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Selfsys
1. Fluidic mediated self‐assembly for complex,
hybrid micro/nanosystems
J. Brugger, A. Martinoli, N. Spencer, B. Nelson,
H. Wolf, H. Knapp, L. Sciboz
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
2. Assembly challenge of N/MEMS
Today The challenge of tomorrow
• Many different kinds of • Finding a way to assemble the
micro/nano devices, MEMS, bricks into functional
S&A, CMOS, OLED, etc micro/nano-systems
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 2
3. SoA for integrating multifunctional N/MEMS
• Co-integration (if possible)
• Separate fabrication followed by joining
• Wafer Bonding; Tape automatic bonding
• Pick & Place; Robotic assembly
• Challenge for highly miniaturized systems
• Challenge for very large numbers of components
• SELFSYS: Contribute with enabling manufacturing for
future micro-assembly applications
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 3
4. Fluidic mediated self-assembly
• Known concept in R&D
• Using capillary forces to align components
• At the interface of liquids
• First industrial examples emerging
Hydrophobic area Lubricant
Srinivasan, Boehringer, Mastrangeli, van Hof, Lambert
U Washington, Seattle IMEC, Belgium
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 4
8. Loic Jacot‐Descombes
Cathrein Hückstädt
Jonas Wienen
Maurizio Gullo
(ETHZ)
(EPFL)
(CSEM)
(EPFL)
Didi Xu
(ETHZ)
Deepak Kumar
M. Mastrangeli
(ETHZ)
(EPFL)
V. Nagaiyanallur
GMermoud
(EPFL)
(ETHZ)
M/NEMS: J. Brugger (EPFL), Distributed systems: A. Martinoli (EPFL), Surface
chemistry: N. Spencer (ETHZ), Nano-Robotics: B. Nelson (ETHZ), Microfluidics: H.
Knapp (CSEM), Self assembly: H. Wolf (IBM), RFID: L. Sciboz (icare Sion);
add-on SELFSYS+: Ch: Hierold, D. Poulikakos (ETHZ)
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 8
9. Progress within SELFYS
• MEMS part fabrication
• Surface functionalization
• In-liquid self-assembly experiments
• Field induced assembly
• Template induced assembly
• Modeling RFID chip
Gold bump
+ + +
–––
V
~
antenna
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 9
10. Progress within SELFYS
• MEMS part fabrication
• Surface functionalization
• In-liquid self-assembly experiments
• Field induced assembly
• Template induced assembly
• Modeling RFID chip
Gold bump
+ + +
–––
V
~
antenna
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 10
11. Investigated shapes
Main Expected Expected
Shape: Scheme: Picture:
material: advantages: disadvantages :
Disc not restricted
1 SU‐8 low SA yield
slices to pairs
easy assembly
Flat
2 SU‐8 fabrication possible on
cylinders
and handling opposite side
Rounded higher
3 SU‐8
cylinders pairing yield
Half‐ SU‐8 or even higher smaller volume
4
spheres Ormocomp yield in SA (cavity)
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 11
12. Self-assembly of SU-8 cylinders
At water – Si oil interface: At water surface:
At the bottom: After water evaporated:
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 12
13. Fabrication of SU-8 microcapsules
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
14. Fabrication of Bi-color SU-8 cylinders
SEM images of the cylinders before release Optical image of un‐specific assembled parts in DI
(diameter ~ 100 um and height ~100 um) water after stirring.
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
15. Surface functionality for specific assembly
Yield(assembled/total): ~ 65 %
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
16. Surface Modification of SU8
Plasma treatment:
CA 70‐80 deg
CA < 10 deg
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 16
18. Half-sphere shape by inkjetting
D
Angle max at the edge: ν = CA + 180° ‐ ф
100 um
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
20. Force Curves / Teflon Coated Tip and Sample
movement parameter value
tip # curves 500 None or only very small and unstable
# positions 100 attracting force could be observed
teflon
speed 0.5 Hz for the Teflon coated tip and sample
DI water
rest time on sample 0.5 s measurements
sample
temperature 22°C
humidity 33%
Force Curve Adhesion Force
DI water
Sample
retractive
snap out
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
21. Forces between surfaces / summary
Material Attraction Force Adhesion force Material E2 E1 dE
DDT 6e-6 nN/nm^2 3.8e-4 nN/nm^2 DDT 1.16 mN 0.29 mN 0.87 mN
Carbon 3e-5 nN/nm^2 4e-4 nN/nm^2 Carbon 1.23 mN 0.31 mN 0.92 mN
Teflon 0 nN/nm^2 1e-4 nN/nm^2 Teflon 0.31 mN 0.08 mN 0.23 mN
•Hydrophobic interaction forces could be
1.60E+06
Ring
quantitatively assessed by AFM.
1.40E+06
1.20E+06
Goal
Multi ring E2
1.00E+06
•Carbon and DDT show similar adhesion
Force
8.00E+05
force.
6.00E+05
dE
4.00E+05
•Carbon better suited for micro fabrication.
2.00E+05
E1
0.00E+00
‐60 ‐40 ‐20 0 20 40 60
Alignment [um]
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
22. Progress within SELFSYS
• MEMS part fabrication
• Surface functionalization
• In-liquid self-assembly experiments
• Field induced assembly
• Template induced assembly
• Modeling RFID chip
Gold bump
+ + +
–––
V
~
antenna
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 22
23. 3 stage fluidic assembly system
1. Preparation - Transfer of parts into
functional fluid
2. Assembly - Agitation of particles to drive
self-assembly
3. Sorting - Sorting out and transferring back Supply fluid cycle
not correctly assembled parts Sedimentation filter
Reaction
Container for chamber
assembled parts
Functional fluid cycle
Sorter
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
24. Reaction chamber
Chamber size: 1 cm diameter Glass unit
Outlet (filtered)
Inlet and filtered outlet (laser cut) Filter
within
Piezo-actuation sealing
RC‐Core
Change in amplitude/frequency Outlet
Inlet
Shear forces at bubbles
Bubbles moving around PDMS ‐
Sealing
US‐transducers
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
25. Progress within SELFSYS
• MEMS part fabrication
• Surface functionalization
• In-liquid self-assembly experiments
• Field induced assembly
• Template induced assembly
• Modeling RFID chip
Gold bump
+ + +
–––
V
~
antenna
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 25
26. Field assisted assembly
Dielectrophoretic assisted Octomag motion of
assembly magnetic SU-8 flaps
• RFID chips (mCHIP/Hitachi) • Magnetic nanoparticle in
in liquid. photo-patternable SU-8
• Micro-chips with unique
codes
RFID chip
Gold bump
+ + +
–––
V
antenna
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
27. Progress within SELFSYS
• MEMS part fabrication
• Surface functionalization
• In-liquid self-assembly experiments
• Field induced assembly
• Template induced assembly
• Modeling RFID chip
Gold bump
+ + +
–––
V
~
antenna
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 27
28. Multi-scale modeling
Can we devise a unique methodological framework for modeling and controlling
these self‐assembling systems, across length‐scales?
2D 2D 3D
Robotic building block MEMS building block
5cm ALICE robot Typical size 50 to 500 um
Typical size: 2 centimeters
Swarm Typical swarm size: 10^2 to
Typical swarm size: a few dozen
Power to move 10^3 units
units
Simple on board Passive units: only local
Active units: sensing and actuation
intelligence interactions»»
Capillary and magnetic forces»»
Collective behavior Hydrophobic forces»»
Stochastic, fluidic control (pump)
Stochastic, fluidic control
(piezo)
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 28
29. Modeling Distributed Systems
Macroscopic 1: rate equations, mean field
approach, whole population
Abstraction
Common metrics
Macroscopic 2: Chemical Reaction Network,
stochastic simulations
Microscopic 1: Monte Carlo model, 1 robot = 1
agent, non-spatial
Microscopic 2: Agent-Based model, 1 robot = 1
agent, spatial
Experimental time
Define physical parameters suitable for
simulation of distributed, self-organizing
(micro) systems
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 29
30. Modeling / simulation
• 2-body motion / • 100-bodies
encounter
Material Attraction Force Adhesion force
DDT 6e-6 nN/nm^2 3.8e-4 nN/nm^2
Carbon 3e-5 nN/nm^2 4e-4 nN/nm^2
Teflon 0 nN/nm^2 1e-4 nN/nm^2
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 30
31. Add-on tasks SELFSYS+
• Magnetic particles embedded in SU-8*
• DNA coating on microcapsules
• Thermal modeling**
• enhance control of assembly/separation
a) directionality b) selectivity c) reversibility
Para‐
magnetic
capsule
T>Tm B=on Mix=on T<Tm B=on Mix=off T>Tm B=off Mix=on
* add‐on partner Ch. Hierold
** add‐on partner D. Poulikakos/J. Thome
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
32. Summary & Outlook
MEMS Modeling Fluidic assembly system
100 um
Controlled liquid‐release
Hollow capsules Capsule disassembly
opening
T>Tm B=off Mix=on
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 32
33. Loic Jacot‐Descombes
Cathrein Hückstädt
Jonas Wienen
Maurizio Gullo
(ETHZ)
(EPFL)
(CSEM)
(EPFL)
Didi Xu
(ETHZ)
Deepak Kumar
M. Mastrangeli
(ETHZ)
(EPFL)
V. Nagaiyanallur
GMermoud
(EPFL)
(ETHZ)
M/NEMS: J. Brugger (EPFL), Distributed systems: A. Martinoli (EPFL), Surface
chemistry: N. Spencer (ETHZ), Nano-Robotics: B. Nelson (ETHZ), Microfluidics: H.
Knapp (CSEM), Self assembly: H. Wolf (IBM), RFID: L. Sciboz (icare Sion);
add-on SELFSYS+: Ch: Hierold, D. Poulikakos (ETHZ)
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 33
34. Liquid release from micro-capsule
Self‐assembled Blue ink encapsulated Ink released
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems 34
35. Hollow SU-8 microcapsules
Side view
Top view
13 drops… overflow
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
36. Functionalization of SU-8 surface
PDDA
PSS
The charge characteristics are tested by dispersing SiO2 particles
Poly(diallyldimethylammonium chloride)(PDDA) – positively charged surface
Poly styrene sulfonate (PSS) – negatively charged surface
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
37. Microdrop printing of functional material
Polymer Microlenses
Fakfouri MNS 2009 Luminescent NCs
Kim Small 2009
Printing on Hot‐Surface Bio‐Printing
Lee APL 2007 Pataky in prep
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
39. Force Curves / Carbon Coated Tip and Sample
Attraction Force
movement
parameter value
tip # curves 500
carbon # positions 100
DI water speed 0.5 Hz
sample rest time on sample 0.5 s
temperature 22°C
Force Curve
humidity 33%
DI water
attractive
snap in Adhesion Force
Sample
retractive
snap out
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
40. Force Curves / DDT Coated Tip and Sample
Adhesion Force C A
A DDT
DI water
Fresh tip / sample
B
B C
DI water DDT DDT
DI water
Displacement of DDT Rearrangement of DDT
Sung et al, Appl. Phys.
A 81, 109–114 (2005)
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems
41. Modeling SA across scales
~ m ~ cm
SelfSys Lily
SELFSYS - Fluidic-mediated self-assembly for hybrid functional micro/nanosystems