MEMS (micro-electro-mechanical systems) combine mechanical and electrical functions on a single chip using microfabrication technology. The fabrication process for MEMS is similar to that used for making electronic circuits and involves steps such as chemical deposition, physical deposition, lithography, and etching. MEMS can be used to create microsensors, micromachines, and microactuators from materials like metals, polymers, ceramics, and semiconductors. Some applications of MEMS technology include accelerometers in devices like game controllers and communications equipment.

1. MEMS TECHNOLOGY BY S.APPA RAO

4. FABRICATION PROCESS:

12. PIEZO-RESISTIVE ACCELEROMETER:

13. LAYOUT OF THE RESISTOR:

14. MASKS that are used 4 ACCELEROMETER:

15. FABRICATION PROCESS:

16. Contd….

17. INTERFACE ELECTRONIC CKT

18. MEMS ACCELEROMETER