Invited presentation at the HERALD COST MP1402 event in Riga (Riika), Latvia, May 22-23, 2017.
1) History of atomic layer deposition (ALD)
2) Conformality analysis of ALD and other thin films
3) Surface chemistry questions in ALD
Presentation dedicated to the memory of Mr. Sven Lindfors, pioneer in building ALD reactors, close collaborator of Dr. Tuomo Suntola from 1975.