Measures the composition of a sample by sputtering it with a focused ion beam and analyzing the secondary ions that are ejected from the surface.

1. SIMS:

2. Measures the composition of a
sample by sputtering it with a
focused ion beam and analyzing
the secondary ions that are
ejected from the surface.

3. Offers high sensitivity and is
capable of imaging chemical
distribution at the nanoscale.:

4. Generally more expensive and
requires samples to be thin
enough for analysis.

5. Measures the composition of a
sample by introducing it into a
plasma torch and detecting the
ions produced by the sample.