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nakul agarwal micromachining questions
1. Commentonthe choice betweenpositiveandnegativephotoresistmaterialinlithography?
Explainthe stepinvolvedinsurface micromachiningtechnologywiththe helpof diagram?
What isLIGA? alsoexplainthe maindifference of thisapproachwithsurface micromachining?
Brieflyexplainthe evaporationprocesstodepositaluminiumthinfoil?
What are the reasonbehindusing vacuumchambersinmany micro fabrication?
1. Which of the followingis NOTa widelyusedmicromachiningprocess?
a. Bulk
b. Surface
c. PMMA
d. LIGA
Whichof the followingMEMS componentswouldNOTbe fabricatedusingbulk
micromachiningprocesses?
a. Cantilevers
b. Microfluidicchannels
c. Probes
d. Gear trains
Whichmicromachiningprocessorcombinedprocesseswere usedtofabricate the following
MEMS device?
a. Bulkonly
b. Surface only
c. LIGA only
d. Bulkand Surface
e.Bulkand LIGA