Hvordan måler og dokumenterer du?

1. Hvordan måler og
dokumenterer du?
Poul-Erik Hansen

2. Overview of talk
17 April 2018 2
 Introduction to DFM
 Introduction to Metrology Measurements
 Example of Metrology measurements
 Super Mould
 What is it all about
 How do we reduce adhesion and friction
 Instruction for guided tour

3. • Radiometri
• Spektroskopi
• Lasere
• Fiberoptik
• LED karakterisering
• Nano partikler
• Overflade karakterisering
• Partikeltælling
• Kalibrering af partikeltællere
• Ledningsevne
• pH
• Ultra rent vand
• Mikrofon kalibrering
• Infra- og ultralydsmålinger
• 3D visualisering af
lydfelter
• Akustooptiske målinger
Basal metrologi
• Masse, længde, DC spænding, resistans og
matematiske metoder
• Koordinering af dansk metrologi
• Deltagelse i globalt metrologisamarbejde
Fotonik Nanometrologi Elektrokemi Akustik

4. Primære
Reference
Lokale
Hvad er det DFM kan?
17 April 2018 4
 Målinger
• Fotonik
• Nanometrologi
• Elektrokemi
• Akustik
 Specifikation af måleudstyr
 Kalibrering af måleudstyr
 Måletekniske procedurer
 Dataanalyse
 Usikkerhedsberegninger
 Kvalitetssikring, hjælp til certificering
 Adgang til sporbarhed bl.a. nanopartikler
 Dokumentation
 Netværk til forskningsverdenen og
industripartnere
 Projektsamarbejde
 Implementering af standarder

5. Vores nye facilitet i
Hørsholm
18-04-17 5
 Kogle Allé 5, 2970 Hørsholm
 2300 m2 (1265 m2 i Lyngby)
 Nye laboratorier
 Akkrediterede ydelser
genoptages

6. Introduction to Metrology Measurements:
The important steps
17 April 2018 6
 Have a procedure
 Calibrate your instrument
 Compare the calibration results over time
 Estimate your uncertainties
Black box calibration is dangerous, you should have
some understanding of your system

7. How a stylus and a Microscope works
Tip radius: r tip = 2 μm , 5 μm , 10 μm
• Cone taper angle (q= 2*a): 60º, 90º
A Microscope is a “stylus” with smaller tip radius and better statistic
Lateral resolution is different for different instruments

8. Height measurement with a microscope
17 April 2018 8
Slope?
Known height values
Measuredheightvalues
Sample calibration at nom. 8046 nm Ref. step-height [nm] = 8046±14 (k=2)
Sample=SHS-8 Data from SensoFar calibration Relative
Microscope objective Mode/light Amplfication factor
Amplfication factor
uncertainty
(std.dev)
Step height
determined
by SensoFar
h [nm] UNF [nm] Ureprod [nm] Urepeat [nm]
Utotal [nm]
(k=2)
Uncertainty
(k=2)
DI10 VSI/white 0.99883 0.00291 8035.1 2.9 12.3 4.2 53.8 0.67% -0.14%
DI10 ePSI/white 0.99897 0.00291 8023.7 2.7 1.8 3.7 47.8 0.60% -0.28%
DI50 VSI/white 1.00108 0.00105 8046.3 2.2 0.6 4.8 20.0 0.25% 0.00%
x50 conf/blue 1.00383 0.00204 8045.8 5.4 14.7 2.6 45.5 0.57% 0.00%
x150 conf/blue 0.99800 0.00094 8045.8 3.6 2.8 1.4 17.9 0.22% 0.00%
Uncertainty
on step height Rel. Difference
from reference
measurement
with
traceability
Many Instruments have similar height measurement capability

9. Document the history of your instrument
17 April 2018 9
Sample calibration at nom. 8046nm Ref. step-height [nm] = 8046±14(k=2)
Sample=SHS-8 Data from SensoFar calibration Relative
Microscope objective Mode/light Amplfication factor
Amplfication factor
uncertainty
(std.dev)
Step height
determined
by SensoFar
h [nm] UNF [nm] Ureprod [nm] Urepeat [nm]
Utotal [nm]
(k=2)
Uncertainty
(k=2)
DI10 VSI/white 0.99883 0.00291 8035.1 2.9 12.3 4.2 53.8 0.67% -0.14%
DI10 ePSI/white 0.99897 0.00291 8023.7 2.7 1.8 3.7 47.8 0.60% -0.28%
DI50 VSI/white 1.00108 0.00105 8046.3 2.2 0.6 4.8 20.0 0.25% 0.00%
x50 conf/blue 1.00383 0.00204 8045.8 5.4 14.7 2.6 45.5 0.57% 0.00%
x150 conf/blue 0.99800 0.00094 8045.8 3.6 2.8 1.4 17.9 0.22% 0.00%
Uncertainty
on step height Rel. Difference
from reference
measurement
with
traceability
Initial result after purchasing
Improved result after upgrade
Sample calibration at nom. 8000 nm Ref. step-height [nm] (4)= 8060.6±7.0 (k=2)
Sample=SHS-8.0 (4) Data from SensoFar calibration (1) Relative
Microscope
objective Mode/light
Amplfication
factor
Amplfication factor
uncertainty
(std.dev)
Step height
determined
by SensoFar
h [nm]
UNF
[nm]
Urepeat
[nm] Ureprod [nm]
Utotal [nm]
(k=2)
Uncertainty
(k=2)
DI10 VSI/white 0.99973 0.00590 8038 3.5 15 86 200 2.5% -0.28%
DI10 ePSI/white 0.99935 0.00495 8017 2.1 10 94 206 2.6% -0.55%
DI50 VSI/white 1.00440 0.00380 8012 3.0 14 84 181 2.3% -0.60%
DI50 ePSI/white 1.00422 0.00416 8007 2.1 39 77 185 2.3% -0.67%
x50 conf./blue 1.00066 0.00472 8092 3.4 15 54 136 1.7% 0.39%
Uncertainty
on step height
Rel. Difference
from reference
measurement with
traceability
brationatnom.8046nm Ref.step-height[nm]= 8046±14(k=2)
S-8 DatafromSensoFarcalibration Relative
objective Mode/light Amplficationfactor
Amplficationfactor
uncertainty
(std.dev)
Stepheight
determined
bySensoFar
h[nm] UNF[nm] Ureprod[nm] Urepeat[nm]
Utotal[nm]
(k=2)
Uncertainty
(k=2)
VSI/white 0.99883 0.00291 8035.1 2.9 12.3 4.2 53.8 0.67% -0.14%
ePSI/white 0.99897 0.00291 8023.7 2.7 1.8 3.7 47.8 0.60% -0.28%
VSI/white 1.00108 0.00105 8046.3 2.2 0.6 4.8 20.0 0.25% 0.00%
conf/blue 1.00383 0.00204 8045.8 5.4 14.7 2.6 45.5 0.57% 0.00%
conf/blue 0.99800 0.00094 8045.8 3.6 2.8 1.4 17.9 0.22% 0.00%
Uncertainty
onstepheight Rel.Difference
fromreference
measurement
with
traceability

10. Traditional Roughness
10
𝑅𝑞 =
1
𝑙
𝑍2 𝑥 𝑑𝑥
𝑙
0
𝑅𝑎 =
1
𝑙
𝑍 𝑥 𝑑𝑥
𝑙
0
The roughness parameters used
does not describe the surface but
the unevenness of z

11. https://www.microscopyu.com/microscopy-basics/modulation-transfer-function
Rough guide for selecting Objective
Bright
field
Objectives
Numerical
Aperture
Roughness Waviness Unevenness
(z)
5x 0.15 No No No
20x 0.4 No/OK Good Good Contact profilometer
50x 0.8 OK Good Good
50x 0.95 Good Good Good
100x 0.95 Good OK Good Field of view too small for
waviness?
150x 0.95 Good No Good Field of view too small for
waviness?
Roughness measurements: Good lateral & vertical
resolution

12. 18-04-17
Precision Metrology Seminar 2016, Poul-Erik Hansen peh@dfm.dk
1218-04-17 12
Inline Roughness measurement

13. Inline Roughness
18-04-17 13

14. 18-04-17
Precision Metrology Seminar 2016, Poul-Erik Hansen peh@dfm.dk
14
Inline Roughness: Getting the right result
Confocal
50x
Objective
BRDF, rBRDF and confocal gave the same results
rBRDF
(OptoSurf)BRDF
Meas. Time ~10 msec. For rBRDF
> 10000 measurements per hour

15. Inline Process control: Decorative structures
Danchip Polyoptics
≈0.70 ≈0.63
Target structure:
G ≈
1400
≈1.40

16. Tuning injection molded parameters
Meas. Time ~1 sec.~
> 1000 samples per hour

17. Drone based detection of corrosion
18-04-17
Image: Wikipedia, Harald Pettersen/Statoil, under CC BY 2.0 license
17

18. Quantify corrosion
Current rating vs. detection
18-04-17From SSPC VIS 2 and DNV GL, Corrosion protection on ships 18

19. Super Mould
17 April 2018 19
 Super-Moulds projektet har til formål at reducere klæbning
og friktion mellem plastik og forme i traditionel
sprøjtestøbning og plastformgivning via avancerede
overfladebelægninger og overfladetekstureringer.
 We are in the process of finding solutions for optimizing injection molding

20. The process
17 April 2018 20
 Mold machining by:
Winther Mould Technology
Height of mold: 387 mm (h)
Width: 206 mm (a)
Length: 196 mm (b)

21. The inserts (cores) and plastic part
21

22. Location of the Force sensor
22
Force measurements during moulding

23. Force measurements during injection cycle
17 April 2018 23
0 3 6 9 12 15 18 21 24 27
0
300
600
900
1200
1500
-300
Force[N]
Time [s]
Injection/
Clamping
Cooling and mould
opening
Ejection/
Releasing

24. Maximum ejection force
Dynamic friction
Typical ejection curve
Shear
friction
Demolding/ejection process
How do we lower friction ?

25. Friction and Surface topology
25
Is Roughness a good measure for Friction?
FrictionForce
Roughness amplitude
𝑅𝑞 =
1
𝑙
𝑍2 𝑥 𝑑𝑥
𝑙
0
𝑅𝑎 =
1
𝑙
𝑍 𝑥 𝑑𝑥
𝑙
0

26. Is Roughness a good measure for
Friction?
26
Ra<=0.1
Ra<=0.1
• Friction is related to Surface Area
not Surface amplitude
• Ra, Rq, Rz measure Surface amplitude

27. How can we make Roughness a better
measurement of Friction
27
The minimum Surface Area:
Adhesion is stronger for smooth surface

28. How can we make Roughness a better
measurement of Friction
 Adhesion is coupled to Van der Wall forces
1 Å=10-10 m=0.1 nm
 We need to have a small roughness to avoid adhesion
28
R (Å)
0 1000 2000 3000 4000 5000 6000 7000 8000 9000 10000
-150
-100
-50
0
50
100
150
Distance (nm)

29. 29
Amplitude
frequency
10
-4
10
-3
10
-2
10
-1
10
0
10
1
10
-6
10
-4
10
-2
10
0
10
2
10
4
10
6
10
8
Slow
Fast
0 1 2 3 4 5
0
0.1
0.2
0.3
0.4
0 1 2 3 4 5
0
0.1
0.2
0.3
0.4
Friction
Roughness
How can we make Roughness a better
measurement of Friction. The solution
0 1000 2000 3000 4000 5000 6000 7000 8000 9000 10000
-150
-100
-50
0
50
100
150
• New improved Roughness model for friction
• Same measurement, different analysis!!!!!
Idea: Divide surface into lateral periods and vertical amplitudes

30. First set of Cores (study 2)
3010
-1
10
0
10
1
10
2
10
3
10
6
10
7
10
8
10
9
10
10
10
11
1/mm
PSD(nm2/1/nm)
DI 10 Demoulded
DI 10 Laser Texture
DI Clean
Laser Texture :
Higher roughness
More slow varying roughness
More fast varying roughness 

31. Second set of Cores (study 5)
31
60 80 KW002 KW005 KW006 60 80 KW002 KW005 KW006
10
0
10
1
10
2
10
3
10
4
10
4
10
5
10
6
10
7
10
8
10
9
10
10
1/mm
PSD(nm2/1/nm)
DI50 60 coated
DI50 60 Clean
Coatings :
Lower fast varying roughness
10
0
10
1
10
2
10
3
10
4
10
4
10
5
10
6
10
7
10
8
10
9
10
10
10
11
1/mm
PSD(nm2/1/nm)
DI50 KW002 coated
DI50 KW002 Clean
10
0
10
1
10
2
10
3
10
4
10
5
10
6
10
7
10
8
10
9
10
10
1/mm
PSD(nm2/1/nm)
DI50 KW005 coated
DI50 KW005 Clean

32. Guided tour at DFM
32
Mødetid kl. 12.50 i Ole Rømer
mødelokalet
Hvert hold har 6 personer
Hold 0 til 5 starter kl. 13.00, mødetid på DFM kl.
12.50
Hold 6 til 8 starter kl 13.50
Masse
(LN)
Længde
JHA)
Profilometer
(SRJ)
Process kontrol
(JSM)
Korrosion
(LJW)
Hold 0 13.00-13.10 13.10-13.20 13.20-13.30 13.30-13.40 13.40-13.50
Hold 1 13.40-13.50 13.00-13.10 13.10-13.20 13.20-13.30 13.30-13.40
Hold 2 13.30-13.40 13.40-13.50 13.00-13.10 13.10-13.20 13.20-13.30
Hold 3 13.20-13.30 13.30-13.40 13.40-13.50 13.00-13.10 13.10-13.20
Hold 4 13.10-13.20 13.20-13.30 13.30-13.40 13.40-13.50 13.00-13.10
Hold 5 14.30-14.40 13.50-14.00 14.00-14.10 14.10-14.20 14.20-14.30
Hold 6 14.20-14.30 x 13.50-14.00 14.00-14.10 14.10-14.20
Hold 7 14.10-14.20 x 14.20-14.30 13.50-14.00 14.00-14.10
Hold 8 14.00-14.10 x 14.10-14.20 14.20-14.30 13.50-14.00

33. Vores nye facilitet i
Hørsholm
18-04-17 33
 Kogle Allé 5, 2970 Hørsholm
 2300 m2 (1265 m2 i Lyngby)
 Nye laboratorier
 Akkrediterede ydelser
genoptages