1. UT-Austin Silicon Valley Event
March 6th, 2013
Roger Bonnecaze, S.V. Sreenivasan, John Ekerdt

2. Agenda
• NASCENT’s vision and transformational manufacturing
technologies
– Roger Bonnecaze, NASCENT co-Director
• NASCENT enabled nanodevices and impact on
mobile computing
– S.V. Sreenivasan, NASCENT co-Director
• NASCENT unique facilities for scalable nanofabrication
and computational nanomanufacturing
– John Ekerdt, NASCENT Research Thrust Leader
NASCENT UT Austin in Silicon Valley Event 2

3. NASCENT Vision
Machines,
Systems Materials, Models
& Devices
Nano-scale
manufacturers
Nano-Enabled Electronic,
Energy & Healthcare
Device Needs
Enabling
Technologies
Fundamental
Knowledge
NASCENT UT Austin in Silicon Valley Event 3

4. NASCENT Transformative
Nanomanufacturing Systems
• Wafer-scale nanosculpting
• Roll-to-roll (R2R) self-aligned
nanosculpting and nanomaterials
• Exfoliated silicon
• In-line nanometrology
NASCENT UT Austin in Silicon Valley Event 4

5. Low Fiscal and Environmental Costs
NASCENT Transformational Technologies
• Low Waste
– Near-zero waste ink jet functional
and sacrificial material deposition
– Efficient use of crystalline materials
via exfoliation
– Reuse of expensive materials such
as copper in graphene fabrication
• Low Fiscal Cost
– High throughput systems
– Reliable precision systems
– Enhanced process yields
NASCENT UT Austin in Silicon Valley Event 5

6. Research Thrusts
Nanoscale
Manufacturing
and Metrology
Precision, reliability,
metrology, and yield
Multiscale Nano-Enabled
Manufacturing High- Mobile Devices
Modeling Value Optimal design for
Validated, UQ models nMfg device performance
for scale-up and and manufacturability
process control
Integrated
Nanomaterials
Processable materials
for devices and
machines
NASCENT UT Austin in Silicon Valley Event 6

7. Agenda
• NASCENT’s vision and transformational manufacturing
technologies
– Roger Bonnecaze, NASCENT co-Director
• NASCENT enabled nanodevices and impact on
mobile computing
– S.V. Sreenivasan, NASCENT co-Director
• NASCENT unique facilities for scalable nanofabrication
and computational nanomanufacturing
– John Ekerdt, NASCENT Research Thrust Leader
NASCENT UT Austin in Silicon Valley Event 7

8. Generic Mobile Computing/Energy Devices
• GOAL
Exploit NASCENT transformational nanomanufacturing systems to engineer
device solutions for mobile computing/energy
– Wafer scale nanomanufacturing solutions
– Roll-to-roll nanomanufacturing solutions
NASCENT UT Austin in Silicon Valley Event 8

9. Competitive Memory Landscape
Flash Flash
SRAM DRAM FeRAM MRAM PRAM RRAM STT-RAM
(NOR) (NAND)
Non-volatile No No Yes Yes Yes Yes Yes Yes Yes
Cell size (F2) 50-120 6-10 10 5 15-34 16-40 6-12 6-10 6-20
Read time (ns) 1-100 30 10 50 20-80 3-20 20-50 10-50 2-20
Write/Erase 1μs/ 1 ms/
1-100 15 50/50 3-20 50/120 10-50 2-20
time (ns) 10 ms 0.1 ms
Endurance 1016 1016 105 105 1012 >1015 108 108 >1015
Write power Low Low Very high Very high Low High Low Low Low
Other power Current Refresh
None None None None None None None
consumption leakage current
High voltage
No 3V 6-8 V 16-20 V 2-3 V 3V 1.5-3 V 1.5-3 V <1.5 V
required
Ref: Grandis
Existing Products Prototype
NASCENT UT Austin in Silicon Valley Event 9

10. Project 1: Low Power Logic using STTRAM
Universal bit line
Storage layer
Barrier
STT memory cell
Reference layer
STT contact pad
memory
CMOS contact pad
plane
Inter-STT-cell
dielectric
Si CMOS logic
& interconnects MULTI-BIT
MEMORY
BASED ON
STT-RAM
NASCENT UT Austin in Silicon Valley Event 10

11. Generic Mobile Computing/Energy Devices
• GOAL
Exploit NASCENT transformational nanomanufacturing systems to engineer
device solutions for mobile computing/energy
– Wafer scale nanomanufacturing solutions
– Roll-to-roll nanomanufacturing solutions
NASCENT UT Austin in Silicon Valley Event 11

12. Roll to Roll Nanophotonics
Sub-50nm Wire Grid Polarizers (WGP)
Second Polarizer
First Polarizer
Traditional
Organic Polarizer
Absorptive film that is
laminated on LCD glass
Backlighting
Aluminum lines of a WGP
Large Area
Wire Grid Polarizer
Brighter and higher contrast
with less backlighting Backlighting
• Improved Contrast Ratio
• Longer Battery Life
• Thinner Display
50nm half pitch • Reduced BoM
NASCENT UT Austin in Silicon Valley Event 12

13. Smart Cameras:
Graphene-Polymer Plasmonic Photodiode Architecture
NASCENT UT Austin in Silicon Valley Event 13

14. Agenda
• NASCENT’s vision and transformational manufacturing
technologies
– Roger Bonnecaze, NASCENT co-Director
• NASCENT enabled nanodevices and impact on
mobile computing
– S.V. Sreenivasan, NASCENT co-Director
• NASCENT unique facilities for scalable nanofabrication
and computational nanomanufacturing
– John Ekerdt, NASCENT Research Thrust Leader
NASCENT UT Austin in Silicon Valley Event 14

15. NASCENT Infrastructure
• Nanomanufacturing Process Development
• Nano-Enabled Device Prototyping
• Multiscale Modeling and Simulation
Large Area Wafer- Leveraged High Speed R2R
Scale Facility Facility
• Distributed NNIN and
• Exfoliated single crystal Other Fabrication • Flex materials
films, nanomagnetic Facilities including carbon
materials, etc. based & organic
• Texas Advanced
semiconductors
Computing Center
(TACC)
• NanoHUB Resource
for Simulations
Multiscale Modeling and Simulation Facility
• Scale-Up and Real-Time Decision Making
p g
NASCENT

16. Nanomanufacturing Facility
Wafer-Scale and R2R Fabrication Facility
• Established processes complemented by NASCENT test-beds
– Example of wafer-scale fabrication facility
NASCENT UT Austin in Silicon Valley Event 16

17. Cross-cutting Modeling
Vision: Computational tools to rapidly create and evaluate
nanomanufacturing processes and systems.
Machines,
Materials, Models
& Devices
Nanomanufacturing Systems Nano-scale
Nano-Enabled manufacturers
Electronic, Energy &
Healthcare Device
Needs
Goals:
• Create multiscale process models for for scale-up, design
and optimization.
• Derive reduced-order models suitable for fault detection
and process control.
• Verify, validate and quantify uncertainty in model
predictions.
Outcome: Accelerated process development and deployment.
NASCENT UT Austin in Silicon Valley Event 17

18. NASCENT Summary
Transformative Research
Industry Educating
Partners Innovators
NASCENT UT Austin in Silicon Valley Event 18