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Dr. Paul D. Warren, NSG
European Technical Centre - Lancashire, U.K.
Industrial perspectives on large-area
TCOs
2
Outline
(1) Transparent conductors – all around us!
(2) Basic TCO characteristics
(3) Large-area production – CVD and PVD
3
TCOs for windows
Wind
Heat Loss
20 W m-2
Thermal
Radiation
@~10mm
Conduction
Radiation
‘U’ value ~>1W/m2/K
(Compare ~6W/m2/K for single glazing)
TCOs for thin-film PV systems
Front contact - SnO2:F
Absorber
Glass
Back contact - metal
CdTe
Sheet resistance ~10-15 ohms/sq
Roughness not wanted
hn
hn
a-Si
Sheet resistance ~7-10 ohms/sq
Roughness necessary for light
scattering
5
Other applications for TCOs
Frost-free – so you can
still see the product
Heat-mirror for oven
Control of em signals
in and out of buildings
Touch-screens
6
Outline
(1) Transparent conductors – all around us!
(2) Basic TCO characteristics
(3) Large-area production – CVD and PVD
7
TCO characteristics - transmission
At low l – low T, high A - controlled by band-gap.
At high l – low T, high R – controlled by n (Steepness of curve controlled
by m)
Rather unusual to have conductivity and transparency in the same material
8
TCO characteristics
ITO – ‘best’, FTO – cheapest, ZnO - intermediate
‘Best’ is defined in terms of a figure of merit – various can be chosen but
all usually involve just two properties – an optical property (absorption,
transmission, weighted transmission etc) and an electrical property
(resistivity, conductivity).
Sheet resistance 10 ohms/square, 80% visible transmission (inc. substrate)
Ideal TCO – low carrier concentration (high plasma wavelength) coupled
with high carrier mobility.
From an industrial perspective – ease of manufacture, durability, cost
9
TCO characteristics - morphology
• Si-based systems are
poor absorbers in
red/NIR – so light
trapping schemes
necessary.
• Easiest way is to use
rough interfaces – layers
grown on rough TCO
TCO for a-Si
eg NSG TECTM A7
TCO for CdTe
eg NSG TECTM C15
• CdTe system – no need for
light trapping schemes as
very good absorber at
higher wavelengths.
• Interfaces can be smooth –
so use smooth TCO.
10mm
0.5mm
10
Outline
(1) Transparent conductors – all around us!
(2) Basic TCO characteristics
(3) Large-area production – CVD and PVD
11
Float glass manufacture - the
process
Batch in
Furnace, 1600°C
Tin bath, 1100°C
Lehr, 600°C
Warehouse,
20°C
• ‘On-line’ TCO coating is done towards the end of the tin bath.
12
On-line coatings
CVD in tin bath
Silane SiH4 Nitrogen N2
Cross section of coating head
Surface of moving glass ribbon 600oC
Reflective silicon coating
Silicon
Waste gases for
treatment
Si+H2
Hydrogen
• What you use the glass for depends on the material – mirrors as above,
TEC glass with tin oxide, Pilkington Activ self-cleaning glass with titania
13
FTO characteristics – TEC glass
Glass
Buffer layer – reduce optical mismatch with subsequent layers, alter
interfacial chemistry/crystallography/band structure.
SnO2:F (300nm-500nm)
SiO2 (25nm)
SnO2 (25nm)
Buffer layer
Growth layers, Anti-reflection
14
Best transparent conductor - Ag
Thin (~10nm) layer of sputtered Ag grown on sputtered ZnO.
Much lower absorption than other highly conducting metals
Surface roughness is negligible – important for thin functional devices
Absorbance of Glass/10nm Metal
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
360 410 460 510 560 610 660 710
Wavelength nm
Absorbance
Cu
Au
Al
Ag
15
Off-line coatings
Magnetron sputtering
• Large-scale sputter coating of glass for architectural applications
16
Summary
Large-area deposition of TCO is now an important market for flat-glass
companies – windows for thermal efficiency and a whole host of up-and-
coming opto-electronic applications.
Optical and electrical properties important – but a large number of other
considerations need to be taken into account.
Significant R&D effort going into this area worldwide – and a wide range
of new materials being evaluated.
Event/meeting 17
Date

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Industrial Perspectives on Large-Area TCOs

  • 1.
  • 2. 1 Dr. Paul D. Warren, NSG European Technical Centre - Lancashire, U.K. Industrial perspectives on large-area TCOs
  • 3. 2 Outline (1) Transparent conductors – all around us! (2) Basic TCO characteristics (3) Large-area production – CVD and PVD
  • 4. 3 TCOs for windows Wind Heat Loss 20 W m-2 Thermal Radiation @~10mm Conduction Radiation ‘U’ value ~>1W/m2/K (Compare ~6W/m2/K for single glazing)
  • 5. TCOs for thin-film PV systems Front contact - SnO2:F Absorber Glass Back contact - metal CdTe Sheet resistance ~10-15 ohms/sq Roughness not wanted hn hn a-Si Sheet resistance ~7-10 ohms/sq Roughness necessary for light scattering
  • 6. 5 Other applications for TCOs Frost-free – so you can still see the product Heat-mirror for oven Control of em signals in and out of buildings Touch-screens
  • 7. 6 Outline (1) Transparent conductors – all around us! (2) Basic TCO characteristics (3) Large-area production – CVD and PVD
  • 8. 7 TCO characteristics - transmission At low l – low T, high A - controlled by band-gap. At high l – low T, high R – controlled by n (Steepness of curve controlled by m) Rather unusual to have conductivity and transparency in the same material
  • 9. 8 TCO characteristics ITO – ‘best’, FTO – cheapest, ZnO - intermediate ‘Best’ is defined in terms of a figure of merit – various can be chosen but all usually involve just two properties – an optical property (absorption, transmission, weighted transmission etc) and an electrical property (resistivity, conductivity). Sheet resistance 10 ohms/square, 80% visible transmission (inc. substrate) Ideal TCO – low carrier concentration (high plasma wavelength) coupled with high carrier mobility. From an industrial perspective – ease of manufacture, durability, cost
  • 10. 9 TCO characteristics - morphology • Si-based systems are poor absorbers in red/NIR – so light trapping schemes necessary. • Easiest way is to use rough interfaces – layers grown on rough TCO TCO for a-Si eg NSG TECTM A7 TCO for CdTe eg NSG TECTM C15 • CdTe system – no need for light trapping schemes as very good absorber at higher wavelengths. • Interfaces can be smooth – so use smooth TCO. 10mm 0.5mm
  • 11. 10 Outline (1) Transparent conductors – all around us! (2) Basic TCO characteristics (3) Large-area production – CVD and PVD
  • 12. 11 Float glass manufacture - the process Batch in Furnace, 1600°C Tin bath, 1100°C Lehr, 600°C Warehouse, 20°C • ‘On-line’ TCO coating is done towards the end of the tin bath.
  • 13. 12 On-line coatings CVD in tin bath Silane SiH4 Nitrogen N2 Cross section of coating head Surface of moving glass ribbon 600oC Reflective silicon coating Silicon Waste gases for treatment Si+H2 Hydrogen • What you use the glass for depends on the material – mirrors as above, TEC glass with tin oxide, Pilkington Activ self-cleaning glass with titania
  • 14. 13 FTO characteristics – TEC glass Glass Buffer layer – reduce optical mismatch with subsequent layers, alter interfacial chemistry/crystallography/band structure. SnO2:F (300nm-500nm) SiO2 (25nm) SnO2 (25nm) Buffer layer Growth layers, Anti-reflection
  • 15. 14 Best transparent conductor - Ag Thin (~10nm) layer of sputtered Ag grown on sputtered ZnO. Much lower absorption than other highly conducting metals Surface roughness is negligible – important for thin functional devices Absorbance of Glass/10nm Metal 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 360 410 460 510 560 610 660 710 Wavelength nm Absorbance Cu Au Al Ag
  • 16. 15 Off-line coatings Magnetron sputtering • Large-scale sputter coating of glass for architectural applications
  • 17. 16 Summary Large-area deposition of TCO is now an important market for flat-glass companies – windows for thermal efficiency and a whole host of up-and- coming opto-electronic applications. Optical and electrical properties important – but a large number of other considerations need to be taken into account. Significant R&D effort going into this area worldwide – and a wide range of new materials being evaluated.