This presentation was made as a seminar requirement by Deepak Rajput at the University of Tennessee Space Institute, Tullahoma, Tennessee, USA in spring 2010. Please visit http://drajput.com.

1. Femtosecond Laser Micromachining 02/03/2010 Spring 2010 MSE503 Seminar Deepak Rajput Center for Laser Applications University of Tennessee Space Institute Tullahoma, Tennessee 37388-9700 Email: [email_address] Web: http://drajput.com

5. Direct Writing Reference: Journal of Materials Processing Technology, Volume 127, Issue 2, Pages 206-210

6. Mask Projection Reference: Dahotre and Harimkar, Laser Fabrication and Machining of Materials (New York: Springer 2008)

7. Interference Reference: Dahotre and Harimkar, Laser Fabrication and Machining of Materials (New York: Springer 2008) Intensity distribution: 0 to 4I o

9. Combined Techniques SNOM arrangement for nanopatterning Reference: Dahotre and Harimkar, Laser Fabrication and Machining of Materials (New York: Springer 2008)

10. Combined Techniques Reference: Appl. Phys. A. 76, 1-3 (2003) Laser-induced surface patterning by means of microspheres

20. FLM: Physical Mechanisms Laser-induced optical breakdown

22. FLM: Physical Mechanisms Sub-picosecond: absorption, ionization, and scattering events Nanosecond: pressure or shock wave propagation Microsecond: thermal energy propagation Reference: Gattass RR and Mazur E, Nature Photonics , Vol 2, 219 – 225, 2008

28. Single Pulse Nano-holes Nano-holes machined by single laser pulses at different energies 1.2 μ J 1.6 μ J 2.4 μ J 1.2 μ J

29. Single Pulse Nano-holes Dependence of nano-hole diameter at the surface on the pulse energy

31. Single Pulse Nano-holes Nano-holes machined with laser pulse energy of 1.6 μ J Replication method

32. Single Pulse Nano-holes Nano-holes machined with laser pulse energy of 2 μ J Replication method

33. Single Pulse Nano-holes Dependence of hole depth (by replication) on the pulse energy

34. Single Pulse Nano-holes Dependence of aspect ratio (by replication) on the pulse energy

35. Single Pulse Nano-holes DualBeam TM SEM/FIB Schematics of the DualBeam TM SEM/FIB tool

36. Single Pulse Nano-holes DualBeam TM SEM/FIB Scope image inside the chamber of the tool

37. Single Pulse Nano-holes DualBeam TM SEM/FIB SEM image of the sectioned nano-holes in the trench at zero degree

38. Single Pulse Nano-holes DualBeam TM SEM/FIB View of the trench after 90 o rotation and 25 o tilt AB = AC/tan52 o = 0.78 AC

40. Single Pulse Nano-holes DualBeam TM SEM/FIB SEM image at 52-degree tilt of FIB cross-sectioned nano-hole