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Design = Analysis + Synthesis
An architecture inspired by a pretzel
Top down flow: schematic based…


Process                                iterative calculations
Database

                                            Design of experiments

            Process                                                      Synthesized Mask Layout
             Flow
                                               Sensitivity Analysis

                             Netlist
Material
Database                                     Monte Carlo Methods
                                                                          Design for Manufacture

            Structural
           Description
                                              Synthesis techniques




Element
Database
                                                                      Meshed model for 3D Verification




                         Fast but lower fidelity…
Bottom up design flow: 3D based

   Process
  Description




                 Mask
                  Set



    Process
                                                3D Multiphysics
    Database



                Process
                 Flow




                            3D Model   Simulation
    Material
                                         Results
    Database
                                                     Multiphysics
                                                     “Black box”
                                                    System Model




                 High Fidelity but slower…
IntelliSuite: Best of both worlds




               Accurate + Fast
Behavioral                                               Structural
       1   Schematic                                                Component      4
            capture                                                   Library




               Synthesis
                                                               System Model
                   &
                                                                 Extraction
              Optimization



                                3D Multiphysics engine
                             Behavioral Multiphysics engine
                                    Layout engine
                                  Verification engine
                                      DRC engine



                                                                  Ab Initio
                Physical
                                                                      &
               Extraction
                                                              Process modeling




                                                                      Process
             Layout
                                                                     Modeling
       2                                                                           3
             Physical                                              Process level




Seamless integration of design flow…
Design flow…                                                         Blueprint
                                                             2      Physical Layout
                                                                    Floor planning




                                 MEMS Synth                                               Tape Out
                                 Layout & 3D Synthesis                                    Design Rule Check




    Synple                                                                                                     Clean Room
1   Schematic capture                                              Design Win                                  Process Planning     3

    Design Exploration                                                                                         Process Simulation



                         System Model Extraction
                         Compact modeling                                                  Hexpresso
                                                                                           Automated Meshing




                                                                 Fast field multiphysics
                                                         4       3D FEA/BEA analysis
                                                                 Design Verification
IntelliSuite Tool Chain




Synple                  Blueprint         Clean Room              Fast Field                EDA Linker
Schematic capture       Physical design   Process flow design      Multiphysics solvers      Link to EDA tools
Component based         Layout/DRC        Process debug           Coupled field analysis     Cadence, Mentor,
Design exploration      Tape Out          Process visualization   System model extraction   Synopsys, Ansoft,
Mask and 3D synthesis                                                                       Mathworks etc…
Open standards based exchange…

  Physical layout               GDS, DXF, CIF, GERBER, RS-247, EMK, HOLES



  Structural and 3D             IGES, SAT, VRML, GEOM, DXF, RAW (Voxel)



  Process Sequence              PowerPoint (PPT), PNG, JPEG, RAW


                                UNV, PAT, CDB, SAT (Ansoft, Ansys, ABAQUS, Patran, Nastran, Simulia), MATML
  Analysis and mesh structure
                                (Material XML)


                                VERILOG-A, VHDL-AMS, PSPICE, HSPICE, SIMETRIX, MATLAB/SIMULINK (MEX),
  System and circuit level
                                TOUCHSTONE


  Result files                   ASCII, CSV (Excel), Touchstone, PLT (Tecplot), ODB (Simulia)
A living design environment…
Dziękuję • Спасибо • Ευχαριστώ • Asante Sana • Dankie


                 www.intellisense.com

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MEMS Design Flow

  • 1. Design = Analysis + Synthesis An architecture inspired by a pretzel
  • 2. Top down flow: schematic based… Process iterative calculations Database Design of experiments Process Synthesized Mask Layout Flow Sensitivity Analysis Netlist Material Database Monte Carlo Methods Design for Manufacture Structural Description Synthesis techniques Element Database Meshed model for 3D Verification Fast but lower fidelity…
  • 3. Bottom up design flow: 3D based Process Description Mask Set Process 3D Multiphysics Database Process Flow 3D Model Simulation Material Results Database Multiphysics “Black box” System Model High Fidelity but slower…
  • 4. IntelliSuite: Best of both worlds Accurate + Fast
  • 5. Behavioral Structural 1 Schematic Component 4 capture Library Synthesis System Model & Extraction Optimization 3D Multiphysics engine Behavioral Multiphysics engine Layout engine Verification engine DRC engine Ab Initio Physical & Extraction Process modeling Process Layout Modeling 2 3 Physical Process level Seamless integration of design flow…
  • 6. Design flow… Blueprint 2 Physical Layout Floor planning MEMS Synth Tape Out Layout & 3D Synthesis Design Rule Check Synple Clean Room 1 Schematic capture Design Win Process Planning 3 Design Exploration Process Simulation System Model Extraction Compact modeling Hexpresso Automated Meshing Fast field multiphysics 4 3D FEA/BEA analysis Design Verification
  • 7. IntelliSuite Tool Chain Synple Blueprint Clean Room Fast Field EDA Linker Schematic capture Physical design Process flow design Multiphysics solvers Link to EDA tools Component based Layout/DRC Process debug Coupled field analysis Cadence, Mentor, Design exploration Tape Out Process visualization System model extraction Synopsys, Ansoft, Mask and 3D synthesis Mathworks etc…
  • 8. Open standards based exchange… Physical layout GDS, DXF, CIF, GERBER, RS-247, EMK, HOLES Structural and 3D IGES, SAT, VRML, GEOM, DXF, RAW (Voxel) Process Sequence PowerPoint (PPT), PNG, JPEG, RAW UNV, PAT, CDB, SAT (Ansoft, Ansys, ABAQUS, Patran, Nastran, Simulia), MATML Analysis and mesh structure (Material XML) VERILOG-A, VHDL-AMS, PSPICE, HSPICE, SIMETRIX, MATLAB/SIMULINK (MEX), System and circuit level TOUCHSTONE Result files ASCII, CSV (Excel), Touchstone, PLT (Tecplot), ODB (Simulia)
  • 9. A living design environment…
  • 10. Dziękuję • Спасибо • Ευχαριστώ • Asante Sana • Dankie www.intellisense.com