Report on the activities of core facilities CEITEC BUT

1. REPORT ON THE ACTIVITIES OF CORE FACILITIES
NANOFABRICATION AND NANOCHARACTERIZATION
STRUCTURAL ANALYSIS LABORATORY

2. | 3www.ceitec.eu
CONTENT
ABBREVIATIONS
03 Timeline
Vision and Mission
Staff
Installed and used instruments
Usage
Expected costs in full operation
Technological units
Organizational chart
Services and Collaboration
Case studies
Collaboration
Challenges and Success
Contacts
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06
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11
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CF Core Facilities
BUT Brno University of Technology
MU
MEYS
Masaryk University
Ministry of Education,Youth and Sports
TIMELINE
The core facilities NanofabricationandNanocharacterization StructuralAnalysisLaboratoryand are centralized shared re-
search resources that provide an access to instruments, technologies and services, as well as expert advice, and other services
to researchers and industry. Both core facilities are a part of the research infrastructure CEITEC Nano.
CEITEC project approved by the European Commission
Construction of new CEITEC BUT buildings officially launched
Fusion CF Nanofabrication and CF Nanocharacterization into
1 CF Nanofabrication and Nanocharacterization
Implementation of the infrastructure rules to all users
Preparation of infrastructure rules based on the open access
principles
CF Nanofabrication, CF Nanocharacterization and CF Structural
Analysis Laboratory established
CF laboratories and clean rooms designed
Temporary installation of 12 CFs instruments
Installation of instruments in the provisional buildings
Temporary installation of 3 new CF instruments
Research infrastructure CEITEC Nano on the Czech Roadmap for
Research Infrastructures for the period of 2011–2015
First instrument tenders
Contract between BUT and MU regarding the common shared
core facilities
Research infrastructure CEITEC Nano on the updated
Czech Roadmap for Research Infrastructuresfor
the period of 2016 - 2020
Research infrastructure CEITEC Nano in MERIL
(Mapping of the European Research Infrastructure Landscape)
Installation of the first 3 CF instruments
Start of CEITEC - open access project
FullyoperationalstateofCFs

3. | |4 5Central European Institut of Technology www.ceitec.eu
VISION AND MISSION
STAFF
INSTALLED AND USED INSTRUMENTS
to perform as facility providing excellent
services to scientific community and industry
to establish the research infrastructure based
on the open access rules
to establish short- and long-term cooperation
with the scientific community and industry
in-advance to:
provide users the possibility to operate the
instruments by themselves
provide access to state-of-art equiment
cooperate with the highly trained personnel
CF Nanofabrication and Nanocharacterization
installedinstruments
installedinstruments
CF Structural Analysis Laboratory
USAGE
EXPECTED COSTS IN FULL OPERATION
2013 2014 2015 in full operation

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TECHNOLOGICAL UNITS
ORGANIZATIONAL CHART
SERVICES AND COLLABORATION
Core Facility Nanofabrication and Nanocharacterization
Portfolioofservices
Core Facility Structural Analysis Laboratory
Portfolioofservices
CASE STUDIES
Study of light interaction
on the submicron structures
Collaboration with plasmonic
group at CEITEC BUT
Pattern definition and experimental set-up
Theoretical calculation of light interaction
User training for:
Focused Ion Beam/Scanning Electron Mi-
croscopeLYRA3
Scanning Near-field Optical Microscopy
MV4000
Structure preparation
Active interface preparation
- substrate sputtering (Ti + Au layer)
Structure milling performed by Focused Ion
Beam/Scanning Electron Microscope LYRA3
Experimental results confirmed at SNOM
Ntegra Solaris and Scanning Near-fieald
Optical Microscopy MV 4000
Publication:
DVOŘÁK,P.;NEUMAN,T.;BŘÍNEK,L.;ŠAMOŘIL,
T.; KALOUSEK, R.; DUB, P.; VARGA, P.; ŠIKOLA,T.
Control and Near-Field Detection of Surface
Plasmon Interference Patterns. NANO
LETTERS, 2013, 13 (6), pp 2558-2563.
ISSN: 1530-6 84. (IF = 13.025)

5. | |8 9Central European Institut of Technology www.ceitec.eu
Study of spin circulation
in nanodiscs
Collaboration with spintronic
group at CEITEC BUT
Pattern definition and experimental set-up
User training for:
FocusedIonBeam/ScanningElectron
MicroscopeLYRA3
Scanning Near-field Optical Microscopy
MV4000
LithographicScaningProbeMicroscope
DimensionIcon
Structure preparation
Active interface preparation
- substrate sputtering (Ti + Au layer + NiFe)
Pattern definition - multistep electron beam
lithography by Focused Ion Beam/Scanning
Electron Microscope LYRA3
Structure milling performed by Focused Ion
Beam/Scanning Electron Microscope LYRA3
Magnetic vortices observation by Scanning
Probe Microscope AutoProbe CP-R
and Lithographic SPM Dimension Icon
Experimental results confirmed at University
of California, San Diego
Publication:
UHLÍŘ,V.; URBÁNEK, M.; HLADÍK, L.; SPOUSTA,
J.; IM, M.; FISCHER, P.; EIBAGI, N.; KAN, J.; FULL-
ERTON, E.; ŠIKOLA, T. Dynamic switching of
the spin circulation in tapered magnetic
nanodisks. Nature Nanotechnology (print),
2013, 8 (5), pp 341-346. ISSN: 748- 3387.
(IF =31.17)
LorentzcorrectedSAXSspectrawithfittedfirstmaximaqmax
whichisrelatedtolongperiod.
Reciprocalspacemapsusingdifferentbeamcollimations.
Perspective-viewSEMmicrographof8µmtallSi0.1Ge0.9crys-
talswiththeembeddedsuperlatticestructureontop.
Long period determination in
partially crystalline polyolefin
Reciprocal space mapping of
facetted Si/Ge microcrystals with
deposited strain-symmetrized
SiGe/Ge superlattices
Collaboration with company
Polymer Institute Brno
Collaboration with research
group Functional Properties of
Nanostructures at CEITEC MU
Method:
Method:
Equipment:
Equipment:
Small angle X-ray scattering (SAXS),
transmission geometry
reciprocal space mapping
X-raydiffractometerRigakuSmartLab9kW
X-raydiffractometerRigakuSmartLab9kW
Publication:
MEDUNA, M.; FALUB,V.; ISA, F.; CHRASTINA, D;
KREILIGER, T.; ISELLA, G.; VON KÄNEL, H. Re-
construction of crystal shapes by X-ray na-
nodiffraction from three-dimensional super-
lattices. Journal of Applied Crystallography,
2014, 47, ISSN: 2030-2037. (IF = 3.95)

6. | |10 11Central European Institut of Technology www.ceitec.eu
Preparation
and characterization of doped
titanium dioxide printed layers
Collaboration with research
group Advanced Ceramic
Materials at CEITEC BUT
Method:
Equipment:
X-ray powder diffraction
X-raydiffractometerRigakuSmartLab3kW
Publication:
KRALOVA, M.; DZIK, P.; VESELY, M.; CIHLAR, J.
Preparation and characterization of doped
titanium dioxide printed layers. Catalysis To-
day, 2014, 230, p. 188 – 196. (IF = 3.309)
XRDspectra:puretitania
XRDspectra:Ti_3Fe
XRDspectra:Ti_Ag_7Fe
IN 2013 AND 2014 WE COLLABORATED...

7. | |12 13Central European Institut of Technology www.ceitec.eu
Quotedfromtheevaluationreportsofczechresearchinfrastructuresprovidedbyinternationalexperts.
TheevaluationwasmanagedbyMinistryofEducation,YouthandSports,CzechRepublicin2014.
to attract the users all around the world and provide
state-of-the-art instrumentation
to guarantee the fair open access for everyone and
“self-service”policy
to establish a multidisciplinary centre whose level
of integration enables the researchers from different
fields to join their resources and expertise and allows
the realization of their projects
to integrate approach to fabrication of complex
functional nanostructures and nanomaterials, and
analysis of their structural, mechanical, electronic,
optical, and chemical properties
to foster the development of advanced materials
by providing the top-class instruments for detailed
analysis of their structural and chemical properties
Installation of all core instruments will be performed
in 2015
Core facilities Nanofabrication and Nanocharacteri-
zation and Structural Analysis Laboratory will be fully
operable in 2016
Core facilities Nanofabrication and Nanocharacteri-
zation and Structural Analysis Laboratory successful-
ly passed the MEYS evaluation as part of the research
infrastructure CEITEC Nano
Research infrastructure CEITEC Nano declared on
the Czech Roadmap for Research Infrastructures for
the period of 2016 – 2020
Research Infrastructure CEITEC Nano in european
database of research infrastructures MERIL
Uniqueness at a national and good recognition at
international level
CONTACTS
Centre of Laboratories
Core facility Nanofabrication and Nanocharacterization
Core facility Structural Analysis Laboratory
UV Direct Write Laser system
Optical microsope Atomic Layer
Deposition System
Vacuum FTIR
Spectroscopic reflectometer Wire bonder Scanning Near-Field
Optical Microscope
Scanning Electron
Microscope/e-beam writer
NIR/VIS/UV Spectroscopic
Ellipsometers
Focused Ion Beam/Scanning
Electron Microscope
Mechanical profilometer VUV spectrometer VUVAS 1000 Lithographic Scanning
Probe Microscope
Resist stripper SPM/microRaman/Photo
Luminiscence system
Heidelberg Instruments DWL 66 FS
Olympus MX 51 Cambridge NanoTech Fiji 200 BrukerVertex80v + Hyperion 3000
Ocean Optics Nano Calc 2000 TPT HB 16 Nanonics MV 4000
Tescan Mira3 J. A.Woollam IR-Vase,V-Vase Tescan Lyra3 XMH
Bruker Dektat XT McPherson Bruker Dimension Icon
Diener Nano Plasma cleaner T-MDT NTegra Spectra, Solaris 3
Martin Buršík
Martin Buršík Marek Eliáš Alois Nebojsa
David Škoda Martin Buršík Dalibor Šulc
Eva Kolíbalová Alois Nebojsa Eva Kolíbalová
Dalibor Šulc Alois Nebojsa Dalibor Šulc
Marek Eliáš
David Škoda
Alois Nebojsa
martin.bursik@ceitec.vutbr.cz
martin.bursik@ceitec.vutbr.cz marek.elias@ceitec.vutbr.cz alois.nebojsa@ceitec.vubtr.cz
david.skoda@ceitec.vutbr.cz martin.bursik@ceitec.vutbr.cz dalibor.sulc@ceitec.vutbr.cz
eva.kolibalova@ceitec.vubtr.cz alois.nebojsa@ceitec.vubtr.cz eva.kolibalova@ceitec.vubtr.cz
dalibor.sulc@ceitec.vutbr.cz alois.nebojsa@ceitec.vubtr.cz dalibor.sulc@ceitec.vutbr.cz
marek.elias@ceitec.vutbr.cz
david.skoda@ceitec.vutbr.cz
alois.nebojsa@ceitec.vutbr.cz
Nanofabrication
and Nanocharacterization
X-ray powder diffractometer X-ray diffractometer
Rigaku Smartlab 3kW Rigaku SmartLab 9kW
Pavla Roupcová
Ondřej Man
Ondřej Caha
pavla.roupcova@ceitec.vutbr.cz
ondrej.man@ceitec.vutbr.cz
ondrej.caha@ceitec.muni.cz
Structural Analysis Laboratory

8. CEITEC BUT - Central European Institute ofTechnology
Brno University ofTechnology
Technická 3058/10, CZ-61600 Brno, Czech Republic
core.facility@ceitec.vutbr.cz
www.ceitec.eu