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シリコン干渉導波路型光アイソレータの温度無依存化
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シリコン干渉導波路型光アイソレータの温度無依存化
1.
1 東京工業大学大学院 理工学研究科 電気電子工学専攻 水本・庄司研究室 加藤
慶太 シリコン干渉導波路型 光アイソレータの温度無依存化
2.
2 研究背景 Titech TSUBAME Rack to
rack SPICE Board to board 日経BP Chip to chip Intel Intra chip 220nm 520nm Air (n=1) SiO2 (n=1.44) Si (n=3.48) 近距離間での光配線技術 ・・・ 光インターコネクション • 石英ガラス • Ⅲ-Ⅴ族化合物半導体 • シリコンフォトニクス 小型化・高機能化 問題 • 通信トラフィック量増大 • 情報機器の消費電力増大 導波路型光デバイス
3.
3 シリコン干渉導波路型光アイソレータ バルク品と比較して サイズは1/10以下 • 順方向を伝搬し、逆方向を遮断 • レーザなどへの反射戻り光を阻止 光アイソレータ NPSRPS -π/2+π/2 Magnetic Field 0 Forward +π/2+π/2 +π Backward Si SiO2 Ce:YIG相反移相器 非相反移相器 磁界 3
dB方向性結合器 Forward Backward
4.
4 温度特性 ①相反移相器の等価屈折率の変化 ②非相反移相効果の変化 逆方向伝搬特性温度無依存化 問題 • レーザなどの発熱 • 環境温度の変化 逆方向伝搬時の移相量 δθr δT = δθRPS δT + δθNPS δT =
0 温度上昇による移相量の変化 ① ② 𝛅𝛉 𝐑𝐏𝐒 𝛅𝐓 > 𝟎 𝛅𝛉 𝐍𝐏𝐒 𝛅𝐓 < 𝟎 1530 1540 1550 1560 1570 -60 -50 -40 -30 -20 Wavelength [nm] Transmittance[dB] Magあり (For) Magあり (Back) Magなし 1530 1540 1550 1560 1570 -60 -50 -40 -30 -20 Wavelength [nm] Transmittance[dB] Magあり (For) Magあり (Back) Magなし
5.
5 Ce:YIGの温度依存定数 20 30 40
50 60 1544 1545 1546 1547 Temperature [℃] Wavelength[nm] 20 30 40 50 60 1550 1551 1552 1553 1554 1555 1556 Temperature [℃] Wavelength[nm] ②磁化配向あり(順方向・逆方向)①磁化配向なし(逆方向) Ce:YIGの屈折率温度係数 𝛅𝐧 𝛅𝐓 = 𝟗. 𝟏 × 𝟏𝟎−𝟓 /𝐊 ファラデー回転係数の温度依存性 𝛅𝛉 𝐟 𝛅𝐓 = 𝟒𝟒 𝐝𝐞𝐠/𝐜𝐦/𝐊 dλ dT = 0.0347 nm/K dλ dT = 0.05 nm/K 20 30 40 50 60 1539 1540 1541 1542 1543 1544 1545 Temperature [℃] Wavelength[nm] dλ dT = 0.0965 nm/K
6.
6 温度無依存光アイソレータ シリコン導波路形状 高さ210 nm、幅500 nm 𝐋
𝐍𝐏𝐒 = 𝟐𝟕𝟎 𝛍𝐦 𝐋 𝐑𝐏𝐒 = 𝟐𝟎. 𝟓 𝛍𝐦 (m=29) LNPS一定のまま LRPSを変化 20 dB Backward Forward 1520 1530 1540 1550 1560 -70 -60 -50 -40 -30 Wavelength [nm] Transmittance[dB] 20℃ 40℃ 60℃ LRPS = m + 1 4 λ neff 20~60℃の温度変化に対して 20 dB以上の高アイソレーション 逆方向伝搬時の移相量 δθr δT = δθRPS δT + δθNPS δT = 0
7.
7 工夫点・今後の課題 1. 光アイソレータの損失低減 2. 温度無依存光アイソレータの広帯域化 ~工夫点~ ~今後の課題~ 導波路形状変化 Ce:YIG
小面積化 1. 光アイソレータ製作プロセスの改善 2. 温度特性測定方法の確立
8.
8 温度特性比較 ~補足資料~ 1530 1540
1550 1560 1570 -80 -70 -60 -50 -40 -30 -20 -10 0 Wavelength (nm) Transmittance(dB) 25℃ 40℃ 60℃ 1520 1530 1540 1550 1560 1570 -80 -70 -60 -50 -40 -30 -20 -10 0 Wavelength (nm) Transmittance(dB) 20℃ 40℃ 60℃ 1520 1530 1540 1550 1560 1570 -80 -70 -60 -50 -40 -30 -20 -10 0 Wavelength (nm) Transmittance(dB) 20℃ 40℃ 60℃ m=27 m=34 m=29 (温度無依存) m=6 1520 1540 1560 1580 1600 1620 -80 -70 -60 -50 -40 -30 -20 -10 0 Wavelength [nm] Transmittance[dB] 20℃ 40℃ 60℃
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