (at 0.5 MPa
with clean air)
3, 5-port pilot operated valve, plug-in block manifold
W4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES M12
Specifications

Cylinder bore size: ø20 to ø125

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP65
Features

The plug-in method enables easy replacement
of valves

Long service life is achieved by improvements
in structure of sliding section, packing, etc.
Durability count: 60 million cycles
(at 0.5 MPa with clean air)
3, 5-port pilot operated valve, plug-in block manifold
W4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES M12
Specifications

Max. torque: 6 to 1000 N m

Indexing accuracy: ±15 to 30 seconds

Max. rotation speed: 30 to 300 rpm
Features

Outer rotor structure ideal for index operation

No need to return to origin with battery-less absolute
position detector

Support for adjustment using theAI adjustment function of
AX Tools (free of charge)

Gearless structure for high reliability and maintenance-free
Direct drive motor general purpose
AX1000T/AX2000T/AX4000T/AX7000X
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Cylinder bore size: ø20 to ø100

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP20
Features
The superb sliding mechanism of the
main valve realizes low friction and
long service life*1

Response time: 12 ms ±2 ms (4G1)

Durability count: 100 million cycles
(single solenoid)*1
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Pilot operated 3, 5-port valve
4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
Specifications


Max. torque: 6 to 1000 N m


Indexing accuracy: ±15 to 30 seconds


Max. rotation speed: 30 to 300 rpm
Features


Outer rotor structure ideal for index operation


No need to return to origin with
battery-less absolute position detector


Support for adjustment using the AI adjustment
function of AX Tools (free of charge)


Gearless structure for high reliability
and maintenance-free
Direct drive motor general purpose
AX1000T/AX2000T/AX4000T/AX7000X
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
RJ45
RJ45
Specifications

Cylinder bore size: ø2.5 to ø40

Working pressure range: 0.2 MPa to 0.7 MPa
Specifications


Cylinder bore size: ø2.5 to ø40


Working pressure range: 0.2 MPa to 0.7 MPa
Features

Space saving design with valve width of 7 mm
and 10 mm

Response time 12 ms (two 3-port valves integrated)
Ideal for air operated valve operation

A variety of fittings (ø1.8, ø3, ø4) contributes to
equipment space saving
Features


Space saving design with valve width of 7 mm
and 10 mm


Response time: 12 ms (two 3-port valves integrated)
Ideal for air operated valve operation


A variety of fittings (ø1.8, ø3, ø4) contributes
to equipment space saving


Valve ON count function built-in.
3, 5-port pilot operated valve PLC compatible block manifold
MN3E/MN4E
3, 5-port pilot operated valve PLC compatible block manifold
MN3E/MN4E
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
Specifications

Max. flow rate:
MEVT100 2 ℓ/min, MEVT500 6 ℓ/min

Pressure control range:
MEVT100: 0 to 100 kPa
MEVT500: 0 to 0.5 MPa

Linearity: ±0.5% F.S. or less
Features

Thin electro pneumatic regulator, manifold.
Width per station: 14 mm, 80 g

Repeatability: 0.3% F.S.
Response time 0.1 sec (no load)
High precision and high response

DIN rail can be mounted. Select from 2 directions:
bottom mounting and back mounting.
Thin electro-pneumatic regulator
MEVT
SENSOR
CONTROLLER
SENSOR
CONTROLLER
10 11
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Specifications

Max. load capacity (horizontal): 80 kg

Max. speed: 1100 mm/s

Repeatability: ±0.01 mm
Features

Reduces equipment stopping time with the
battery-less absolute encoder built-in

An outer rail guide is used to achieve
a compact body with high rigidity

Easy maintenance with the grease
lubrication port provided as standard
Electric actuator Slider
EBS-M/EBS-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
Compatible
controllers
ECR
ECR
ECG-A
ECG-A
Specifications

Max. load capacity (horizontal): 80 kg

Max. speed: 900 mm/s

Repeatability: ±0.01 mm
Features

Reduces equipment stopping time with the
battery-less absolute encoder built-in

Built-in guide reduces need for additional guides

Mounting holes are provided on top and
bottom of the product for installation
without product disassembly
Electric actuator Rod with built-in guide
EBR-M/EBR-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. torque: 4.66 N m

Allowable moment of inertia: 0.0297 kg m2

Max. angular speed: 200 deg/s
Features

Equivalent capacity and dimensions
as pneumatic components

Self-lock mechanism with manual operation

The center of rotation and the center of
the actuator body are coaxial.
Electric actuator Rotary
FGRC
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. gripping power: 65 N (per finger)

Max. stroke: 14 mm (7 mm per finger)

Max. gripping speed: 15 mm/s (per finger)
Features

Equivalent capacity and dimensions as
pneumatic components

Self-lock mechanism with manual operation

Compatible mounting with air hand LSH
Electric Actuator 2-Finger Gripper
FLSH
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. load capacity (horizontal): 11 kg

Max. speed: 300 mm/s

Max. pressing force: 210 N
Features

Equivalent capacity and dimensions
as pneumatic components

High rigidity is achieved with linear guide
built-in

Dimensions compatible with pneumatic LCR
Electric actuator Table
FLCR
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
ECR ECG-B
Compatible
controllers
ECR ECG-B
Compatible
controllers
ECR ECG-B
RJ45
RJ45
RJ45
RJ45
RJ45
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Supported actuators: EBS-G, EBR-G
(Applicable motor size: 35 to 56)

Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP

Power supply voltage: 24 VDC ±10%

Current consumption: 0.4 A or less (control power supply)
Max. 2.8 A or less (power supply)

Degree of protection: IP20
Specifications

Supported actuators: FLSH, FLCR, FGRC
(Applicable motor size: 20 to 35)

Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP

Power supply voltage: 24 VDC ±10%

Current consumption: 0.4 A or less (control power supply)
Max. 2.8 A or less (power supply)

Degree of protection: IP20
Features

Contributes to the reduction of inventory by
connecting to all sizes of two models.

Automatic recognition function does not
require initial setting when connecting the
actuator and controller

Compact and can be installed adjacently, 38%
of installation space compared to conventional
models. Space saving is realized.

Free download of dedicated software S-Tools
from HP
Features

Contributes to the reduction of stock by
connecting to all sizes of all 3 models

Compact and can be installed adjacently.
Compared with conventional models, 41% of
installation space is available. Space saving is
realized

Free download of dedicated software S-Tools
from HP
Electric motion components controller
ECG-A
Electric motion components controller
ECG-B
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Supported actuators: EBS-M, EBR-M, FLSH, FLCR, FGRC
(Applicable motor size: 20 to 56)

Supported network: CC-Link, EtherCAT, IO-Link

Power supply voltage: 24 VDC ±10% or 48 VDC ±10%

Current consumption: 0.6 A or less (control power supply)
Max. 6.1 A or less (power supply)

Degree of protection: IP20
Features

Contributes to the reduction of inventory by connecting
to all sizes of five models.

Automatic recognition function does not require initial
setting when connecting the actuator and controller

Compact and can be installed adjacently. Compared
with conventional models, 44% of installation space is
available. Space saving achieved

Free download of dedicated software S-Tools from HP
Electric motion components controller
ECR
RJ45
RJ45
RJ45
12 13
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Specifications

Max. torque: 6 to 1000 N am
Indexing accuracy: ±15 to 30 seconds

Max. rotation speed: 30 to 300 rpm
Features

Outer rotor structure ideal for index operation

No need to return to origin with battery-less absolute position detector

Support for adjustment using the AI adjustment function of AX Tools
(free of charge)

Gearless structure for high reliability and maintenance-free
Direct drive motor general purpose
AX1000T/AX2000T/AX4000T/AX7000X
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
RJ45
Specifications

Cylinder bore size: ø2.5 to ø40

Working pressure range: 0.2 MPa to 0.7 MPa
Features

Space saving design with valve width of 7 mm and 10 mm

Response time: 12 ms (two 3-port valves integrated)
Ideal for air operated valve operation

A variety of fittings (ø1.8, ø3, ø4) contributes to equipment
space saving
3, 5-port pilot operated valve PLC compatible block manifold
MN3E/MN4E
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES RJ45
Specifications

Max. torque: 7.5 to 3700 N m

Absolute positioning accuracy: ±10 to 15 arcsec (With correction option)

Rated rotation speed: 1 to 15 rps
Features

Compact design with high torque density per motor volume

Stable operation is realized even with large inertia

Achieves high speed and high-precision positioning

Ideal for direct drive from AC servo motor + deceleration mechanism
Specifications

Cylinder bore size: ø20 to ø100

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP20
Features

The superb sliding mechanism of the main valve realizes low
friction and long service life*1

Response time: 12 ms ±2 ms (4G1 type)

Durability count:100 million cycles (single solenoid)*1
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Pilot operated 3, 5-port valve
4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES RJ45
Specifications

Cylinder bore size: ø20 to ø125

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP65
Features

The plug-in method enables easy replacement of valves

Long service life is achieved by improvements in structure of
sliding section, packing, etc.

Durability count: 60 million cycles (at 0.5 MPa with clean air)
3, 5-port pilot operated valve, plug-in block manifold
W4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES M12 Direct drive motor high precision
τDISC
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
RJ45
14 15
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Specifications

Max. torque: 7.5 to 3700 N m

Absolute positioning accuracy:
±10 to 15 arcsec (With correction option)

Rated rotation speed: 1 to 15 rps
Features

Compact design with high torque density per motor volume

Stable operation is realized even with large inertia

Achieves high speed and high-precision positioning

Ideal for direct drive from AC servo motor + deceleration
mechanism
Direct drive motor high precision
τDISC
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. flow rate:
MEVT100 2 ℓ/min, MEVT500 6 ℓ/min

Pressure control range:
MEVT100:0 to 100kPa, MEVT500:0 to 0.5 MPa

Linearity: ±0.5% F.S. or less
Features

Thin electro pneumatic regulator manifold. Width per station: 14 mm, 80 g

Repeatability: 0.3%F.S., Response time: 0.1 sec (no load)
High precision and high response

DIN rail can be mounted. Select from 2 directions:
bottom mounting and back mounting.
Thin electro pneumatic regulator
MEVT
SENSOR
CONTROLLER
SENSOR
CONTROLLER
Specifications

Cylinder bore size: ø20 to ø140

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP20
Features

The superb sliding mechanism of the main valve
realizes low friction and long service life*1

Response time: 12 ms ±2 ms (4G1 type)

Durability count: 100 million cycles (single solenoid)*1
Pilot operated 3, 5-port valve
4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Specifications

Cylinder bore size: ø2.5 to ø40

Working pressure range: 0.2 MPa to 0.7 MPa
Specifications

Max. torque: 6 to 1000 N m

Indexing accuracy: ±15 to 30 seconds

Max. rotation speed: 30 to 300 rpm
Features

Outer rotor structure ideal for index operation

No need to return to origin with battery-less absolute position detector

Support for adjustment using the AI adjustment function of
AX Tools (free of charge)

Gearless structure for high reliability and maintenance-free
Direct drive motor general purpose
AX1000T/AX2000T/AX4000T/AX7000X
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Cylinder bore size: ø20 to ø125

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP65
Features

The plug-in method enables easy replacement of valves

Long service life is achieved by improvements in structure of
sliding section, packing, etc.

Durability count: 60 million cycles (at 0.5 MPa with clean air)
Features

Space saving design with valve width of 7 mm and 10 mm

Response time: 12 ms (two 3-port valves integrated)
Ideal for air operated valve operation

A variety of fitting compatible (ø1.8, ø3, ø4) contributes to
equipment space saving
3, 5-port pilot operated valve, plug-in block manifold
W4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
3, 5-port pilot operated valve PLC compatible block manifold
MN3E/MN4E
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
M12
Specifications

Cylinder bore size: ø20 to ø100

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP20
Features

The superb sliding mechanism of the main valve realizes low
friction and long service life*1

Response time: 12 ms ±2 ms (4G1 type)

Durability count: 100 million cycles (single solenoid)*1

Valve ON count function built-in
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Specifications

Cylinder bore size: ø20 to ø100

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP20
Features

The superb sliding mechanism of the main valve realizes low
friction and long service life*1

Response time: 12 ms ±2 ms (4G1 type)

Durability count: 100 million cycles (single solenoid)*1

Valve ON count function built-in
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Pilot operated 3, 5-port valve
4G
Pilot operated 3, 5-port valve
4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
RJ45
RJ45
Specifications

Cylinder bore size: ø20 to ø125

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP65
Features

The plug-in method enables easy replacement of valves

Long service life is achieved by improvements in structure of
sliding section, packing, etc.

Durability count: 60 million cycles (at 0.5 MPa with clean air)

Valve ON count function built-in
3, 5-port pilot operated valve, plug-in block manifold
W4G
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES M12
16 17
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Specifications

Max. load capacity (horizontal): 80 kg

Max. speed: 1100 mm/s

Repeatability: ±0.01 mm
Features

Reduces equipment stopping time with
the battery-less absolute encoder built-in

An outer rail guide is used to achieve
a compact body with high rigidity

Easy maintenance with the grease
lubrication port provided as standard
Electric actuator Slider
EBS-M/EBS-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
ECR ECG-A
Compatible
controllers
ECR ECG-A
Specifications

Max. load capacity (horizontal): 80 kg

Max. speed: 900 mm/s

Repeatability: ±0.01 mm
Features

Reduces equipment stopping time with the
battery-less absolute encoder built-in

Built-in guide reduces need for additional guides

Mounting holes are provided on top and
bottom of the product for installation
without product disassembly
Electric actuator Rod with built-in guide
EBR-M/EBR-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. torque: 4.66 N m

Allowable moment of inertia: 0.0297 kg m2

Max. angular speed: 200 deg/s
Features

Equivalent capacity and dimensions
as pneumatic components

Self-lock mechanism with manual operation

The center of rotation and the center of
the actuator body are coaxial.
Electric actuator Rotary
FGRC
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. gripping power: 65 N (per finger)

Max. stroke: 14 mm (7 mm per finger)

Max. gripping speed: 15 mm/s (per
finger)
Features

Equivalent capacity and dimensions as
pneumatic components

Self-lock mechanism with manual operation

Compatible mounting with air hand LSH
Electric Actuator 2-Finger Gripper
FLSH
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. load capacity (horizontal): 11 kg

Max. speed: 300 mm/s

Max. pressing force: 210 N
Features

Equivalent capacity and dimensions
as pneumatic components

High rigidity is achieved with linear
guide built-in

Dimensions compatible with pneumatic LCR
Electric actuator Table
FLCR
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
ECR ECG-B
Compatible
controllers
ECR ECG-B
Compatible
controllers
ECR ECG-B
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Supported actuators: EBS-G, EBR-G
(Applicable motor size: 35 to 56)

Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP

Power supply voltage: 24 VDC ±10%

Current consumption: 0.4A or less (control power supply)
Max. 2.8 A or less (power supply)

Degree of protection: IP20
Specifications

Supported actuators: FLSH, FLCR, FGRC
(Applicable motor size: 20 to 35)

Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP

Power supply voltage: 24 VDC ±10%

Current consumption: 0.4 A or less (control power supply)
Max. 2.8 A or less (power supply)

Degree of protection: IP20
Features

Contributes to the reduction of inventory
by connecting to all sizes of two models.

Automatic recognition function does not
require initial setting when connecting
the actuator and controller

Compact and can be installed adjacently,
38% of installation space compared to
conventional models. Space saving is
realized.

Free download of dedicated software
S-Tools from HP
Features

Contributes to the reduction of stock by
connecting to all sizes of all 3 models

Compact and can be installed adjacently,
41% of installation space compared to
conventional models.

Free download of dedicated software
S-Tools from HP
Electric motion components controller
ECG-A
Electric motion components controller
ECG-B
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Supported actuators: EBS-M, EBR-M, FLSH, FLCR, FGRC
(Applicable motor size: 20 to 56)

Supported network: CC-Link, EtherCAT, IO-Link

Power supply voltage: 24 VDC ±10% or 48 VDC ±10%

Current consumption: 0.6 A or less (control power supply)
Max. 6.1 A or less (power supply)

Degree of protection: IP20
Features

Contributes to the reduction of inventory
by connecting to all sizes of five models.

Automatic recognition function does not
require initial setting when connecting
the actuator and controller

Compact and can be installed adjacently.
44% of installation space compared to
conventional models.

Free download of dedicated software
S-Tools from HP
Electric motion components controller
ECR
18 19
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Specifications

Cylinder bore size: ø20 to ø100

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP20
Features

The superb sliding mechanism of the main valve realizes low
friction and long service life*1

Response time: 12 ms ±2 ms (4G1 type)

Durability count: 100 million cycles (single solenoid)*1
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Specifications

Max. torque: 6 to 1000 N m

Indexing accuracy: ±15 to 30 seconds

Max. rotation speed: 30 to 300 rpm
Features

Outer rotor structure ideal for index operation

No need to return to origin with battery-less absolute position detector

Support for adjustment using the AI adjustment function of AX Tools
(free of charge)

Gearless structure for high reliability and maintenance-free
Pilot operated 3, 5-port valve
4G
Direct drive motor general purpose
AX1000T/AX2000T/AX4000T/AX7000X
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
Specifications

Cylinder bore size: ø20 to ø100

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP20
Features

The superb sliding mechanism of the main valve realizes low
friction and long service life*1

Response time: 12 ms ±2 ms (4G1 type)

Durability count: 100 million cycles (single solenoid)*1

Valve ON count function built-in
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Pilot operated 3, 5-port valve
4G
RJ45
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
Specifications

Cylinder bore size: ø20 to ø125

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP65
Features

The plug-in method enables easy replacement of valves

Long service life is achieved by improvements in structure of
sliding section, packing, etc.

Durability count: 60 million cycles (at 0.5 MPa with clean air)

Valve ON count function built-in
3, 5-port pilot operated valve, plug-in block manifold
W4G
M12
20 21
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Supported actuators: EBS-G, EBR-G
(Applicable motor size: 35 to 56)

Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP

Power supply voltage: 24 VDC ±10%

Current consumption: 0.4 A or less (control power supply)
Max. 2.8 A or less (power supply)

Degree of protection: IP20
Specifications

Supported actuators: FLSH, FLCR, FGRC (Applicable
motor size: 20 to 35)

Supported network: 
CC-Link, IO-Link, EtherCAT, EtherNet/IP

Power supply voltage: 24 VDC ±10%

Current consumption: 0.4 A or less (control power supply)
Max. 2.8 A or less (power supply)

Degree of protection: IP20
Features

Contributes to the reduction of inventory by
connecting to all sizes of two models.

Automatic recognition function does not require initial
setting when connecting the actuator and controller

Compact and can be installed adjacently, 38%
of installation space compared to conventional
models. Space saving is realized.

Free download of dedicated software S-Tools from HP
Features

Contributes to the reduction of stock by
connecting to all sizes of all 3 models

Compact and can be installed adjacently, 41%
of installation space compared to conventional
models. Space saving is realized.

Free download of dedicated software S-Tools
from HP
Electric motion components controller
ECG-A
Electric motion components controller
ECG-B
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Supported actuators: EBS-M, EBR-M, FLSH, FLCR, FGRC
(Applicable motor size: 20 to 56)

Supported network: CC-Link, EtherCAT, IO-Link

Power supply voltage: 24 VDC ±10% or 48 VDC ±10%

Current consumption: 0.6 A or less (control power supply)
Max. 6.1 A or less (power supply)

Degree of protection: IP20
Features

Contributes to the reduction of inventory by connecting
to all sizes of five models.

Automatic recognition function does not require initial setting
when connecting the actuator and controller

Compact and can be installed adjacently. Compared
with conventional models, 44% of installation space
compared to conventional models. Space saving is
realized.

Free download of dedicated software S-Tools from HP
Electric motion components controller
ECR
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Size Expansion: 3 Sizes ( 20, 25 L)

Encoder Incremental Encoder

Drive: rack and pinion, worm gear

Stroke range: 100 (50 mm per finger) to 160 mm (80 mm per finger)

Max. gripping power: 80 N to 500 N (per finger)

Repeatability: ±0.02 mm

Power supply voltage: 24 VDC ±10%

Power saving: 0.2Aor less (control power supply),
Max. 2.8Aor less (power supply)

Degree of protection: IP20
Features

Long stroke eliminates the need for tool change and supports various workpieces. Reduces tool costs.

Thin body reduces base shaft load and moment of inertia. For robot miniaturization

Built-in controller saves space on the control panel

Power and control cables are used as one unit, contributing to reduced wiring and disconnection
Electric Actuator 2-Finger Gripper
FFLD
Controller integrated
Specifications

Max. load capacity (horizontal): 80 kg

Max. speed: 1100 mm/s

Repeatability: ±0.01 mm
Features

Reduces equipment stopping time with the
battery-less absolute encoder built-in

An outer rail guide is used to achieve a
compact high-rigidity body

Easy maintenance with the grease lubrication
port provided as standard
Electric actuator Slider
EBS-M/EBS-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
Compatible
controllers
ECR
ECR
ECG-A
ECG-A
Specifications

Max. load capacity (horizontal): 80 kg

Max. speed: 900 mm/s

Repeatability: ±0.01 mm
Features

Reduces equipment stopping time with the
battery-less absolute encoder built-in

Built-in guide reduces need for additional guides

Mounting holes are provided on top and
bottom of the product for installation without
product disassembly
Electric actuator Rod with built-in guide
EBR-M/EBR-G
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. torque: 4.66 N m

Allowable moment of inertia:
0.0297 kg m2

Max. angular speed: 200 deg/s
Features

Equivalent capacity and dimensions as
pneumatic components

Self-lock mechanism with manual operation

The center of rotation and the center of the
actuator body are coaxial.
Electric actuator Rotary
FGRC
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. gripping power: 65N (per finger)

Max. stroke: 14 mm (7 mm per finger)

Max. gripping speed: 15 mm/s (per
finger)
Features

Equivalent capacity and dimensions as
pneumatic components

Self-lock mechanism with manual operation

Compatible mounting with air hand LSH
Electric Actuator 2-Finger Gripper
FLSH
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Specifications

Max. load capacity (horizontal): 11 kg

Max. speed: 300 mm/s

Max. pressing force: 210 N
Features

Equivalent capacity and dimensions
as pneumatic components

High rigidity is achieved with linear guide
built-in

Dimensions compatible with pneumatic LCR
Electric actuator Table
FLCR
ELECTRIC
MOTOR
ELECTRIC
MOTOR
M
M
Compatible
controllers
ECR ECG-B
Compatible
controllers
ECR ECG-B
Compatible
controllers
ECR ECG-B
M12
22 23
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Ethernet/IP
DeviceNet
CC-Link
PROFINET
PROFI-BUS
IO-Link
CC-Link
IE
Field
Basic
CC-Link
IE
Field
EtherCAT
Specifications

Set pressure For low pressure: -101.0 to +101.0 kPa
For high pressure: -0.101 to +1.010 MPa

IO-Link communication specifications
transmission speed: COM3 (230.4 kbps)
Min. cycle time: 1.0 ms
Features
 30 × 25.5 compact size

Set value can be changed while viewing
present value

Oil-prohibited wetted section (option)
Digital pressure sensor
PPX
SENSOR
CONTROLLER
SENSOR
CONTROLLER
Specifications

Flow rate range: 0.4 to 250 L/min

Applicable fluid: pure water, industrial water

IO-Link communication specifications
transmission speed: COM2 (38.4 kbps)
Min. cycle time: 5ms
Features

All models equipped as standard with
water temperature measuring function

Manual valve for easy flow rate adjustment
(option)

Display screen rotation
Karman vortex flow rate sensor for water FLUEREX
WFK2
SENSOR
CONTROLLER
SENSOR
CONTROLLER M12
Specifications

Flow rate range: 0.5 to 60 L/min

Applicable fluid: 
Water, fluids that do not corrode
wetted part materials (conductive
fluids)

IO-Link communication specifications
transmission speed: COM2 (38.4 kbps)
Min. cycle time: 5 ms
Features

The Flo-Thru structure allows use
even with water of poor quality

Max. working pressure: 2.0 MPa

Fluid temperature measuring function
(option)
Capacitance electromagnetic flow sensor
WFC
SENSOR
CONTROLLER
SENSOR
CONTROLLER
Specifications

Working pressure: 50 to 200 kPa

Detection range: Short range: 0.02 to 0.15 mm
Wide range: 0.03 to 0.4 mm

IO-Link communication specifications
transmission speed: COM2 (38.4 kbps)
Min. cycle time: 5 ms
Features

Digital display enables contact
confirmation at a glance

High precision 2-point output

Detection air flow clog notification function
Digital gap switch
GPS3
SENSOR
CONTROLLER
SENSOR
CONTROLLER M12
*For stainless steel body only
Specifications

Flow rate range: 0.5 L/min to 1000 L/min

Applicable fluid: clean air, compressed air, nitrogen
gas, argon, oxygen*, carbon dioxide, mixed gas (argon
+ carbon dioxide)

IO-Link communication specifications transmission speed:
COM2 (38.4 kbps) Min. cycle time: 5 ms
Features

Five types of gases can be measured with just one
unit thanks to the gas type switching function

Body material: resin,stainless steel (can be
used selectively depending on the environment)

Uni-directional and bi-directional fluid measurement

High precision/high responsiveness
Repeatability: Within ±1% F.S.
Display system: Within ±3% F.S.
Compact flow rate sensor RAPIFLOW
FSM3
SENSOR
CONTROLLER
SENSOR
CONTROLLER M12
Specifications

Flow rate range: 60 L/min to 1500 L/min

IO-Link communication specifications transmission speed:
COM3 (230.4 kbps) Min. cycle time: 2 ms
Features

The pressure value being controlled
can be confirmed with the display

Pressure control stop function built-in
Stops control when it is not required
Electro-pneumatic regulator
EVD
SENSOR
CONTROLLER
SENSOR
CONTROLLER M12
M12
DIRECTIONAL
CONTROL
VALVES
DIRECTIONAL
CONTROL
VALVES
AIR
HAND
AIR
HAND
Specifications

Cylinder bore size: ø20 to ø100

Working pressure range: 0.2 MPa to 0.7 MPa

Degree of protection: IP40

IO-Link communication specifications
Transmission speed: COM2 (38.4 kbps),
COM3 (230.4 kbps)
Min. cycle time: 2.3 ms (COM2), 1.0ms (COM3)
Specifications

Bore size: ø10, 16, 20, 25

Working pressure range: 0.2 MPa to 0.7 MPa

Operating stroke: 4 to 14 mm (according to bore size)

Repeatability: ±0.02 mm

IO-Link communication specifications transmission
speed: COM3 (230.4 kbps)
Min. cycle time: 1 ms
Pilot operated 3, 5-port valve
4G
Linear Slide Hand with Length Measuring Function
LSHM-HP2
*1) 4GA/BR/M4GA/BR/MN4GA/BR only
Features

The superb sliding mechanism of the main
valve realizes low friction and long service life*1

Response time: 12 ms ±2 ms (4G1)

Durability count: 100 million cycles (single solenoid)*1

Valve ON count function built-in
Features

With the length measuring function, predictive maintenance is possible
such as detection of gripping jaw wear, workpiece model judgment, etc..

Industry's first integrated sensor structure realizes high
precision length measurement

Rubber cover option for environment-resistance lined up

Input 4 points of the operating stroke and switch output
with process data
Specifications

Flow rate control range: 0.015 to 100 L/min (air, nitrogen,)
(Applicable fluid) 0.015 to 50 L/min (argon)
0.015 to 10 L/min (oxygen, city gas, propane)
0.06 to 20 L/min (Helium)

Accuracy ±3% F.S. Repeatability: ±1% F.S.

IO-Link communication specifications transmission speed:
COM3 (230.4 kbps) Min. cycle time: 2 ms
Features

Equipped digital display makes control
status visible at a glance. Can be operated
from the button on the body or IO-Link

Output instantaneous flow rate/accumulated
flow with process data
Compact flow rate controller RAPIFLOW
FCM
SENSOR
CONTROLLER
SENSOR
CONTROLLER M12
M12
2022.10

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Protocolos de Comunicação para Automação Pneumática - CKD CORPORATION AERODYNAMIC TECHNOLOGY

  • 1. IoT Compatible Components Series Improving plant productivity using IoT CC-1466A 3
  • 2. 2 3 Ethernet PLC Pilot operated 3, 5-port valve W4G (IP65) Pilot operated 3, 5-port valve 4E (Space saving) Pilot operated 3, 5-port valve 4G (IP20) Thin electro pneumatic regulator MEVT IT Control I/O Direct drive motor τDISC (High precision) Direct drive motor AX (General purpose) IO-Link Master Controller ECR Controller ECG-B Electric actuator Slider EBS-M Electric actuator Rod with built-in guide EBR-M Electric actuator Rotary FGRC Electric actuator Rotary FGRC Electric actuator Table FLCR Electric actuator Table FLCR Electric actuator 2-finger Gripper FLSH Electric actuator 2-finger Gripper FLSH Pressure sensor PPX Contact sensor GPS3 Controller ECG-A Electric actuator Slider EBS-G Electric actuator Rod with built-in guide EBR-G Controller ECR Controller ECG-B Electric actuator Slider EBS-M Electric actuator Rod with built-in guide EBR-M Electric actuator Rotary FGRC Electric actuator Rotary FGRC Electric actuator Table FLCR Electric actuator Table FLCR Electric actuator 2-finger Gripper FLSH Electric actuator 2-finger Gripper FLSH Controller ECG-A Electric actuator Slider EBS-G Electric actuator Rod with built-in guide EBR-G Electric actuator 2-Finger Gripper FFLD (controller integrated) Flow rate sensor for air FSM3 Flow rate controller for air FCM Electro pneumatic regulator EVD Flow rate sensor for liquids WFC Flow rate sensor for water WFK2 Pilot operated 3, 5-port valve 4G (IP40) Pneumatic actuator with length measurement function Linear Slide Hand LSHM-HP2 System configuration CKD network Components are available in a variety of ways. With the globalization of production and the declining labor population as a backdrop, components are required to deal with various networks. CKD is available with products for various industrial networks at production sites. High productivity is supported by customers through components which allow collaboration between people and machines. AIR HAND AIR HAND ELECTRIC MOTOR ELECTRIC MOTOR M M DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES SENSOR CONTROLLER SENSOR CONTROLLER RJ45 M12 Electric motion components Directional control valve Sensor/ controller Pneumatic actuator Compatible communication port RJ45 Compatible communication port M12
  • 3. 4 5 Correspondence list by product Product category Product Compatible controllers EtherNet/IP DeviceNet EtherCAT CC-Link IE Field CC-Link IE Field Basic CC-Link PROFINET PROFI-BUS DP IO-Link ECG-A ECG-B ECR Electric motion components Direct drive motor general purpose AX1000T/AX2000T/AX4000T/AX7000X Electric motion components Direct drive motor high precision τDISC Electric motion components Controller ECG-A Electric motion components Controller ECG-B Electric motion components Controller ECR Electric motion components Electric actuator Slider EBS-G Electric motion components Electric actuator Slider EBS-M Electric motion components Electric actuator Rod with built-in guide EBR-G Electric motion components Electric actuator Rod with built-in guide EBR-M Electric motion components Electric Actuator 2-Finger Gripper FLSH Electric motion components Electric actuator Table FLCR Electric motion components Electric actuator Rotary FGRC Electric motion components Electric Actuator 2-Finger Gripper FFLD Pneumatic actuator Linear Slide Hand with Length Measuring Function LSHM-HP2 Directional control valve Pilot operated 3, 5-port valve 4G Directional control valve 3, 5-port pilot operated valve, plug-in block manifold W4G Directional control valve 3, 5-port pilot operated valve PLC compatible block manifold MN3E/MN4E Sensor/controller Compact flow rate controller RAPIFLOW FCM Sensor/controller Electro-pneumatic regulator EVD Sensor/controller Thin electro-pneumatic regulator MEVT Sensor/controller Compact flow rate sensor RAPIFLOW FSM3 Sensor/controller Digital pressure sensor PPX Sensor/controller Digital gap switch GPS3 Sensor/controller Karman vortex flow rate sensor for water FLUEREX WFK2 Sensor/controller Capacitance electromagnetic flow sensor WFC Page 6 Page 9 Page 10 Page 14 Page 14 Page 15 Page 18 Page 19 Page 20 EtherNet/IP and DeviceNet are registered trademarks of ODVA. EtherCAT is a patented Engineering and registered trademark licensed in Germany by Beckhoff Automation GmbH. CC-Link, CC-Link IE Field and CC-Link IE Field Basic are registered trademarks of the Mitsubishi Electric Corporation. PROFINET, PROFIBUS and IO-Link are registered trademarks of PROFIBUS User Organization.
  • 4. 6 7 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT ELECTRIC MOTOR ELECTRIC MOTOR M M ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Supported actuators: EBS-G, EBR-G (Applicable motor size: 35 to 56) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4 A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Specifications Supported actuators: FLSH, FLCR, FGRC (Applicable motor size: 20 to 35) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4 A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Features Contributes to the reduction of inventory by connecting to all sizes of 2 models. Automatic recognition function does not require initial setting when connecting the actuator and controller Compact and can be installed adjacently, 38% of installation space compared to conventional models. Space saving is realized. Free download of dedicated software S-Tools from HP Features Contributes to the reduction of inventory by connecting to all sizes of 3 models. Compact and can be installed adjacently, 41% of installation space compared to conventional models. Space saving is realized Free download of dedicated software S-Tools from HP Electric motion components controller ECG-A Electric motion components controller ECG-B Specifications Max. load capacity (horizontal): 80 kg Max. speed: 900 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in Built-in guide reduces need for an additional guide Mounting holes are provided on top and bottom of the product for installation without product disassembly Electric actuator Rod with built-in guide EBR-G ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. load capacity (horizontal): 80 kg Max. speed: 1100 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in An outer rail guide is used to achieve a compact body with high rigidity Easy maintenance with the grease lubrication port provided as standard Electric actuator Slider EBS-G ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers Compatible controllers ECG-A ECG-A Specifications Max. torque: 4.66 N m Allowable moment of inertia: 0.0297 kg m2 Max. angular speed: 200 deg/s Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation The center of rotation and the center of the actuator body are coaxial. Electric actuator Rotary FGRC ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. gripping power: 65 N (per finger) Max. stroke: 14 mm (7 mm per finger) Max. gripping speed: 15 mm/s (per finger) Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation Compatible mounting with air hand LSH Electric Actuator 2-Finger Gripper FLSH ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. load capacity (horizontal): 11 kg Max. speed: 300 mm/s Max. pressing force: 210 N Features Equivalent capacity and dimensions as pneumatic components High rigidity is achieved with linear guide built-in Dimensions compatible with pneumatic LCR Electric actuator Table FLCR ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers Compatible controllers Compatible controllers ECG-B ECG-B ECG-B RJ45 RJ45 RJ45 RJ45 RJ45 RJ45 RJ45
  • 5. 8 9 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1) Durability count: 100 million cycles (single solenoid)*1 *1) 4GA/BR/M4GA/BR/MN4GA/BR only Pilot operated 3, 5-port valve 4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES RJ45 Specifications Cylinder bore size: ø20 to ø125 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP65 Features The plug-in method enables easy replacement of valves Long service life is achieved by improvements in structure of sliding section, packing, etc. Durability: 60 million cycles (at 0.5 MPa with clean air) 3, 5-port pilot operated valve, plug-in block manifold W4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES M12 Specifications Cylinder bore size: ø20 to ø125 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP65 Features The plug-in method enables easy replacement of valves Long service life is achieved by improvements in structure of sliding section, packing, etc. Durability count: 60 million cycles (at 0.5 MPa with clean air) 3, 5-port pilot operated valve, plug-in block manifold W4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES M12 Specifications Max. torque: 6 to 1000 N m Indexing accuracy: ±15 to 30 seconds Max. rotation speed: 30 to 300 rpm Features Outer rotor structure ideal for index operation No need to return to origin with battery-less absolute position detector Support for adjustment using theAI adjustment function of AX Tools (free of charge) Gearless structure for high reliability and maintenance-free Direct drive motor general purpose AX1000T/AX2000T/AX4000T/AX7000X ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1) Durability count: 100 million cycles (single solenoid)*1 *1) 4GA/BR/M4GA/BR/MN4GA/BR only Pilot operated 3, 5-port valve 4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES Specifications Max. torque: 6 to 1000 N m Indexing accuracy: ±15 to 30 seconds Max. rotation speed: 30 to 300 rpm Features Outer rotor structure ideal for index operation No need to return to origin with battery-less absolute position detector Support for adjustment using the AI adjustment function of AX Tools (free of charge) Gearless structure for high reliability and maintenance-free Direct drive motor general purpose AX1000T/AX2000T/AX4000T/AX7000X ELECTRIC MOTOR ELECTRIC MOTOR M M RJ45 RJ45 Specifications Cylinder bore size: ø2.5 to ø40 Working pressure range: 0.2 MPa to 0.7 MPa Specifications Cylinder bore size: ø2.5 to ø40 Working pressure range: 0.2 MPa to 0.7 MPa Features Space saving design with valve width of 7 mm and 10 mm Response time 12 ms (two 3-port valves integrated) Ideal for air operated valve operation A variety of fittings (ø1.8, ø3, ø4) contributes to equipment space saving Features Space saving design with valve width of 7 mm and 10 mm Response time: 12 ms (two 3-port valves integrated) Ideal for air operated valve operation A variety of fittings (ø1.8, ø3, ø4) contributes to equipment space saving Valve ON count function built-in. 3, 5-port pilot operated valve PLC compatible block manifold MN3E/MN4E 3, 5-port pilot operated valve PLC compatible block manifold MN3E/MN4E DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES Specifications Max. flow rate: MEVT100 2 ℓ/min, MEVT500 6 ℓ/min Pressure control range: MEVT100: 0 to 100 kPa MEVT500: 0 to 0.5 MPa Linearity: ±0.5% F.S. or less Features Thin electro pneumatic regulator, manifold. Width per station: 14 mm, 80 g Repeatability: 0.3% F.S. Response time 0.1 sec (no load) High precision and high response DIN rail can be mounted. Select from 2 directions: bottom mounting and back mounting. Thin electro-pneumatic regulator MEVT SENSOR CONTROLLER SENSOR CONTROLLER
  • 6. 10 11 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Specifications Max. load capacity (horizontal): 80 kg Max. speed: 1100 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in An outer rail guide is used to achieve a compact body with high rigidity Easy maintenance with the grease lubrication port provided as standard Electric actuator Slider EBS-M/EBS-G ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers Compatible controllers ECR ECR ECG-A ECG-A Specifications Max. load capacity (horizontal): 80 kg Max. speed: 900 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in Built-in guide reduces need for additional guides Mounting holes are provided on top and bottom of the product for installation without product disassembly Electric actuator Rod with built-in guide EBR-M/EBR-G ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. torque: 4.66 N m Allowable moment of inertia: 0.0297 kg m2 Max. angular speed: 200 deg/s Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation The center of rotation and the center of the actuator body are coaxial. Electric actuator Rotary FGRC ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. gripping power: 65 N (per finger) Max. stroke: 14 mm (7 mm per finger) Max. gripping speed: 15 mm/s (per finger) Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation Compatible mounting with air hand LSH Electric Actuator 2-Finger Gripper FLSH ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. load capacity (horizontal): 11 kg Max. speed: 300 mm/s Max. pressing force: 210 N Features Equivalent capacity and dimensions as pneumatic components High rigidity is achieved with linear guide built-in Dimensions compatible with pneumatic LCR Electric actuator Table FLCR ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers ECR ECG-B Compatible controllers ECR ECG-B Compatible controllers ECR ECG-B RJ45 RJ45 RJ45 RJ45 RJ45 ELECTRIC MOTOR ELECTRIC MOTOR M M ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Supported actuators: EBS-G, EBR-G (Applicable motor size: 35 to 56) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4 A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Specifications Supported actuators: FLSH, FLCR, FGRC (Applicable motor size: 20 to 35) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4 A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Features Contributes to the reduction of inventory by connecting to all sizes of two models. Automatic recognition function does not require initial setting when connecting the actuator and controller Compact and can be installed adjacently, 38% of installation space compared to conventional models. Space saving is realized. Free download of dedicated software S-Tools from HP Features Contributes to the reduction of stock by connecting to all sizes of all 3 models Compact and can be installed adjacently. Compared with conventional models, 41% of installation space is available. Space saving is realized Free download of dedicated software S-Tools from HP Electric motion components controller ECG-A Electric motion components controller ECG-B ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Supported actuators: EBS-M, EBR-M, FLSH, FLCR, FGRC (Applicable motor size: 20 to 56) Supported network: CC-Link, EtherCAT, IO-Link Power supply voltage: 24 VDC ±10% or 48 VDC ±10% Current consumption: 0.6 A or less (control power supply) Max. 6.1 A or less (power supply) Degree of protection: IP20 Features Contributes to the reduction of inventory by connecting to all sizes of five models. Automatic recognition function does not require initial setting when connecting the actuator and controller Compact and can be installed adjacently. Compared with conventional models, 44% of installation space is available. Space saving achieved Free download of dedicated software S-Tools from HP Electric motion components controller ECR RJ45 RJ45 RJ45
  • 7. 12 13 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Specifications Max. torque: 6 to 1000 N am Indexing accuracy: ±15 to 30 seconds Max. rotation speed: 30 to 300 rpm Features Outer rotor structure ideal for index operation No need to return to origin with battery-less absolute position detector Support for adjustment using the AI adjustment function of AX Tools (free of charge) Gearless structure for high reliability and maintenance-free Direct drive motor general purpose AX1000T/AX2000T/AX4000T/AX7000X ELECTRIC MOTOR ELECTRIC MOTOR M M RJ45 Specifications Cylinder bore size: ø2.5 to ø40 Working pressure range: 0.2 MPa to 0.7 MPa Features Space saving design with valve width of 7 mm and 10 mm Response time: 12 ms (two 3-port valves integrated) Ideal for air operated valve operation A variety of fittings (ø1.8, ø3, ø4) contributes to equipment space saving 3, 5-port pilot operated valve PLC compatible block manifold MN3E/MN4E DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES RJ45 Specifications Max. torque: 7.5 to 3700 N m Absolute positioning accuracy: ±10 to 15 arcsec (With correction option) Rated rotation speed: 1 to 15 rps Features Compact design with high torque density per motor volume Stable operation is realized even with large inertia Achieves high speed and high-precision positioning Ideal for direct drive from AC servo motor + deceleration mechanism Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1 type) Durability count:100 million cycles (single solenoid)*1 *1) 4GA/BR/M4GA/BR/MN4GA/BR only Pilot operated 3, 5-port valve 4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES RJ45 Specifications Cylinder bore size: ø20 to ø125 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP65 Features The plug-in method enables easy replacement of valves Long service life is achieved by improvements in structure of sliding section, packing, etc. Durability count: 60 million cycles (at 0.5 MPa with clean air) 3, 5-port pilot operated valve, plug-in block manifold W4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES M12 Direct drive motor high precision τDISC ELECTRIC MOTOR ELECTRIC MOTOR M M RJ45
  • 8. 14 15 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Specifications Max. torque: 7.5 to 3700 N m Absolute positioning accuracy: ±10 to 15 arcsec (With correction option) Rated rotation speed: 1 to 15 rps Features Compact design with high torque density per motor volume Stable operation is realized even with large inertia Achieves high speed and high-precision positioning Ideal for direct drive from AC servo motor + deceleration mechanism Direct drive motor high precision τDISC ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. flow rate: MEVT100 2 ℓ/min, MEVT500 6 ℓ/min Pressure control range: MEVT100:0 to 100kPa, MEVT500:0 to 0.5 MPa Linearity: ±0.5% F.S. or less Features Thin electro pneumatic regulator manifold. Width per station: 14 mm, 80 g Repeatability: 0.3%F.S., Response time: 0.1 sec (no load) High precision and high response DIN rail can be mounted. Select from 2 directions: bottom mounting and back mounting. Thin electro pneumatic regulator MEVT SENSOR CONTROLLER SENSOR CONTROLLER Specifications Cylinder bore size: ø20 to ø140 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1 type) Durability count: 100 million cycles (single solenoid)*1 Pilot operated 3, 5-port valve 4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES *1) 4GA/BR/M4GA/BR/MN4GA/BR only Specifications Cylinder bore size: ø2.5 to ø40 Working pressure range: 0.2 MPa to 0.7 MPa Specifications Max. torque: 6 to 1000 N m Indexing accuracy: ±15 to 30 seconds Max. rotation speed: 30 to 300 rpm Features Outer rotor structure ideal for index operation No need to return to origin with battery-less absolute position detector Support for adjustment using the AI adjustment function of AX Tools (free of charge) Gearless structure for high reliability and maintenance-free Direct drive motor general purpose AX1000T/AX2000T/AX4000T/AX7000X ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Cylinder bore size: ø20 to ø125 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP65 Features The plug-in method enables easy replacement of valves Long service life is achieved by improvements in structure of sliding section, packing, etc. Durability count: 60 million cycles (at 0.5 MPa with clean air) Features Space saving design with valve width of 7 mm and 10 mm Response time: 12 ms (two 3-port valves integrated) Ideal for air operated valve operation A variety of fitting compatible (ø1.8, ø3, ø4) contributes to equipment space saving 3, 5-port pilot operated valve, plug-in block manifold W4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES 3, 5-port pilot operated valve PLC compatible block manifold MN3E/MN4E DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES M12 Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1 type) Durability count: 100 million cycles (single solenoid)*1 Valve ON count function built-in *1) 4GA/BR/M4GA/BR/MN4GA/BR only Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1 type) Durability count: 100 million cycles (single solenoid)*1 Valve ON count function built-in *1) 4GA/BR/M4GA/BR/MN4GA/BR only Pilot operated 3, 5-port valve 4G Pilot operated 3, 5-port valve 4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES RJ45 RJ45 Specifications Cylinder bore size: ø20 to ø125 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP65 Features The plug-in method enables easy replacement of valves Long service life is achieved by improvements in structure of sliding section, packing, etc. Durability count: 60 million cycles (at 0.5 MPa with clean air) Valve ON count function built-in 3, 5-port pilot operated valve, plug-in block manifold W4G DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES M12
  • 9. 16 17 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Specifications Max. load capacity (horizontal): 80 kg Max. speed: 1100 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in An outer rail guide is used to achieve a compact body with high rigidity Easy maintenance with the grease lubrication port provided as standard Electric actuator Slider EBS-M/EBS-G ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers ECR ECG-A Compatible controllers ECR ECG-A Specifications Max. load capacity (horizontal): 80 kg Max. speed: 900 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in Built-in guide reduces need for additional guides Mounting holes are provided on top and bottom of the product for installation without product disassembly Electric actuator Rod with built-in guide EBR-M/EBR-G ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. torque: 4.66 N m Allowable moment of inertia: 0.0297 kg m2 Max. angular speed: 200 deg/s Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation The center of rotation and the center of the actuator body are coaxial. Electric actuator Rotary FGRC ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. gripping power: 65 N (per finger) Max. stroke: 14 mm (7 mm per finger) Max. gripping speed: 15 mm/s (per finger) Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation Compatible mounting with air hand LSH Electric Actuator 2-Finger Gripper FLSH ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. load capacity (horizontal): 11 kg Max. speed: 300 mm/s Max. pressing force: 210 N Features Equivalent capacity and dimensions as pneumatic components High rigidity is achieved with linear guide built-in Dimensions compatible with pneumatic LCR Electric actuator Table FLCR ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers ECR ECG-B Compatible controllers ECR ECG-B Compatible controllers ECR ECG-B ELECTRIC MOTOR ELECTRIC MOTOR M M ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Supported actuators: EBS-G, EBR-G (Applicable motor size: 35 to 56) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Specifications Supported actuators: FLSH, FLCR, FGRC (Applicable motor size: 20 to 35) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4 A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Features Contributes to the reduction of inventory by connecting to all sizes of two models. Automatic recognition function does not require initial setting when connecting the actuator and controller Compact and can be installed adjacently, 38% of installation space compared to conventional models. Space saving is realized. Free download of dedicated software S-Tools from HP Features Contributes to the reduction of stock by connecting to all sizes of all 3 models Compact and can be installed adjacently, 41% of installation space compared to conventional models. Free download of dedicated software S-Tools from HP Electric motion components controller ECG-A Electric motion components controller ECG-B ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Supported actuators: EBS-M, EBR-M, FLSH, FLCR, FGRC (Applicable motor size: 20 to 56) Supported network: CC-Link, EtherCAT, IO-Link Power supply voltage: 24 VDC ±10% or 48 VDC ±10% Current consumption: 0.6 A or less (control power supply) Max. 6.1 A or less (power supply) Degree of protection: IP20 Features Contributes to the reduction of inventory by connecting to all sizes of five models. Automatic recognition function does not require initial setting when connecting the actuator and controller Compact and can be installed adjacently. 44% of installation space compared to conventional models. Free download of dedicated software S-Tools from HP Electric motion components controller ECR
  • 10. 18 19 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1 type) Durability count: 100 million cycles (single solenoid)*1 *1) 4GA/BR/M4GA/BR/MN4GA/BR only Specifications Max. torque: 6 to 1000 N m Indexing accuracy: ±15 to 30 seconds Max. rotation speed: 30 to 300 rpm Features Outer rotor structure ideal for index operation No need to return to origin with battery-less absolute position detector Support for adjustment using the AI adjustment function of AX Tools (free of charge) Gearless structure for high reliability and maintenance-free Pilot operated 3, 5-port valve 4G Direct drive motor general purpose AX1000T/AX2000T/AX4000T/AX7000X DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES ELECTRIC MOTOR ELECTRIC MOTOR M M DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP20 Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1 type) Durability count: 100 million cycles (single solenoid)*1 Valve ON count function built-in *1) 4GA/BR/M4GA/BR/MN4GA/BR only Pilot operated 3, 5-port valve 4G RJ45 DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES Specifications Cylinder bore size: ø20 to ø125 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP65 Features The plug-in method enables easy replacement of valves Long service life is achieved by improvements in structure of sliding section, packing, etc. Durability count: 60 million cycles (at 0.5 MPa with clean air) Valve ON count function built-in 3, 5-port pilot operated valve, plug-in block manifold W4G M12
  • 11. 20 21 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT ELECTRIC MOTOR ELECTRIC MOTOR M M ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Supported actuators: EBS-G, EBR-G (Applicable motor size: 35 to 56) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4 A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Specifications Supported actuators: FLSH, FLCR, FGRC (Applicable motor size: 20 to 35) Supported network: CC-Link, IO-Link, EtherCAT, EtherNet/IP Power supply voltage: 24 VDC ±10% Current consumption: 0.4 A or less (control power supply) Max. 2.8 A or less (power supply) Degree of protection: IP20 Features Contributes to the reduction of inventory by connecting to all sizes of two models. Automatic recognition function does not require initial setting when connecting the actuator and controller Compact and can be installed adjacently, 38% of installation space compared to conventional models. Space saving is realized. Free download of dedicated software S-Tools from HP Features Contributes to the reduction of stock by connecting to all sizes of all 3 models Compact and can be installed adjacently, 41% of installation space compared to conventional models. Space saving is realized. Free download of dedicated software S-Tools from HP Electric motion components controller ECG-A Electric motion components controller ECG-B ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Supported actuators: EBS-M, EBR-M, FLSH, FLCR, FGRC (Applicable motor size: 20 to 56) Supported network: CC-Link, EtherCAT, IO-Link Power supply voltage: 24 VDC ±10% or 48 VDC ±10% Current consumption: 0.6 A or less (control power supply) Max. 6.1 A or less (power supply) Degree of protection: IP20 Features Contributes to the reduction of inventory by connecting to all sizes of five models. Automatic recognition function does not require initial setting when connecting the actuator and controller Compact and can be installed adjacently. Compared with conventional models, 44% of installation space compared to conventional models. Space saving is realized. Free download of dedicated software S-Tools from HP Electric motion components controller ECR ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Size Expansion: 3 Sizes ( 20, 25 L) Encoder Incremental Encoder Drive: rack and pinion, worm gear Stroke range: 100 (50 mm per finger) to 160 mm (80 mm per finger) Max. gripping power: 80 N to 500 N (per finger) Repeatability: ±0.02 mm Power supply voltage: 24 VDC ±10% Power saving: 0.2Aor less (control power supply), Max. 2.8Aor less (power supply) Degree of protection: IP20 Features Long stroke eliminates the need for tool change and supports various workpieces. Reduces tool costs. Thin body reduces base shaft load and moment of inertia. For robot miniaturization Built-in controller saves space on the control panel Power and control cables are used as one unit, contributing to reduced wiring and disconnection Electric Actuator 2-Finger Gripper FFLD Controller integrated Specifications Max. load capacity (horizontal): 80 kg Max. speed: 1100 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in An outer rail guide is used to achieve a compact high-rigidity body Easy maintenance with the grease lubrication port provided as standard Electric actuator Slider EBS-M/EBS-G ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers Compatible controllers ECR ECR ECG-A ECG-A Specifications Max. load capacity (horizontal): 80 kg Max. speed: 900 mm/s Repeatability: ±0.01 mm Features Reduces equipment stopping time with the battery-less absolute encoder built-in Built-in guide reduces need for additional guides Mounting holes are provided on top and bottom of the product for installation without product disassembly Electric actuator Rod with built-in guide EBR-M/EBR-G ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. torque: 4.66 N m Allowable moment of inertia: 0.0297 kg m2 Max. angular speed: 200 deg/s Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation The center of rotation and the center of the actuator body are coaxial. Electric actuator Rotary FGRC ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. gripping power: 65N (per finger) Max. stroke: 14 mm (7 mm per finger) Max. gripping speed: 15 mm/s (per finger) Features Equivalent capacity and dimensions as pneumatic components Self-lock mechanism with manual operation Compatible mounting with air hand LSH Electric Actuator 2-Finger Gripper FLSH ELECTRIC MOTOR ELECTRIC MOTOR M M Specifications Max. load capacity (horizontal): 11 kg Max. speed: 300 mm/s Max. pressing force: 210 N Features Equivalent capacity and dimensions as pneumatic components High rigidity is achieved with linear guide built-in Dimensions compatible with pneumatic LCR Electric actuator Table FLCR ELECTRIC MOTOR ELECTRIC MOTOR M M Compatible controllers ECR ECG-B Compatible controllers ECR ECG-B Compatible controllers ECR ECG-B M12
  • 12. 22 23 Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Ethernet/IP DeviceNet CC-Link PROFINET PROFI-BUS IO-Link CC-Link IE Field Basic CC-Link IE Field EtherCAT Specifications Set pressure For low pressure: -101.0 to +101.0 kPa For high pressure: -0.101 to +1.010 MPa IO-Link communication specifications transmission speed: COM3 (230.4 kbps) Min. cycle time: 1.0 ms Features 30 × 25.5 compact size Set value can be changed while viewing present value Oil-prohibited wetted section (option) Digital pressure sensor PPX SENSOR CONTROLLER SENSOR CONTROLLER Specifications Flow rate range: 0.4 to 250 L/min Applicable fluid: pure water, industrial water IO-Link communication specifications transmission speed: COM2 (38.4 kbps) Min. cycle time: 5ms Features All models equipped as standard with water temperature measuring function Manual valve for easy flow rate adjustment (option) Display screen rotation Karman vortex flow rate sensor for water FLUEREX WFK2 SENSOR CONTROLLER SENSOR CONTROLLER M12 Specifications Flow rate range: 0.5 to 60 L/min Applicable fluid: Water, fluids that do not corrode wetted part materials (conductive fluids) IO-Link communication specifications transmission speed: COM2 (38.4 kbps) Min. cycle time: 5 ms Features The Flo-Thru structure allows use even with water of poor quality Max. working pressure: 2.0 MPa Fluid temperature measuring function (option) Capacitance electromagnetic flow sensor WFC SENSOR CONTROLLER SENSOR CONTROLLER Specifications Working pressure: 50 to 200 kPa Detection range: Short range: 0.02 to 0.15 mm Wide range: 0.03 to 0.4 mm IO-Link communication specifications transmission speed: COM2 (38.4 kbps) Min. cycle time: 5 ms Features Digital display enables contact confirmation at a glance High precision 2-point output Detection air flow clog notification function Digital gap switch GPS3 SENSOR CONTROLLER SENSOR CONTROLLER M12 *For stainless steel body only Specifications Flow rate range: 0.5 L/min to 1000 L/min Applicable fluid: clean air, compressed air, nitrogen gas, argon, oxygen*, carbon dioxide, mixed gas (argon + carbon dioxide) IO-Link communication specifications transmission speed: COM2 (38.4 kbps) Min. cycle time: 5 ms Features Five types of gases can be measured with just one unit thanks to the gas type switching function Body material: resin,stainless steel (can be used selectively depending on the environment) Uni-directional and bi-directional fluid measurement High precision/high responsiveness Repeatability: Within ±1% F.S. Display system: Within ±3% F.S. Compact flow rate sensor RAPIFLOW FSM3 SENSOR CONTROLLER SENSOR CONTROLLER M12 Specifications Flow rate range: 60 L/min to 1500 L/min IO-Link communication specifications transmission speed: COM3 (230.4 kbps) Min. cycle time: 2 ms Features The pressure value being controlled can be confirmed with the display Pressure control stop function built-in Stops control when it is not required Electro-pneumatic regulator EVD SENSOR CONTROLLER SENSOR CONTROLLER M12 M12 DIRECTIONAL CONTROL VALVES DIRECTIONAL CONTROL VALVES AIR HAND AIR HAND Specifications Cylinder bore size: ø20 to ø100 Working pressure range: 0.2 MPa to 0.7 MPa Degree of protection: IP40 IO-Link communication specifications Transmission speed: COM2 (38.4 kbps), COM3 (230.4 kbps) Min. cycle time: 2.3 ms (COM2), 1.0ms (COM3) Specifications Bore size: ø10, 16, 20, 25 Working pressure range: 0.2 MPa to 0.7 MPa Operating stroke: 4 to 14 mm (according to bore size) Repeatability: ±0.02 mm IO-Link communication specifications transmission speed: COM3 (230.4 kbps) Min. cycle time: 1 ms Pilot operated 3, 5-port valve 4G Linear Slide Hand with Length Measuring Function LSHM-HP2 *1) 4GA/BR/M4GA/BR/MN4GA/BR only Features The superb sliding mechanism of the main valve realizes low friction and long service life*1 Response time: 12 ms ±2 ms (4G1) Durability count: 100 million cycles (single solenoid)*1 Valve ON count function built-in Features With the length measuring function, predictive maintenance is possible such as detection of gripping jaw wear, workpiece model judgment, etc.. Industry's first integrated sensor structure realizes high precision length measurement Rubber cover option for environment-resistance lined up Input 4 points of the operating stroke and switch output with process data Specifications Flow rate control range: 0.015 to 100 L/min (air, nitrogen,) (Applicable fluid) 0.015 to 50 L/min (argon) 0.015 to 10 L/min (oxygen, city gas, propane) 0.06 to 20 L/min (Helium) Accuracy ±3% F.S. Repeatability: ±1% F.S. IO-Link communication specifications transmission speed: COM3 (230.4 kbps) Min. cycle time: 2 ms Features Equipped digital display makes control status visible at a glance. Can be operated from the button on the body or IO-Link Output instantaneous flow rate/accumulated flow with process data Compact flow rate controller RAPIFLOW FCM SENSOR CONTROLLER SENSOR CONTROLLER M12 M12