3. Living up to Live
www.leica-microsystems.com Page 3
4. Living up to Live
• Agenda
– Design and Development Criteria
• Target Markets
– The DM8000 & DM12000
• Hardware Configurations
• Key Features and Solutions
– Leica Applications Suite
• Integrated Image Capture and Post
Processing
• Microscope Remote Control
www.leica-microsystems.com Page 4
5. Living up to Live
• Design and Development Criteria
– Research Level Compound Microscope
• World Class “Leica” Optics and Image quality
– Unparalleled Contrast and the highest resolution
• Capable of Handling Substrates up to 12 X 12 inches
• Macro Imaging to “See more faster”
• Utilize solid state technology for operational efficiency
• Fully Integrated with the Leica Application Suite
– Completely coded for automatic reproducibility of archived images
• Easy to Use and Ergonomically correct for all users
• LED Illumination for long life and low power consumption
www.leica-microsystems.com Page 5
6. Living up to Live
• Validated Market Segments
– Semiconductor - R&D and
Manufacturing
• Process Development, Process
Control, Test and Assembly,
MEMS, NanoTech, Etc
– TFT LCD’s - R&D and
Manufacturing
• Process Development, Process
Control, Test and Assembly
– Solar - R&D and Manufacturing
• Process Development, Process
Control, Test and Assembly
– Metallographic – Research and
Quality Control
• Process Development, Process
Control
www.leica-microsystems.com Page 6
7. Living up to Live
• Agenda
– Design and Development Criteria
• Target Markets
– The DM8000 & DM12000
• Hardware Configurations
• Key Features and Solutions
– Leica Applications Suite
• Integrated Image Capture and Post
Processing
• Microscope Remote Control
www.leica-microsystems.com Page 7
8. Living up to Live
The DM8000 & DM12000
www.leica-microsystems.com Page 8
9. Living up to Live
Hardware Configuration Highlights
• DM8000 up to 8” / 200mm substrate
• DM12000 up to 12” / 300mm substrate
– Motorized 6 fold Objective Nosepiece, 4 fold
Turret and 17 position Aperture Diaphragm
Microelectronics
• Includes Light Manager (Motorized
aperture/intensity).
– Manual X-Y-Z Motion
• Optional Motorized Z motion and X-Y Stages
add tional
– Required for motor focus and joystick X and Y
42mm
i
movement
– Recommended when Image Stacking or Stitching
– Motorized version Includes Contrast Manager
www.leica-microsystems.com Materials 9
Page
10. Living up to Live
Configuration Highlights
• Key Features
– Macro to Micro Function
• 0.7x to 150x
– New Contrasting Techniques
• Oblique Illumination
– Including Oblique UV (365nm) for extreme contrast
• Advanced Optics
– Increased Brightness and double the working distance
– Ergonomic design for comfort and flexibility
– Clean LED Illumination
• Reflected Light or Reflected and Transmitted Light bases
• Environmentally friendly and maintenance free for years
www.leica-microsystems.com Page 10
11. Living up to Live
• Macro to Micro Inspection
– Larger substrates require longer inspection times
• A larger field of view will reduce inspection times
– With our 0.7x Macro objective you get a remarkable
FOV of ~40mm in a Inspection Microscope
– Reduce inspection times by ~ 30%
www.leica-microsystems.com Page 11
12. Living up to Live
• Macro to Micro Inspection
• Get a fast overview using the
Macro function to scan the
entire substrate surface
• See ca. 40mm onto the
sample surface with a single
glance
Switch to Micro and continue inspection
BF10x DF10x DIC10x
www.leica-microsystems.com Page 12
13. Living up to Live
Macro to Micro Inspection
Macro
5x
20x
50x
www.leica-microsystems.com Page 13
14. Living up to Live
Macro to Micro Inspection
Macro
5x
50x
www.leica-microsystems.com Page 14
15. Living up to Live
• Macro to Micro Inspection
0.7x BF
5x BF
10x BF
20x BF
www.leica-microsystems.com Page 15
16. Living up to Live
The Macro Summary
• Quickly scan the entire surface for
macro defects and immediately switch
to high magnification to review and
classify
• The perfect solution to “bridge the
gap” between Bright Light inspection
and Microscopic inspection
• Increases performance and efficiency
of inspection and review station
www.leica-microsystems.com Page 16
17. Living up to Live
Configuration Highlights
• Key Features
– Macro to Micro Function
• 0.7x to 150x
– New Contrasting Techniques
• Oblique Illumination
– Including Oblique UV (365nm) for extreme contrast
• Advanced Optics
– Increased Brightness and double the working distance
– Ergonomic design for comfort and flexibility
– Clean LED Illumination
• Reflected Light or Reflected and Transmitted Light bases
• Environmentally friendly and maintenance free for years
www.leica-microsystems.com Page 17
18. Living up to Live
Oblique Illumination
High resolution from every angle
Fully Integrated in every DM8000 M or DM12000 M stand
150x BF 150X OBL
www.leica-microsystems.com Page 18
19. Living up to Live
Bright Field Oblique Illumination
20x BF 20x OBL
www.leica-microsystems.com Page 19
20. Living up to Live
UV Inspection
• Five contrast mode 150x /0.90 objective for Zero pixel shift contrast change
during inspection. (BF, DF, DIC, UV, OUV)
150x BF 150x UV
www.leica-microsystems.com Page 20
21. Living up to Live
UV Inspection
• Switching from VIS to UV automatically changes illuminator and camera port
– Switch in less than 1 second from VIS to UV
• Single objective increases efficiency and reduces overall cost
BF 150x UV 150x
www.leica-microsystems.com Page 21
22. Living up to Live
Oblique Ultra Violet Illumination
OUV for maximum contrast and resolution
150x BF 150x UV
150x OUV
Multi-functional 150x
objective: BF, DF, Dual Camera port to
DIC, UV and OUV support VIS, UV and
OUV automatically
www.leica-microsystems.com Page 22
23. Living up to Live
Oblique UV for increased contrast and resolution
Bumps with 150x BF
Bumps with 150x UV
Multi-functional PL APO 150x
objective: BF, DF, DIC, UV and OUV
Bumps with 150x OUV
www.leica-microsystems.com Page 23
24. Living up to Live
Advanced Optics
Microelectronic Inspection Solutions
In-Depth Darkfield
• Increased intensity and higher resolution over
standard Darkfield objectives
– Increases image contrasting and feature
resolving power
• Long Working Distance
– Nearly double the working distance of
conventional DF objectives
– Increased working distance improves safety for
substrate handling
• Works in conjunction with newly developed
Dark Field cube
• Focus Finder for reflective surfaces
www.leica-microsystems.com Page 24
25. Living up to Live
Oblique Illumination
Solar Cells
Surface morphology
Dimensions of metal contacts
Dimensions and continuity of insulation trenches
150x BF 150x OBL
www.leica-microsystems.com Page 25
26. Living up to Live
TFT and LCD Inspection
Switch between or combine Transmitted and Reflected Light
10x TL Only 10x RL Only 10x BF BF
50x TL Only 50x RL Only 50x BF BF
www.leica-microsystems.com Page 26
27. Living up to Live
Configuration Highlights
• Key Features
– Macro to Micro Function
• 0.7x to 150x
– New Contrasting Techniques
• Oblique Illumination
– Including Oblique UV (193nm) for extreme contrast
• Advanced Optics
– Increased Brightness and double the working distance
– Ergonomic design for comfort and flexibility
– Clean LED Illumination
• Reflected Light or Reflected and Transmitted Light bases
• Environmentally friendly and maintenance free for years
www.leica-microsystems.com Page 27
28. Living up to Live
Ergonomics
The Basics
Change contrast modes or LED Display for Contrast
objectives with a single XYZ movement coarse/fine
Ergo-tube with button click focus settings
upright image
Height adjustable
focus knobs
www.leica-microsystems.com Page 28
29. Living up to Live
Ergonomics
Stage Control
• Joystick
– Includes 4 variable function keys
• Leica Smart Move
– X-Y Stage and Z Focus control
• Includes 4 variable function keys
• Leica STP6000
– X-Y Stage and Z Focus control
• Includes 10 variable function keys
www.leica-microsystems.com Page 29
30. Living up to Live
Ergonomics
Integrated Functions
• Contrast Manager
– If a contrast mode is selected by the operator the intensity adjustment, the
aperture position or the objective selection are performed by the Microscope.
• Illumination Manager
– If the objective is changed the previous settings of light intensity and aperture
for that specific objective are restored
• No need to readjust aperture or illumination intensity
• Memory functions
– 9 separately programmable “hot” keys to customize operation and efficiency at
every inspection station
– Single Keys can programmed for Multi Function operation
www.leica-microsystems.com Page 30
31. Living up to Live
Configuration Highlights
• Key Features
– Macro to Micro Function
• 0.7x to 150x
– New Contrasting Techniques
• Oblique Illumination
– Including Oblique UV (193nm) for extreme contrast
• Advanced Optics
– Increased Brightness and double the working distance
– Ergonomic design for comfort and flexibility
– Clean LED Illumination
• Reflected Light or Reflected and Transmitted Light bases
• Environmentally friendly and maintenance free for years
www.leica-microsystems.com Page 31
32. Living up to Live
Optimum Airflow Fully
Integrated for
Low Power
consumption VIS and UV
Light
LED Illumination
Long Life LED
www.leica-microsystems.com Page 32
33. Living up to Live
• Agenda
– Design and Development Criteria
• Target Markets
– The DM8000 & DM12000
• Hardware Configurations
• Key Features and Solutions
– Leica Applications Suite
• Integrated Image Capture and Post
Processing
• Microscope Remote Control
www.leica-microsystems.com Page 33
35. Living up to Live
The Leica Applications Suite
Highly sophisticated image processing and
analysis combined with Microscope control.
Unites the scope, camera, image processing and
analysis into an easy to use fully integrated
Inspection, Measurement and Reporting
system.
www.leica-microsystems.com Page 35
36. Living up to Live
www.leica-microsystems.com Page 36
37. Living up to Live
www.leica-microsystems.com Page 37
38. Living up to Live
www.leica-microsystems.com Page 38
39. Living up to Live
Leica Application Suite = Remote Control
www.leica-microsystems.com Page 39
40. Living up to Live
Imaging Post
Processing
Measurement
3D
Stitching Stacking
www.leica-microsystems.com Page 40
41. Reporting
As simple as selecting an
image and clicking an export
location
• Exports to Excel
–Data
–Histograms
–Pre Programmed
–Completely Customizable
Print, Send, Display, Archive
Page 41
42. Living up to Live
Reporting Data
www.leica-microsystems.com Page 42
43. Living up to Live
• Available Accessories
– Cameras
• From 2 to 12 Meg
– Stage Inserts
• For Wafers, Photomask, TFT Display, Glass or Metal,
with or without Vacuum
– Motorized Stages
• 8 inch and 12 inch models
– Wafer Loaders
• Several completely integrated 3rd party solutions for
wafer sizes of 3 to 8 inch
www.leica-microsystems.com Page 43
44. Living up to Live
Summary
– Reduce Inspection time
• Macro View
– Increase Resolution
• Oblique Illumination
• Oblique UV
– Comfort and ease of use
• Ergonomic Design
– Clean and maintenance free
Illumination
• LED Light Sources
– Image analysis and post
processing
• Leica Applications Suite
www.leica-microsystems.com Page 44
