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GUIDED BY: PRESENTED BY :
DR. P.C. BAPNA PRAVEEN VAISHNAV
COLLEGE OF TECHNOLOGY & ENGINEERING
UDAIPUR (RAJ.)
SEMINAR PRESENTATION
ON
MEMS AND NANOTECHNOLOGY
Department of Electronics & Communication

PRESENTED BY PRAVEENVAISHNAV

WHAT IS MEMS
 Micro(small)
 Electro(electric or electronic components)
 Mechanical(mechanical components)
 Systems(integrated, system)

 MEMS stands for Micro Electro Mechanical Systems.
 It is a technique of combining Electrical or electronics
and Mechanical components together on a chip, to produce
a system of small dimensions ..

Where do you find MEMS?
 Printers
◦ High DPI inkjets
 Projectors
 Micro-Mirrors from Texas Instruments
 Cell Phones
◦ Microphones used in most new cell phones
 Automobiles

Why MEMS
 Small Size
◦ Typically 0.1-100um feature size
Human Hair thickness ~ 50um
Red Blood Cells ~ 10um

Why MEMS
 Low cost
◦ Use existing IC fabrication technology
◦ Made primarily on Silicon Wafers

Why MEMS
 Favorable scaling for a lot of applications
◦ Flow-rate sensors
◦ Electrostatics
◦ Magnetism
◦ Many others
 Minimize energy and materials used in
manufacturing
 Improved reproducibility
 Improved accuracy and reliability
 Increased selectivity and sensitivity

MATERIAL USED
 SILICON
 POLYMERS
 METALS
 CERAMIC

APPLICATIONS OF MEMS
 Accelerometers
 Magnetometers
 Microphones
 Micro-Fluidics
 RF-MEMS
 Biomedical
 Bridge to Nanotechnology

DISADVANTAGES OF MEMS
 Farm establishment requires huge
investments
 Micro-components are Costly compare
to macro-components
 Design includes very much complex
procedures
 Prior knowledge is needed to integrate
MEMS devices

WHA IS NANOTECHNOLOGY

 Nanotechnology is the technology of
arranging atoms and molecules in a
material.
 This allows to alter the properties of a
material and build structures of desired
features.
 Nanotechnology makes it possible to
manufacture devices 80,000 times smaller
than the thickness of human hair !!

A simple analogy..
 The atoms in an object can be
compared to the blocks in a
building game.
 In a building game, the blocks
can be arranged to create
different looking structures.
 Similarly, atoms can be
arranged differently to
produce a multitude of
devices. This forms the basis
of nanotechnology.

To create and use materials, devices, and systems
with fundamentally new properties and functions
because of their small structure
GOAL OF NANOTECHNOLOGY

EFFECT

IN MEDICAL APPLICATIONS

BENEFITS IN MEDICAL APPLICATIONS
 Small volume of reagent samples (like blood),
required for analysis.
 Low power consumption.
 Less invasive, hence less painful.
 Integration permits a large number of systems
to be built on a single chip.
 Batch processing can lower costs significantly.

CLASSIFICATION OF
BIOLOGICAL MEMS DEVICES
 Biomedical MEMS – deals “in vivo”, within the host body.
→ precision surgery
→ Biotelemetry
→ Drug delivery
→ Biosensors and other physical sensors
 Biotechnology MEMS – deals “in vitro”, with the biological
samples obtained from the host body.
→ Diagnostics
→ gene sequencing
→ Drug discover
→ pathogen detection

MEMS Sensors
MEMS sensors in the biomedical field
maybe used as:
 Critical sensors used during operations.
 Long term sensors for prosthetic devices.
 Sensor arrays for rapid monitoring and
diagnosis at home.

MEMS and nanotechnology
in precision surgery

Micro-surgical tools
 Present day surgeons operate within a
domain prohibited by the mobility and
control of the surgical tools at hand.
 MEMS surgical tools provide the flexibility
and accuracy to perform precision
surgery.

ULTRASONIC MEMS
CUTTING TOOL
 These tools make use of piezoelectric materials attached to the
cutter.
 Consist of micro channels to flush out the fluid while
cutting.
 Can be used to cut tough tissues, like the hardened lenses of
patients with cataract

MEMS driven scalpels
 Precise control of the
scalpel is an important
requirement in any surgery.
 MEMS piezoelectric motor
help to accurately position
the scalpel.
 MEMS pressure sensors
incorporated on the scalpel,
can help to measure the
force exerted on the area
operated upon.Accordingly,
the scalpel can he handled.

MEMS microneedles
 This patch is applied to the skin
and drug is delivered to the body
using micropumps.
 These micropumps can be
electronically controlled to allow
specific amounts of the drug and
also deliver them at specific
intervals.
 Microneedles are too small to
reach and stimulate the nerve
endings, and hence cause no pain
to the body.
gtresearchnews.gatech.edu/ newsrelease/NEEDLES.htm

MEMS and endoscopy
 What is endoscopy ?
 A diagnostic procedure which involves the introduction of
flexible device into the lower or upper stomach tract for diagnostic
or therapeutic purposes.
 Conventional endoscopes
 Can be used to view only the first
third of the small intestine.
 Require sedation of patient is
uncomfortable procedure

ADVANTAGES OF MEMS PILL
 Requires no sedation
 Can show a view of the entire small intestine
 Can aid in early detection of cancer

Smart Pill
 A MEMS device that can be
implanted in the human body.
 Consists of
◦ biosensors
◦ Battery
◦ Control circuitry
◦ Drug tank
 The biosensors sense the
substance to be measured, say
insulin.
 Once this quantity falls below a
certain amount required by the
body, the pill releases the drug.

Working of this magic pill !
 The pill can be taken like any normal tablet.
 Once within the body, the pill's sensors
sample body fluids and pick up "meaningful
patient data" such as temperature, dissolved
oxygen levels and pH.
 The pill is expected to retrieve all data over
a 12-hour period and disposed off, once
excreted.
 This data is transmitted wirelessly to a card
attached
to the wrist of the individual.

SKIN RESURFACING
 Skin resurfacing is a form of cosmetic surgery that is
often used to aesthetically enhance the appearance of
wrinkles, skin lesions, pigmentation irregularities, moles,
roughness, and scars.
Conventional resurfacing techniques involve the use of :
 Dermabraders – devices or tools used in plastic surgery.
 Chemical peels – chemicals such as glycolic acid.

DRAWBACKS OF THE CONVENTIONAL
APPROACHES IN SKIN RESURFACING
 May cause excessive bleeding
 Often require time-consuming
procedures
 Require multiple sessions.
 Furthermore, chemical peels cannot be
used for removal of lesions with
significant depth.

MEMS SKIN RESURFACINGTOOLS
 They can be used to remove raised skin lesions as well as lesions upto
certain depths.
 These MEMS structures are packaged
onto rotary elements and used
over the affected areas.
 The debris can then be sucked out
using a suction pump.

CHALLENGES
 Life of the device.
 Retrieving data out of the device.
 Resist drifting along with the body fluids.
 Limited options
 Packaging
 Trained person is required

CONCLUSION
MEMS technology is a tool for enabling the
scaling of devices useful in biomedical
engineering but now Nanotechnology will
beat MEMS.
Nanotechnology is an emerging technology
which will rapidly transform all the fields
in the near future.

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