1. Presented By:
Rajeev Kumar Mishra
M.Tech Part-II (Communication Systems)
10305EN069
External Supervisor Internal Supervisor
Mr. Akhilesh Chandra Mishra Mr. Amritanshu Pandey
Senior Manager(TRnD, IOS Grp) Assistant Professor
ST Microelectronics IT-BHU
Greater Noida (U.P) Varanasi (U.P)
Department of Electronics Engineering
Institute of Technology BHU (IT-BHU), Varanasi
2. Overview of NBTI.
Mechanism involved in NBTI (Reaction Diffusion Model).
Effect on Various Technologies.
Scaling Impact on NBTI.
Temperature impact on NBTI.
Possible impacts on Circuits.
Concept of NBTI Stress.
NBTI minimization.
Age Analysis of a Buffer
Comparison of Results for 45nm and 28nm Technologies.
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
3. Study of Negative Bias Temperature Instability (NBTI) and its
impact on Circuit.
Temperature, Scaling and frequency impact on NBTI.
Familiarity with the circuit simulation tools like ELDO, ALTO
Familiarity with Input Output Library (I/O’s).
Characterization of a Input Output cell (Bidirectional Buffer).
(Finding the delay of a buffer, between IO and Core Side).
Stress (Reliability) Analysis of a simple buffer and CMOS inverter.
Stress (Reliability) Analysis across the 45nm & 28nm technologies.
Finding worst operating conditions of NBTI for any technology.
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
4. • NBTI – Negative Bias Temperature Instability.
• PMOS parameters degradation in presence of holes close to the
interface(Si/Si02) at high temperature (>80˚C).
-Vdd Vdd
S
G
0
Stress Relaxation Stress
VG = 0 VG = Vdd
• NBTI is in general attributed to reaction-diffusion (R-D) model involving
interfacial bond breaking(Si-H) followed by a diffusion process of hydrogen
species.
June 15, 2012 4
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
5. RD (Reaction Diffusion) model explains physics of NBTI degradation
in terms of different sub-processes.
Hole Tunneling
Hole Capture
Dissociation.
NBTI degradation originates from Silicon Hydrogen bonds (Si-H)
breaking at Silicon-Silicon dioxide (Si-SiO2) interface during
negative stress (Vgs=-Vdd).
The broken Silicon bonds (Si-) Dangling Silicon, act as interface
traps that are responsible for higher Vth and lower drain current.
The number of interface traps (Nit) depends on Si-H bond breaking
rate (kf) and Si- bond recovery rate (kr).
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
6. Fig. 2
Dangling Si- trivalent silicon atoms with
one unpaired valence electron
Si3≡Si•, or Si2O≡Si• ,
Mostly Temp. driven
Mostly Field driven
Where is strongly Temp. Dependent
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
7. Relation between Threshold Voltage and Interface trapped charges
VT = V FB − 2φ F − Q B / C OX ,
QF Qit (φ S )
VFB = φ MS − −
C OX COX
Where Qf is the fixed charge density and
Qit is interface trap density.
The MOS drain current (sat) and transconductance is related with threshold voltage as,
ID = W( 2 L )µ eff COX (VG − VT )
2
gm = (W )µ COX (VG − VT ).
2L eff
µ n0 µ P0
Where µeff is given by (modified by carrier µn = µP =
velocity saturation effect)
V V
1 + DS 1 − DS
LEC LEC
June 15, 2012 7
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
8. Non Recoverable NBTI (Permanent)
It is due to the interface traps generation.
The electric field is able to break Si-H bonds located at the Silicon-
oxide interface.
Recoverable NBTI (Temporary)
It is due to some pre-existing traps present in the gate oxide.
The pre-existing traps get filled with holes coming from the
channel of PMOS.
These traps can be emptied when the stress voltage is removed.
Fig. 3
June 15, 2012
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
9. Interface Traps:
It is due to the Si-Si02 interface properties and
dependent on the chemical composition of this
Interface.
The interface trap density is crystal orientation
dependent.
Can be +ve or –ve depend on type of substrate.
(n-Type or p-Type substrate).
Fig. 4
Oxide Charges:
the fixed-oxide charge is located within
approximately 3 nm of the SiO2-Si interface .
this charge is fixed and cannot be charged or
discharged over a wide variation of surface potential.
Generally, Qf is positive and depends
on oxidation and annealing conditions and on silicon
Orientation.
June 15, 2012 9
Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi 9
10. As technology shrinks the Vth shift become worse (E.g., the Vth shift for
90nm is 34% while this rises with about 4% for each new technology
generation (i.e., 38% for 65nm and 42% for 45nm) ).
The NIT growth under given conditions results from Eox increment with
technology scaling.
Temperature increment moderately reduces the drain current, and this
reduction becomes more severe with technology scaling. E.g., the current
reduction is about 5% for 90nm while this is 8% for 45nm.
Fig. 5
Ref: Temperature Impact on NBTI Modeling in the Framework June 15, 2012
of Technology 10
Scaling
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
11. The PMOS negative gate stress breaks Si-H bonds at Si-SiO2 interface resulting
in Si- broken bonds and H atoms by the reaction:
Most of the H atoms released converted to H2 molecules
Where, kH is the rate constant of H to H2 conversion.
The temperature impact on conversion can be understood by
inspecting the rate constant kH, as:
For atomic Hydrogen diffusion the parameter is equal to 10^-4
at higher temperature the Si-H bonds vibrate that bring H atoms and Si-H at rH < 1.0nm,
and hence accelerate kH sub process.
The diffusion variation with temperature increment from Tref , to T(t) is given by diffusion
ratio:
NOTE: The equation shows that the temperature increment accelerate DH.
The DH acceleration towards gate attenuate the Si- broken bond
recovery sub-process at Si-SiO2 interface and hence increases the NIT.
Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi 11
12. Propagation delays - increase
Rise/fall time - change
Duty cycle of signals - change
Setup and hold times for latch/flip-flop - change
Current consumption - decrease
Leakage - change
Switching threshold - change
Drive currents - decrease
Operating points in an analog circuit – change
June 15, 2012 12
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
13. Stress: Extent of damage each transistor suffers depends on the bias conditions applied on
this specific transistor and the time duration through which this bias was applied.
Ti
a For every cycle Accumulated Stress is calculated by Stress = Stress + Stress _ int egrali ×
Where Ttransient = Tstop-Tstart Ttransient
NBTI _ Stress (t ) = m(Vgs(t ) )
H
NBTI Stress is given by (as a function of Vgs) :
where H=Tech parameter and m=model parameter
P − P0
The incremental change in the parameter is given by, dP =
P0
Where P is the parameter value at time t, and P0 is the parameter value extracted at t=0s.
P = P0 (1 + dP)
Ea
Where dP(dVth) for NBTI follows power law pattern given by, dP _ NBTI = A × NBTI _ S × e n KT
NBTI_S = NBTI Stress Integral
A=degradation constant, n=degradation rate, T= Temp
Ea=Thermal activation energy, K= Boltzmann constant
Then the new value of Vth after some stress time is,
June 15, 2012 13
Vth=Vth0(1+dP_NBTI)
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
14. Characterization
Functional Timing
Mapping to
Selection of Opoint Selection of corner
various corners
e.g. e.g.
ff32_1.15V_1.95V_125C_2ey ff32_1.15V_1.95V_125C
NBTI (_2eY) NON NBTI
Generation of Stress file
(reliability.lib)
Inclusion of Stress file Delay Calculation
(for NBTI Delay Cal.)
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
15. Device Definition
Source Definition
Age Analysis
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
16. NBTI STRESS
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
19. Output at t=27’C Output at t=125’C
At T=27’C V(OUT)_1 is 1.17359V At T=125’C V(OUT)_1 is 1.07925V
and V(OUT)_2 is 1.11157 and V(OUT)_2 is 0.94825V.
At room temperature the degradation of output is about 5% which is increased
to about 11% at a temperature of 125’C
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Analysis & Simulation of NBTI Effects in Various Technologies IT BHU Varanasi
20. Delay in ns
OPOINT - PssaV1260V1320T125Y2_OP
PffaV1260V1320Tm40
Cload=2pf, slope=0.8
ARCS NON NBTI NBTI % Change
A_R_IO_R_1 1.2988 1.3066 0.60055
A_R_IO_R_0 1.1047 1.1071 0.21725
A_F_IO_F_0 1.0754 1.0721 0.306863
A_F_IO_F_1 1.2024 1.2049 0.20792
IO_R_ZI_R_0 0.24327 0.24557 0.9562
IO_R_ZI_R_1 0.35978 0.36386 1.134
IO_F_ZI_F_1 0.40162 0.40778 1.53379
IO_F_ZI_F_0 0.35215 0.35669 1.28922
Non-NBTI / NBTI delay change : A, ZI : CORE Side Signal
max on IO_F_ZI_F (1.2% to 1.5%)
A to IO (0.2% to 0.6%) IO : IO Side Signal
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21. Delay in ns
OPOINT - PssaV1260V1320T125Y2_OP
PffaV1150V1950T125
Cload=2pf, slope=0.8
ARCS NON NBTI NBTI % Change
IO_R_ZI_R_0 1.5938 1.5981 0.2698
IO_F_ZI_F_0 1.39 1.4118 1.56835
A_R_IO_R_01 6.707 6.7535 0.69331
A_F_IO_F_01 7.0584 7.0826 0.34285
A_R_IO_R_00 4.6319 4.661 0.62825
A_F_IO_F_00 4.7386 4.7596 0.44317
A_F_IO_F_10 5.7391 5.7659 0.46697
A_R_IO_R_10 5.7225 5.759 0.63783
A_F_IO_F_11 7.8279 7.8568 0.36919
A_R_IO_R_11 7.5926 7.6473 0.72044
Non-NBTI / NBTI delay change : A, ZI : CORE Side Signal
max on IO_F_ZI_F (1.56%)
IO : IO Side Signal
A to IO (0.34% to 0.72%)
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22. Delay of ss28_1.00V_1.65V_125C considering stress of various corners(nS)
ss28_1.00V_1.65V_125C
With
Stress of
With Stress of With Stress of With Stress of With Stress of ss28_0.85V
ss28_0.85V_1.95V_125 ss28_0.90V_1.65V_125 ss28_0.95V_1.95V_125 ss28_1.15V_1.95V_125 _1.65V_m4
ARC With Same Stress C C C C_2eY 0C
IO_R_ZI_R_0 1.3303 1.3414 1.3288 1.3421 1.3447 1.327
IO_F_ZI_F_0 3.3462 3.3671 3.346 3.3673 3.3683 3.3348
A_R_IO_R_01 9.2288 9.2702 9.2243 9.2735 9.2816 9.1844
A_F_IO_F_01 7.34 7.357 7.3374 7.3597 7.3708 7.3239
A_R_IO_R_00 6.7376 6.7648 6.7381 6.7654 6.7786 6.719
A_F_IO_F_00 5.5845 5.5992 5.5811 5.6018 5.613 5.5677
A_F_IO_F_10 7.1011 7.1255 7.0978 7.1282 7.1393 7.0791
A_R_IO_R_10 8.5146 8.5521 8.5124 8.5526 8.5632 8.4907
A_F_IO_F_11 8.5125 8.5367 8.5087 8.5394 8.551 8.4915
A_R_IO_R_11 10.514 10.563 10.511 10.567 10.576 10.479
As can be seen from the above figures that in this case worst corner is ss28_1.15V_1.95V_125C_2eY i.e.
the worst corner should be having maximum GO1 voltage, maximum GO2 voltage, Maximum
temperature(125’C in this case) and the maximum stress duration (2 years in this case). 22
23. The absolute delay of the Driver side (i.e. A to IO, Core to IO
Side) is more as compared to the receiver side signals (i.e. IO
to ZI).
The impact of process (Slow or Fast) and temperature is much
significant for NBTI delay as can be seen from the results. For
the corners in which the Slow process and temperature of
125’C is used they are much degraded due to NBTI as
compared to Fast process and a temperature of -40 ‘C.
For the most of the cases the worst corner (PVT) should be
one having maximum GO1 voltage, maximum GO2 voltage,
Maximum temperature (125’C in this case) and the maximum
stress duration.
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Analysis & Simulation of NBTI Effects in Various Technologies IIT BHU Varanasi
24. Based on the simulation results with an industrial 45nm
technology, it is observed that the degradation of threshold
voltage due to NBTI can be as high as 9% for a stress period of
two years.
As far as temperature variation is concerned, at room
temperature the degradation of output is about 5% which is
increased to about 11% at a temperature of 125’C.So Lower
temperature is also desirable for robust nanoscale design.
The transistor reliability will be a severe problem in future
technology nodes which makes the device life time shorter
than predicted.
That ‘s why new technology nodes (from 22nm onwards) are
using FDSOI technique to reduce NBTI.
Analysis & Simulation of NBTI Effects in Various Technologies IIT BHU Varanasi 24
25. Over time, NBTI degrade device currents and will cause
failures in integrated circuits. Circuit designers need to
consider these reliability effects in the early stages of design to
make sure there are enough margins for circuits to function
correctly over their entire lifetime. As technology is shrinking
the scope will increase for stress analysis, as this is a major
challenge for designers to overcome.
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26. Seyab, Said Hamdioui (Delft University of Technology) “Temperature Impact on
NBTI Modeling in the Framework of Technology Scaling”.
Chittoor Parthasarathy(ST), Philippe Raynaud(Mentor Graphics) “Reliability
simulation in CMOS design using Eldo”.
http://www.iue.tuwien.ac.at/phd/wittmann/node10.html “NBTI Reliability
Analysis”.
Rakesh Vattikonda, Wenping Wang, Yu Cao “Modeling and Minimization of PMOS
NBTI Effect for Robust Nanometer Design”.
M.A. Alam, S. Mahapatra “A comprehensive model of PMOS NBTI degradation”
(online @ www.sciencedirect.com).
R. Wittmann, H. Puchner, A. Gehring, and S. Selberherr “Impact of NBTI-Driven
Parameter Degradation on Lifetime of a 90nm p-MOSFET”.
Robert Entner (Dissertation) “Modeling and Simulation of Negative Bias
Temperature Instability”.
Sanjay Kumar, Chris Kim, Sachin Sapatnekar University of Minnesota “An
Analytical Model for Negative Bias Temperature Instability (NBTI)”.
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Analysis & Simulation of NBTI Effects in Various Technologies IIT BHU Varanasi
27. Rajeev Kumar Mishra, S.Alam, Amritanshu Pandey “Analysis and
impacts of Negative Bias Temperature Instability (NBTI)” ,
IEEE Xplore Digital Library, SCEECS IEEE Conference, March
2012, MANIT Bhopal.
(link: http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6184739)
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28. THANK YOU FOR YOUR ATTENTION !!!!!!!!
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Notas do Editor
ANALYSIS & SIMULATION OF Negative Bias Temperature Instability (nbti) effects in Various Technologies
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