1. The Making of an ASIC
The process of designing and productionising
a mixed signal
application specific integrated circuit
with SWINDON Silicon Systems
www.swindonsilicon.co.uk
2. SWINDON Silicon Systems
Analogue and mixed signal ASICs | A completely integrated service | From design concept through to production supply
Founded 1978
Fab-less business model
Full turnkey design and supply offering
2010 - Β£18M turnover
70 employees
2010 β shipped 34 million tested devices
HQ Design + Testing Centre
Production ATE test facility
Full device characterisation capability
Obsolescence guarantee
TS 16949 Accreditation
Just 1 hour from London Heathrow
3. Contents
The Design Process An informative guide
Specification to the process of
Design and Layout
designing and
productionising a
Processing mixed signal
Evaluation application specific
integrated circuit
Test Development
with
Qualification SWINDON Silicon
Production Systems
4. The Design Process - Part 1
The ASIC Development Process provides a proven roadmap
for complete Product Development
1. Application Review 4. Initial Design & Layout
β Complete Critical Circuits design
β Review of your system requirements
β Complete preliminary ASIC Floor Plan
β Establish ASIC requirements β Complete Built-In Test features
2. ASIC Quotation 5. Critical Design Review
β Non-Recurring Engineering (NRE) β Review Critical Circuit performance
β Estimated Unit Price (in Production) β Report physical layout status
β Development Schedule 6. Final Design & Layout
β Complete Cell Level designs
3. Preliminary Design Review β Complete Top Level design
β Review Block Diagram β Simulate over temperature | voltage
β Establish Specification β Complete Design Rule Checks (DRC's)
β Establish Packaging Requirements β Complete Layout Vs. Schematic (LVS)
β Prepare Test Plans
β Establish Test Requirements
β Review Schedule
β Establish target Die Size
β Establish Fabrication Process
5. The Design Process β Part 2
The ASIC Development Process provides a proven roadmap
for complete Product Development
7. Final Design Review 10. Prototype Evaluation
Review Simulations SWINDON tests Prototype at wafer
probe
Review Test Plans
SWINDON tests Prototype in package
Review Physical Layout
Customer evaluates Prototype
Proceed to Fabrication
8. Prototype Fabrication 11. Prototype Acceptance Review
ASIC performance versus Specification
Mask Fabrication
Reliability Testing Review
Silicon Fabrication
Yield Analysis Review
9. Test Program Development
Proceed to Production
Prototype Test Program
Preliminary Production Test Program
6. The Importance of Specification
The specification phase is an extremely
important part of the design process as
any errors that occur here will be
magnified further down the process.
That is why SWINDON assists its
customers in developing the systems
specification and advises as to what can
be achieved on chip.
The full ASIC specification is then
produced by the relevant SWINDON
technical lead engineer and this will be
signed off by all parties concerned.
This extensive process can usually take
between 4 and 12 weeks depending upon
the complexity of the device that is being
designed.
7. The Specification Process
1. Review of the system schematics, block
diagrams and specifications.
2. Develop an understanding of the design
challenges, operating environment and
regulatory requirements
3. Understand the final product (not just the
ASIC) including any certification
requirements such as IEC, TS compliance.
4. Produce an ASIC block diagram and full
specification that states full operational
parameters and pin out and any required
external components.
5. Identify board level architectural trade-
offs that lead to most cost effective silicon
integration.
8. Design β A simplistic example
1 β’ Assign Technical Lead, Project Manager and Design Team
2 β’ Determine process
3 β’ System level design, block specification and Floor plan
4 β’ Block level design/simulation and IP block insertion
5 β’ Design for Test (DFT)
6 β’ Synthesis and verification
7 β’ Layout
8 β’ DRC and LVS
9 β’ Takeout
9. 1. Design and Layout
β’ A Top Down design approach is adopted for the Project
β’ Partitioning the chip into Functional blocks
System level β’ Defining their functionality and writing a specification for
design block each block
specification β’ Writing a behavioural model (analogue or digital), which is
used to verify that the design meets its requirements.
β’ Writing a simulation plan which describes the method of
proving the design correctness
β’ A top level chip floor plan is produced that defines the area
and shape of each functional block. Along with its
interconnection to other blocks. The block areas are design
Floor plan goals for each block. These terms will be assessed and the
floor plan updated as the project progresses.
10. 2. Design and Layout
For mixed signal designs there are 2 procedures run in parallel: Analogue | Digital
β’ Analogue Design
β’ Circuit blocks are designed at the transistor
level and simulated using a HSPICE
compatible simulator.
β’ Simulation results are verified against the
block specification and the VerilogA
behavioural model.
β’ Digital Design
Block level design /
β’ Writing a synthesizable RTL (register
simulation transfer level) description (either on
Verilog or VHDL) of the device.
β’ Writing a behavioural model, which is used
to verify that the design meets its
requirements.
β’ Writing a verification plan and a
corresponding verification environment
which describes and implements the
method of proving the design correctness
11. 3. Design and Layout
β’ The RTL description is verified against
the behavioural model.
β’ This approach reduces the probability
of the design error since no RTL
Verification designer tests his own code.
12. 4. Design and Layout
β’ Most mixed signal ASIC designs are complex require built
in assistance in order to be able to production test
effectively. These preparations are called DFT (design for
test).
β’ For the analogue sections it is important that key signals
can be observed in the analogue blocks. This may require
the routing of internal test points to device pads.
β’ For the Digital section of the design DFT techniques
include:
Design for Test β’ Scan path insertion - a methodology of linking all
registers into one long shift register (scan path). This can
(DFT) be used to check small parts of design instead of the
whole design (the latter being almost always
impossible).
β’ BIST (built-in self test) - a device used to check RAMs.
After being triggered it feeds specific test patterns to the
RAM module, reads back and compares results.
β’ ATPG (automatic test pattern generation) - a method of
creating test vectors for scan paths and BIST
automatically. Most modern EDA tool chains
incorporate such a feature.
13. 5. Design and Layout
β’ The synthesizable and verified RTL undergo logic synthesis. The
synthesized reads RTL input, user-specified constraints and a
Synthesis cell library from the foundry. The output of the synthesis
process is a gate-level netlist.
β’ The netlist must undergo formal verification to prove that RTL
and netlist are equivalent.
Netlist
β’ Preliminary timing results after synthesis are analyzed, critical
paths are checked against the project performance
requirements. If needed, the RTL description, constraints or
Checks synthesis options are modified, and the synthesis is repeated.
14. 6. Design and Layout
β’ Analogue
β’ This often requires hand crafting of the layout at a
transistor level to construct customised analogue
functions .
β’ The size and shape being dictated by the floorplan.
These blocks can subsequently be interconnected at
the top level.
β’ On completion of the blocks the circuits will be back-
extracted and resimulated in order to account for
layout parasitics.
β’ Digital
Layout β’ When timing constraints are finally met, the design
proceeds to the layout, which consists of
floorplanning, placement and routing.
β’ Some other important tasks are performed at this
step, including clock tree insertion.
15. 7. Design and Layout
β’ The last stage before tape out includes the
following checks:
β’ DRC (design rule check) is a check that the layout
DRC conforms to the foundry-specific rules.
and LVS β’ LVS (layout versus schematic) is a formal equivalence
check between the post-synthesis netlist and the final
layout.
β’ At last the resulting layout in GDSII format is
handed to the semiconductor fabrication plant
(foundry).
Tapeout β’ This process is called tape out.
16. 1. Wafer Processing
The Czochralski Process
β A typical wafer is made out of extremely
pure silicon that is grown into mono-
crystalline cylindrical ingots (boules) up to
300 mm (slightly less than 12 inches) in
diameter using the Czochralski process.
β These ingots are then sliced into wafers
about 0.75 mm thick and polished to
obtain a very regular and flat surface.
β Once the wafers are prepared, many
process steps are necessary to produce
the desired semiconductor integrated
circuit. In general, the steps can be
grouped into two major parts:
Front-end-of-line (FEOL) processing
Back-end-of-line (BEOL) processing
17. 2. Wafer Processing
Deposition Removal processes
β Any process that grows, coats, or β Any that remove material from the
otherwise transfers a material onto wafer either in bulk or selectively and
the wafer. consist primarily of etch processes,
β Available technologies consist of either wet etching or dry etching.
β’ Physical vapour deposition (PVD) β Chemical-mechanical planarisation
β’ Chemical vapour deposition (CVD) (CMP) is also a removal process used
β’ Electrochemical deposition (ECD) between levels.
β’ Molecular beam epitaxy (MBE)
β’ More recently, atomic layer
deposition (ALD) β¦among others.
18. 3. Wafer Processing
Patterning
β The series of processes that shape or alter the existing
shape of the deposited materials and is generally
referred to as lithography.
β For example, in conventional lithography, the wafer is
coated with a chemical called a photoresist. The
photoresist is exposed by a stepper, a machine that
focuses, aligns, and moves the mask, exposing select
portions of the wafer to short wavelength light.
β The unexposed regions are washed away by a
developer solution. After etching or other processing,
the remaining photoresist is removed by plasma
ashing.
Modification of electrical properties
β Historically consisted of doping transistor sources and
drains originally by diffusion furnaces and later by ion
implantation.
β These doping processes are followed by furnace
anneal or in advanced devices, by rapid thermal
anneal (RTA) which serve to activate the implanted
dopants.
β Modification of electrical properties now also extends
to reduction of dielectric constant in low-k insulating
materials via exposure to ultraviolet light in UV
processing (UVP).
19. 4. Wafer Processing - FEOL
FEOL processing
β The formation of the transistors directly in the silicon. The raw wafer is engineered by
the growth of an ultrapure, virtually defect-free silicon layer through epitaxy.
β In the most advanced logic devices, prior to the silicon epitaxy step, tricks are performed
to improve the performance of the transistors to be built.
β One method involves introducing a straining step wherein a silicon variant such as
silicon-germanium (SiGe) is deposited. Once the epitaxial silicon is deposited, the crystal
lattice becomes stretched somewhat, resulting in improved electronic mobility.
β Another method, called silicon on insulator technology involves the insertion of an
insulating layer between the raw silicon wafer and the thin layer of subsequent silicon
epitaxy. This method results in the creation of transistors with reduced parasitic effects.
Gate oxide and implants
β Front-end surface engineering is followed by: growth of the gate dielectric, traditionally
silicon dioxide (SiO2), patterning of the gate, patterning of the source and drain regions,
and subsequent implantation or diffusion of dopants to obtain the desired
complementary electrical properties.
β In dynamic random access memory (DRAM) devices, storage capacitors are also
fabricated at this time, typically stacked above the access transistor.
20. 5. Wafer Processing - BEOL
Metal Layers
β Once the various semiconductor devices
have been created, they must be
interconnected to form the desired
electrical circuits.
β This occurs in a series of wafer processing
steps collectively referred to as BEOL (not
to be confused with back end of chip
fabrication which refers to the packaging
and testing stages).
β BEOL processing involves creating metal
interconnecting wires that are isolated by
dielectric layers.
β The insulating material was traditionally a
form of SiO2 or a silicate glass, but recently
new low dielectric constant materials are
being used.
β These dielectrics presently take the form of
SiOC and have dielectric constants around
2.7 (compared to 3.9 for SiO2), although
materials with constants as low as 2.2 are
being offered to chipmakers.
21. 6. Wafer Processing - BEOL
Interconnect
β Synthetic detail of a standard cell through
four layers of planarized copper
interconnect, down to the polysilicon, wells
and substrate.
β More recently, as the number of
interconnect levels for logic has
substantially increased due to the large
number of transistors that are now
interconnected in a modern chip, the
timing delay in the wiring has become
significant prompting a change in wiring
material from aluminium to copper and
from the silicon dioxides to newer low-K
material.
β As the number of interconnect levels
increases, planarization of the previous
layers is required to ensure a flat surface
prior to subsequent lithography. Without it,
the levels would become increasingly
crooked and extend outside the depth of
focus of available lithography, interfering
with the ability to pattern.
22. 7. Processing β Prototyping
There are two methods of prototyping the first silicon MPW |MLM
Multi Product Wafer (MPW)
β’ Shared silicon technology for the
parallel processing of several devices
on one wafer
β’ Delivery of dies or ceramic samples
Benefits:
β’ Development charges
significantly reduced
Disadvantages:
β’ Fixed start dates and lead
times
β’ Only a small number of
untested samples available
β’ No volume production with
these masks
23. 8. Processing β Prototyping
There are two methods of prototyping the first silicon MPW |MLM
Multi Level Mask (MLM)
β’ 4 mask levels drawn on the same
reticule
β’ Mask costs reduced down to 1/4 for
all technology nodes
Benefits:
β’ Flexible tape-in dates
β’ Start-stop options and
design revisions possible
Disadvantages:
β’ No volume production with
these masks
24. 9. Processing β Wafer Thinning
Wafer Thinning
β A semiconductor device fabrication step
during which wafer thickness is reduced to
allow for stacking and high density
packaging of integrated circuits (IC).
β ICs are being produced on semiconductor
wafers that undergo a multitude of
processing steps. The silicon wafers
predominantly being used today have
diameters of 20 and 30 cm. They are
roughly 750 ΞΌm thick to ensure a minimum
of mechanical stability and to avoid warping
during high-temperature processing steps.
β The backside of the wafers are ground prior
to wafer dicing (where the individual
microchips are being singulated). Wafers
thinned down to 75 to 50 ΞΌm are common
today.
The process is also known as βBacklapβ or
'Wafer backgrindingβ.
25. 10. Processing β Wafer Dicing
Wafer Dicing
β The process by which die are separated from a
wafer of semiconductor following the processing
of the wafer. The dicing process can be
accomplished by scribing and breaking, by
mechanical sawing (normally with a machine
called a dicing saw) or by laser cutting. Following
the dicing process the individual silicon chips are
encapsulated into chip carriers .
β During dicing, wafers are typically mounted on
dicing tape which has a sticky backing that holds
the wafer on a thin sheet metal frame. Once a
wafer has been diced, the pieces left on the
dicing tape are referred to as die, dice or dies.
These will be packaged in a suitable package or
placed directly on a printed circuit board
substrate as a "bare die". The area that has been
cut away are called die streets which are typically
about 75 micrometres (0.003 inch) wide.
β The die created may be any shape generated by
straight lines, but they are typically rectangular or
square shaped.
26. 1. Packaging - Development
Early Flat Packs
β The earliest integrated circuits were packaged in ceramic flat
packs, which continued to be used by the military for their
reliability and small size for many years. Commercial circuit
packaging quickly moved to the dual in-line package (DIP), first in
ceramic and later in plastic
PGA & LCC
β In the 1980s pin counts of VLSI circuits exceeded the practical
limit for DIP packaging, leading to pin grid array (PGA) and
leadless chip carrier (LCC) packages. Surface mount packaging
appeared in the early 1980s and became popular in the late
1980s, using finer lead pitch with leads formed as either gull-
wing or J-lead, as exemplified by small-outline integrated circuit
β a carrier which occupies an area about 30 β 50% less than an
equivalent DIP, with a typical thickness that is 70% less. This
package has "gull wing" leads protruding from the two long sides
and a lead spacing of 0.050 inches.
Small Outline Integrated Circuits
β Small-outline integrated circuit (SOIC) and Plastic leaded chip
carrier (PLCC) packages. In the late 1990s, plastic quad flat pack
(PQFP) and thin small-outline packages (TSOP) became the most
common for high pin count devices, though PGA packages are
still often used for high-end microprocessors.
27. 2. Packaging β BGD | SiP
Ball grid array (BGA) packages
β Have existed since the 1970s. Flip-chip Ball
Grid Array packages, which allow for much
higher pin count than other package types,
were developed in the 1990s.
β In an FCBGA package the die is mounted
upside-down (flipped) and connects to the
package balls via a package substrate that is
similar to a printed-circuit board rather
than by wires.
β FCBGA packages allow an array of input-
output signals (called Area-I/O) to be
distributed over the entire die rather than
being confined to the die periphery.
System in a Package (SiP)
β When multiple dies are stacked in one
package, it is called SiP, for System In
Package, or three-dimensional integrated
circuit.
β When multiple dies are combined on a
small substrate, often ceramic, it's called an
MCM, or Multi-Chip Module.
28. 3. Packaging β QFN Part 1
QFN
β Flat no-leads packages such as QFN (quad-
flat no-leads) and DFN (dual-flat no-leads)
physically and electrically connect
integrated circuits to printed circuit boards.
Flat no-leads, also known as MicroLead
Frame, is a surface-mount technology, one
of several package technologies that
connect ICs to the surfaces of PCBs without
through-holes.
β Flat no-lead is a near chip scale package
plastic encapsulated package made with
a planar copper lead frame substrate.
Perimeter lands on the package bottom
provide electrical connections to the
PCB.
β Flat no-lead packages include an exposed
thermal pad to improve heat transfer out
of the IC (into the PCB). Heat transfer can
be further facilitated by metal vias in the
thermal pad.
The QFN package is similar to the quad-flat
package, and a ball grid array.
29. 4. Packaging β QFN Part 2
QFN packages
β Two types of QFN packages are common:
air-cavity QFNs, with an air cavity designed
into the package, and plastic-moulded
QFNs with air in the package minimized.
Plastic Moulded QFN
β Less-expensive plastic-moulded QFNs
usually limited to applications up to ~2β3
GHz.
β It is usually composed of just 2 parts, a
plastic compound and copper lead
frame, and does not come with a lid.
Air-cavity QFN
β In contrast, the air-cavity QFN is usually
made up of 3 parts; a copper lead frame,
plastic-moulded body (open, and not
sealed), and either a ceramic or plastic lid.
β It is usually more expensive due to its
construction, and can be used for
microwave applications up to 20β25 GHz.
QFN packages can have a single row of contacts
or a double row of contacts.
30. 5. Packaging β Flip Chip
Flip chip | C4
β Flip chip, also known as Controlled Collapse
Chip Connection or its acronym, C4, is a
method for interconnecting semiconductor
devices, such as IC chips and
Microelectromechanical systems (MEMS),
to external circuitry with solder bumps that
have been deposited onto the chip pads.
β The solder bumps are deposited on the
chip pads on the top side of the wafer
during the final wafer processing step. In
order to mount the chip to external
circuitry (e.g., a circuit board or another
chip or wafer), it is flipped over so that
its top side faces down, and aligned so
that its pads align with matching pads on
the external circuit, and then the solder
is flowed to complete the interconnect.
β This is in contrast to wire bonding, in
which the chip is mounted upright and
wires are used to interconnect the chip
pads to external circuitry.
31. 6. Packaging β Flip Chip Process
Integrated circuits are created on the wafer
Pads are metalized on the surface
of the chips
Solder dots are deposited on each
of the pads
Chips are cut
Chips are flipped and positioned so that
the solder balls are facing
the connectors on the external circuitry
Solder balls are then re-melted (typically
using hot air reflow)
Mounted chip is βunder-filledβ using an
electrically-insulating adhesive
32. ASIC Initial Evaluation
Joint Evaluation
β Device evaluation is conducted by both the
SWINDON design team and also the
customer.
β The design team will evaluate the device as
a stand alone component and the customer
will evaluate the device within itβs system.
β It is preferably conducted on identical
evaluation boards and set up in order to be
able to accurately correlate results.
Initial evaluation: -
ο Power up.
ο Turn on the power supply and check the
mains fuse has not blown, if not check
current consumption in key modes.
ο Check functionality either, optimistically,
everything at once or block by block then a
full functional test.
ο Look at the performance aspects (accuracy,
speed, settling time etc.) that are key
performance aspects to the chip for a few
samples at room temperature..
33. ASIC Full Evaluation
Functional and Parametric
β Once the initial checking has been
completed then a full evaluation (functional
and parametric) against the specification is
then carried out.
β This is conducted over the environmental
window (temperature and voltage), over a
limited number of samples (5 to 10), all
according to the evaluation schedule. T
β his schedule should be in existence well
before the initial prototype chips arrive at
the respective companies.
Parallel Testing
β In parallel samples will go to the test
department so that ATE development can
proceed.
β This will need a large number of samples to
be tested to ensure that the functional and
parametric yield is up to expectation.
34. ASIC Test Development Part 1
The Test Development phase
Consists of developing the tests for the state of the art
ASICs. It is conducted in close co-operation with the
design team to develop DFT strategies, test methods,
verify test structures through simulation and generate
test vectors.
This phase covers the following areas:
1. Structural tests - Develop test vectors for
ATPG/JTAG/IDDQ.
2. Memory Tests - Develop test vectors for
embedded memories.
3. Develop tools to support Failure analysis
and Yield enhancement teams to physically
located failure locations on the chip.
4. Mixed-signal tests - Develop test vectors
for on-chip PLLs, DACs, ADCs, and other
analog/RF blocks.
5. Functional tests - Develop broadside
functional/Fmax test vectors for embedded
controllers and DSP cores.
6. Behavioural Modelling - Develop analog
models (DAC, ADC, PLL, up/down
converters and amplifiers) for pre-silicon
verification and test vector generation.
35. ASIC Test Development Part 2
Automatic Test Equipment (ATE )
β The aim is for the implementation of
these test vectors and methodologies
on Automatic Test Equipment (ATE)
during first silicon debug,
characterization, and production.
β The required skills to perform this
critical function includes;
ο Strong knowledge of DFT: ATPG,
JTAG, IDDQ, At-speed ATPG, fault
simulation, fault analysis.
ο Knowledge of Iddq test
techniques and At-speed ATPG
including transition and path delay
ο Strong knowledge of test bench
development, simulation debug,
behavioural model development.
36. ASIC Test Development Results
β’ Bespoke Test Regime
β The results of this work in a bespoke
test regime for the ASIC under test and
includes;
ο Fully automated wafer
and package level test
ο Fully automated, online
test and QA procedures
ο 100% wafer level test,
each device
ο 100% package level test,
each package
ο Real-time yield statistics
ο Wafer and package level
tests correlated
ο 100% Datalog, each device
ο Tri temperature test
ο PPM field failure rate sub 1ppm
37. ASIC Production
The production of the ASIC comprises many aspects of areas
that have already been covered.
1. Production Acceptance Review 5. Package Testing
β Prototypes are reviewed for β Packages are typically tested at CSS
Production Suitability β Test Program is Custom Made
2. Wafer Fabrication β Delivery in rails, tape & reel or
β Production Orders from Silicon waffle packs (die)
Fabricator 6. Production Reports
3. Wafer Probe β Probe and Package Test Data is
β Die are tested at wafer level at CSS analysed by Quality Engineering
β Test Program is Custom Made for and
your ASIC β Yield and Statistical Process Control
β Key Product Characteristics (KPC's) information is available to ASIC
are collected for Statistical Process customers.
Control 7. Order Fulfilment and Logistics
4. Packaging Forecasting
β A wide variety of packages are β Supply Chain Management
available, as well as die delivery β Support functions
38. Fulfilment and Logistics
In-house capabilities
It is hugely preferential if your ASIC supplier has many of the fulfilment and logistics
capabilities in house. This will provide a much more risk averse supply chain and
SWINDON offers the complete service. From forecasting to shippingβ¦
Supply Chain
Warehousing Order
Forecasting Management Manufacturing
/ Shipping Management
39. Fulfilment and Logistics
Support Functions
The support functions that your ASIC supplier provides can be critical in order for your
company to perform to its highest level. SWINDON offers the highest supportβ¦.
Environmental Warranty and Resource Operations
Financials
Health and Safety Returns Management Support
40. 10 Reasons whyβ¦
SWINDON makes a good choice for your next ASIC project
Design and productionisation expertise
Gained over 30 years of successful projects
Fixed development costs and unit prices
Design ownership
Production supply
In house wafer probe and ATE production test
Lifetime product support
Financial stability
Quality
Partnership Approach
41. β’ We have a full range of resources from case histories to
planning checklists
β’ Please visit our web site www.swindonsilicon.co.uk
β’ Or contact us
Headquarters & Design Centre
Swindon Silicon Systems Limited
Radnor Street Swindon Wiltshire SN1 3PR United Kingdom
Tel: +44 (0) 1793 649400 email: sales@swindonsilicon.co.uk