OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and
Expertise
Expertise / consulting development &
technology monitoring on metrology optics
technologies and applications using
Polarimetry
23.11.2010
F.Ferrieu
Micro and Nano-Technology-Scientific Consulting and
Expertise OMP _S.I.R.E.T 52230889900015
1
 Protocol establishment /Assistance interface with industrial
problems undergoing Optical characterization requests (thin
layers thickness, new materials properties, nanotechnology
in line and off line Ellipsometry/ Polarimetry set up).
These projects receive expert attention with
 A research environment inside SERMA Technologies /LETI
 Unique metrology potential with MINATEC and SERMA option
with complete characterization analyses (TEM, SIMS,..)
 The ability to be introduced inside the last innovative
optical instruments technologies with Polarimetry and
spectroscopic ellipsometers instruments available in the
Serma Technologies / LETI clean room environnement.
.

OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and
Expertise
Expertise, contribution of experience and guidance on the
possibilities for realization of measures to facilitate the
implementation of an industrial project.
23.11.2010
F.Ferrieu
OMP _S.I.R.E.T Micro and Nano-Technology-Scientific
Consulting and Expertise OMP _S.I.R.E.T 52230889900015
52230889900015
2
 Assistance in the selection of proposals made by suppliers
of instruments best suited to the needs of metrology
research.
Optimization of data acquisition from instruments.
 Support mounting of European or regional programs on the
feasibility and the relevance of a scientific project
 Parallel education & training: seminars in instrumentation
optics and applications.

OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and
Expertise
References
23.11.2010
F.Ferrieu
OMP _S.I.R.E.T Micro and Nano-Technology-Scientific
Consulting and Expertise OMP _S.I.R.E.T 52230889900015
52230889900015
3
 More than 50 publications in Ellipsometrie Polarimetrie.
 Reviewer in various scientific journals TSF1, JOSA2 EJAP3.
 Participation in various industrial projects (first spectroscopic
ellipsometers in visible, infrared and extreme ultraviolet ranges
in France)
 Knowledge within NDA interactions with different groups at
the global level Ellipsometrie and reflectometry Polarimetry: KLA
Tencor, j. Woollam, Horiba Scientific and SemiLab Sopra
1Thin Solid Films,
2Journal of The Optical Society of America,
3European Journal of Applied Physics

OPTICAL METROLOGY & POLARIMETRY
Micro and Nano-Technology-Scientific Consulting and Expertise
Nanotechnology measurement ex and
in situ processing for new materials
new Multi layers stackings and surface
properties
 Polarimetrie Photonic Structures and
lithography
adsorption of surface porosimetrie
studies
23.11.2010
OMP _S.I.R.E.T Micro and Nano-Technology-Scientific Consulting and Expertise OMP
_S.I.R.E.T 52230889900015
52230889900015 1