mems ppt

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sapparao

Education

[object Object],[object Object],INTRODUCTION

[object Object],[object Object],[object Object],[object Object],DEPOSITION:

[object Object],[object Object],[object Object],[object Object],LITHIOGRAPHY:

ETCHING: ,[object Object],[object Object]

[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],MATERIALS FOR MEMS:

[object Object],MICRO MACHINING TECHNOLOGY:

[object Object],[object Object],[object Object],TYPES OF MICROMACHINING:

MEMS ACCELEROMETRER: ,[object Object],[object Object],[object Object],[object Object],[object Object]

[object Object],[object Object],[object Object],[object Object],[object Object],ADVANTAGES:

[object Object],[object Object],[object Object],TECHNICAL LIMITATIONS:

[object Object],[object Object],[object Object],APPLICATIONS:

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It was a review project that is typically more focused on mechanical parts and microfabrication technologies made suitable for biological applications. The interdisciplinary nature of bio-MEMS combines material sciences, clinical sciences, medicine, surgery, electrical engineering, mechanical engineering, optical engineering, chemical engineering and biomedical engineering. Some of its major applications include genomics, proteomics, molecular diagnostics, point-of-care diagnostics, tissue engineering and implantable microdevices. MEMS techniques were originally developed in the microelectronics industry. MEMS are a class of miniature devices and systems fabricated by micromachining processes. MEMS devices have critical dimensions in the range of 100nm to 1000um (or 1mm). MEMS technology is a precursor to the relatively more popular field of Nanotechnology, which refers to science, engineering and technology below 100nm down to the atomic scale. Occasionally, MEMS devices with dimensions in the millimetre-range are referred to as meso-scale MEMS devices. as drug delivery systems improve, the components of the systems continue to decrease in size. Currently, most drug delivery systems are based upon devices and drug carrier elements that are on a micro-scale. Many of the future and developing technologies are based on the nano-scale.

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MEMS technology consist of micro electronic elements actuators, sensors and mechanical structures built onto a substrate which is usually “Silicon”. They are developed using microfabrication techniques : deposition, patterning, etching. The most common forms of MEMS production are : Bulk micromachine, surface micromachine etc. The benefits of this small scale integrated device brings the technology of nanometers to a vast no. of devices. Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters.

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Micro electro mechanical systems (MEMS, also written as micro-electro-mechanical, Micro Electro Mechanical or micro electronic and micro electro mechanical systems and the related micromechatronics) is the technology of microscopic devices, particularly those with moving parts. It merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines in Japan, or micro systems technology. Micro Electromechanical systems or MEMS, represent an extraordinary technology that promises to transform whole industries and drive the next technological revolution. These devices can replace bulky actuators and sensors with micron-scale equivalent that can be produced in large quantities by fabrication processes used in integrated circuits photolithography. This reduces cost, bulk, weight and power consumption while increasing performance, production volume, and functionality by orders of magnitude. For example, one well known MEMS device is the accelerometer (it’s now being manufactured using mems low cost, small size, more reliability). Furthermore, it is clear that current MEMS products are simply precursors to greater and more pervasive applications to come, including genetic and disease testing, guidance and navigation systems, power generation, RF devices (especially for cell phone technology), weapon systems, biological and chemical agent detection, and data storage. Micro mirror based optical switches have already proven their value; several start-up companies specializing in their development have already been sold to large network companies for hundreds of millions of dollars. The promise of MEMS is increasingly capturing the attention of new and old industries alike, as more and more of their challenges are solved with MEMS. After extensive development, todays commercial MEMS – also known as Micro System Technologies (MST), Micro Machines (MM) have proven to be more manufactural, reliable and accurate, dollar for dollar, than their conventional counterparts. However the technical hurdles to attain these accomplishments were often costly and time- consuming, and current advances in this technology introduce newer challenges still. Because this field is still in its infancy, very little data on design, manufacturing processes or liability are common or shared.

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Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micromachined devices”.

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Micromachined Electro-Mechanical Systems, also called microfabricated Systems, have evoked great interest in the scientific and engineering communities. This is primarily due to several substantive advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, virtually zero dc power consumption and potentially large reduction in power consumption, etc. This Seminar would give an introduction to these exciting developments and the technology and design approaches for the realization of these integrated systems. It would be followed with an introduction to the design of microsensors, such as the pressure sensor and the accelerometer, which began the MEMS revolution. A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from the existing literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods. I begin with a quick introduction to MEMS technology, micron scale and show that silicon is eminently suited for micromechanical devices and therefore the possibility of integrating MEMS with VLSI electronics. Smart cell phones and wireless enabled devices are poised to become commercial engines for the next generation of MEMS, since MEMS provide not only better functionality with smaller chip area, but also alternative transceiver architectures for improved functionality, performance and reliability. The application domains cover microsensors and actuators for physical quantities, of which MEMS for automobile & consumer electronics forms a large segment; microfabricated subsystems for communications and computer systems.

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Micro-electro-mechanical systems (MEMS) have been identified as one of the most promising technologies and will continue to revolutionize the industry as well as the industrial and consumer products by combining silicon-based microelectronics with micro-machining technology. All the spheres of industrial application including robots conception and development will be impacted by this new technology. If semiconductor microfabrication was contemplated to be the first micro-manufacturing revolution, MEMS is the second revolution. The paper reflects the results of a study about the state of the art of this technology and its future influence in the development of the construction industry. The interdisciplinary nature of MEMS utilizes design, engineering and manufacturing expertise from a wide and diverse range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging.

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What is MEMS? Micro electro mechanical system is a technique of combining electrical and mechanical combinations together on a chip, to produce a system of miniature dimensions. MEMS is a integration of a number micro components on a single chip which allow the microsystem to both sense and control the environment. The components are integrated on a single chip using micro fabrication technologies.

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mems ppt

1. MEMS TECHNOLOGY BY S.APPA RAO

4. FABRICATION PROCESS:

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12. PIEZO-RESISTIVE ACCELEROMETER:

13. LAYOUT OF THE RESISTOR:

14. MASKS that are used 4 ACCELEROMETER:

15. FABRICATION PROCESS:

16. Contd….

17. INTERFACE ELECTRONIC CKT

18. MEMS ACCELEROMETER

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mems ppt

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