1. A PRESENTATIONBY:-
Soumya Panda Anand Ku.Singh P.Devendra
Roll:1304082 Roll:1304083 Roll: 1204039
Branch:ECE Branch:ECE Branch:ECE
GROUP NUMBER : 18
3. What is MEMS?
• MEMS or Micro-Electro Mechanical
System is a technique of combining
Electrical and mechanical components
together on a chip, to produce a system
of miniature dimensions.
• MEMS is the integration of a number of
micro-components on a single chip
which allows the micro-system to both
sense and control the environment.
• The components are integrated on a
single chip using micro fabrication
technologies.
4. Basic process of fabrication
• Deposition
– Deposition that happen because of a chemical reaction or
physical reaction.
• Patterning
– The pattern is transfer to a photosensitive material by
selective exposure to a radiation source such as light. If the
resist is placed in a developer solution after selective
exposure to a light source, it will etch away.
• Etching
– Etching is the process of using strong acid to cut into the
unprotected parts of a metal surface to create a design
in.There are two classes of etching processes:
• Wet Etching Dry Etching.
5. APPLICATION of MEMS
• Micro engines:- highly compact energy source.
• Inertial sensors:- Accelerometer, gyroscopic sensor. Etc.
• Pressure Sensor:- to measure blood pressure of fluid
pressure.
• Optical MEMS:- sensing or manipulating optical signals on a
very small size scale using integrated mechanical, optical, and
electrical systems .
• Fluid MEMS:- technology that enables precise, automated
manipulation of tiny volumes of fluid mainly used in
therapeutics(e.g. drug delivery)
6.
7.
8. NEMS
• Nano-Electro-Mechanical system (NEMS) is the integration of
mechanical elements, sensors, actuators and electronics on a
common silicon substrate.
•The Nano mechanical components are fabricated using
compatible “micromachining” process.
•NEMS is the enabling technology allowing the development of
smart products.
9. • Quantum dots
• Nano wires
• Quantum films
9
Quantum Dots.
NEMS AND NANOTECHNOLOGY
10. APPLICATIONS of NEMS
• Accelerometer:-measures the tilting of and orientation of
mobile phones.
• Nano nozzles:- direct the ink in inkjet printers.
• Miniature robots:- NANO robots, self assembly robots.
• Thermal actuators:- these are able to deliver large force with
large displacement to the overall device for small amount of
thermal expansion in one part.
• Medicine:- it is the largest market for NEMS(eg. pressure
sensors to measure blood pressure.)
• Bio technology:-lithographic methods to assemble inorganic
and metallic materials to layered devices.
13. REFERENCES
1. Ioan Raicu “Micro Electro Mechanical Systems -MEMS Technology
Overview and Limitations”(Class :CSC8800)01-09-(2004).
2. START Micro Electro Mechanical Systems (Volume 8, Number 1);
Micromachined Devices, European Study Sees MEMS Market, May
1997, p.1
3. Jeremy A. Walraven “Introduction Applications and Industries for
Micro electro mechanical Systems (MEMS)” (Sandia National
Laboratories. Albuquerque, NM USA).
4. Jack Shandle. “MEMS: The Applications Triage”.
5. M. Mehregany and S. Roy (Chapter 1: Introduction to MEMS)-
Henry Helvajian, editor “Microengineering Aerospace Systems”.
6. L. S. Fan, Y. C. Tai, and R. S. Muller, IEEE Transactions on Electron
Devices ED-35, 1988,724-730.
The question that arises in our mind is what is mems or micro elctro-mechanical system?
It is a technique of combining electrical and mechanical components together on a chip. It produce a system of miniature dimensions i.e the system having thickness less than the thickness of human hair. The components are integrated on a single chip using micro fabrication technology which allows the microsystem to both sense & control the environment.
Wet Etching: where the material is dissolved when immersed in a chemical solution.
Dry Etching: where the material is sputtered or dissolved using reactive ions or an etching agent.
