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MEMS: The New Dimension of the
                        Advanced Analog World


Moderator: Benedetto Vigna, Group Vice President &
General Manager of MEMS & Sensors, Transceivers & Healthcare Division
June 3, 13:45
MEMS: The New Dimension of the
                    Advanced Analog World

Moderator
  Benedetto Vigna, Group Vice President &
  General M
  G       l Manager of MEMS & S
                     f        Sensors Transceivers &
                                        T    i
  Healthcare Division, STMicroelectronics

  Panel
  Volker Herbig, Manager Strategic Marketing,
    X-FAB Semiconductor Foundries AG
  David R ffi
  D id Ruffieux, E  Expert RF & A l
                          t      Analog IC Design, Microelectronics, CSEM (Swiss
                                           D i     Mi    l t    i         (S i
  Center for Electronics & Microtechnology)
  Dr. Massimo Sivilotti, Chief Scientist, Tanner EDA
  Steve Wainwright, General Manager EMEA, Vice President Sales & Marketing,
                   g ,               g        ,                                g,
  Freescale Semiconductor
OUTLINE




Introduction      (20’)

Discussion        (40’)

Q&A               (10’)
MEMS is no longer an Emerging
              Technology
                Mobile
                Phones




                                         PMP
                                  DSC
  Game
Controllers              PC/HDD
                                               PND




                                          Remote
                                          Controllers
H
                                                                  EW
                                                                    LE                                    Millions of Dollars
                                                             TE         TT
                                                                XA
                                                                   S          PA
                                                                                 C
                                                                                                                                                         1,000




                                                                                          0
                                                                                              100
                                                                                                    200
                                                                                                          300
                                                                                                                400
                                                                                                                      500
                                                                                                                            600
                                                                                                                                  700
                                                                                                                                        800
                                                                      IN                                                                      900
                                                                          ST K A
                                                                              R        R
                                                                   R            U        D
                                                           ST        O            M
                                                               M       BE           E
                                                                IC          R         NT
                                                                   R          T
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                                                                       EL
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                                                                              CT CH
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                                                         AV                   EE ON
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                                                             AG                    C
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                                                                   TE           D        E
                                                                       C          EN
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                                                         IN
                                                                AN HN
                                                                              O         O
                                                                   A             LO
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                                                                   N            EV S
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                                                                             .S       E
                                                                               en S
                                                                                                                                               Open




                                                                     FO           so
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                                                                            M        no
                                                                                         r)
                                                                               FA
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                                                                                N
                                                                                                                                               Captive




                                                                         PA SAT
                                                                             N         A
                                                                               AS
                                                                                   O
                                                                                     N
                                                                                       IC
                                                                                                                                                                 Almost $5B by 15 MEMS suppliers



                                                                                                                                               Foundry




Source: MEMS Competitive Landscape Tool, 2009, iSupply
Potentially high-volume, high-growth
                                                industry with a large customer base

                                                                                                 Other Emerging MEMS
                      9,000                                                                      Micro Fuel Cells
                                                                                                 Flow Sensors
                      8,000
                                                                                                 Thermopiles
                      7,000                                                                      Optical MEMS for Telecom
                                                                                                 Microfluidic Chips
Millions of Dollars
                  s




                      6,000
                                                                                                 RF MEMS Oscillators
                                                                                                 MEMS Sw itches
                      5,000
                                                                                                 BAW Filters
                      4,000                                                                      Microbolometers
                                                                                                 MEMS Microphones
                      3,000
                                                                                                 Optical MEMS for Displays

                      2,000                                                                      MEMS Wafer Probes
                                                                                                 Gyroscopes
                      1,000                                                                      Pressure Sensors
                                                                                                 Inkjet Print heads
                         0
                              2006   2007    2008   2009   2010   2011   2012     2013           Accelerometers

                                                                     Source: Q1 2009 MEMS market tracker, iSupply

                                            Sensors grow faster than Actuators
MEMS Accelerometers and
                                     Gyroscopes
                                                            MEMS Motion Sensors* Market
          MEMS Motion Sensors* Market                         for CE and Mobile Phones
US$M              2008-2013
                                                       US$M
               10.1% CAGR
     1,800
      ,                                                 1200                                              1600

     1,600                                                                                                1400
                                                        1000
     1,400                                                                                                1200




                                                                                                                 Millions of units
                       1%
     1,200            CAGR
                                       9.8% CAGR        800
                                                                                                          1000
     1,000
     1 000
                                                        600                                               800
       800                                    7%
                                                                                                          600
       600                                   CAGR       400
                       19%
                      CAGR                                                                                400
       400
                                              16%       200
                                                                                                          200
       200                                   CAGR
                                                          0                                               0
         0
               2008   2013            2008   2013               2006 2007 2008 2009 2010 2011 2012 2013
             Accelerometers           Gyroscopes
                                                               Accelero revenue            Gyro revenue
    Cell phones and CE          Automotive    Others           Accelero Units              Gyro Units

* MEMS Accelerometers & Gyroscopes


                     Automotive Market is larger than Consumer Market but
                             Consumer Market has higher CAGR
Source – iSuppli, Q1 2009
Very soon 1 BUnits will be in the
             consumer market

         Accelerometers and Gyroscopes


35 mm2
               25 mm2      20 mm2    15 mm2      < 9 mm2
Moore? Who is he?

MEMS means Micro Electro Mechanical Systems … taking advantage of the
mechanical AND electrical properties of silicon

Two key elements:
   Micron-sized Transducer realized through a specific process
   called Micro-Machining

   An Advanced Analog Chip with embedded smart functionalities
   and a lot of libraries and dedicated IPs




                    +                    =

        No common technology platform across the industry
STMicroelectronics point of view


MEMS is a long term committment

Some MEMS product families are foundamental to excel in
Advanced Analog World

Reason of ST Leadership in MEMS Consumer Market as per
iSupply Dec 2008:
   Management of entire supply chain
   Closeness of technology and Design
                         gy          g
   Leading products (look at latest born LIS331DLH)
   Blend of State of the art 8” Manufacturing and Product
   Innovation
   Quality f Service
   Q lit of S     i
   Nimble team
   ….Trust of the customers
Volker
V lk @ XFab
       XF b
MEMS Market for Foundries

MEMS devices are ubiquitous
    Automotive
     - TPMS ESP Navigation
       TPMS, ESP,
    Consumer
     - MEMS Microphones, Game Controllers, …
     - Inkjet (captive)
     - DLP (captive)
High-volume consumer applications
  g                        pp
in addition to Inkjet are starting to drive
MEMS market growth

The MEMS market is significant
6B USD in 2009 but small in comparison to the SC market

The MEMS market is and will be served by foundries
Challenges for MEMS foundries

MEMS technology enables new sensors and actuators beyond
CMOS
MEMS technologies are the logical extension of the current
CMOS-based analog/mixed-signal processes
   MEMS technology enables sensors to transform analog
   pressure and inertial signals in electrical signals
Current Challenges
   Technology
    - N standards (1 product = 1 process)
      No t d d             d t                 )
    - CMOS compatibility issues
   Business Model
    - Many small volume apps
    - Silicon content
    - SOC vs. SIP
Trends in the MEMS foundries space



Fabless analog-mixed/signal companies are entering the
MEMS market to compete with the analog-mixed/signal
IDMs in high-volume applications such as TPMS, gyro or
MEMS microphone

Emphasis on CMOS compatibility to achieve synergies
with high-volume CMOS production
   Integration of 0.35 µm CMOS with MEMS

6
6” to 8 transition for high-volume production to ensure
      8”               high volume
cost competiveness
MEMS FOR NEW VERSATILE TIMING AND SHORT
  RANGE WIRELESS CONNECTIVITY SOLUTIONS




David
D id @ CSEM
Quartz XTALs vs Silicon MEMS


Quartz XTALs                  Silicon MEMS
 Null 1st, 2nd order TCFs      Large thermal drift !
 by proper rotation            Electro-static actuation
 Piezoelectric material        or piezo thin film
                                  p
 Low cost process but          Synergies with ICs
   Small substrates (1.5’’)      Similar processes
   Old technologies (wet)
       t h l i ( t)              Large substrates
                                 L        b t t
 Expensive packaging           Wafer scale packaging
   Metal cans or ceramic       Single device for any
 1 frequency, 1 device         frequency by electronic
 Individual trimming           Miniature & lower cost
Low power SiRes compensation scheme

                                           Temperature     Thermal Comp.      Calibration 
            No PLL but                       Sensor        State Machine          Data

               Fractional d
                        l div.                                                  32768Hz
                                                            ÷M,M+1 
               Freq. Interp.                                modulator
                                                                                    32Hz
               3µA @ 1V                                                    ÷1024 
                                                                           ÷1024
                                                                            Qi>S
                                                         DC=S/1024
                              df/dT≈‐30ppm/°C
                                       pp
            ∆fHL
    uency




                   dc=100%         dc=0%
            ÷N-1
Frequ




             ÷N
            ÷N+1
                     fCOMP

                             Temperature
Low-Cost Packaging with Sn-Au


CAP plated                   MEMS chip stacked
with Sn-Au                   above IC die
(dummy or
IC wafer)
Assembly
cross-sect.
after reflow
 ft     fl
AlN-driven
resonator
with back
cap & UBM
Generation of Any Clock Frequency and
                   High Performance Transceiver with MEMS
                        BAW
COMBINE
                              LNA                 BB
  RF BAWs                                                   ULP RTC
  LF SiRes                                       RX DATA    Mode
                                PA
  RF CMOS                                        & CLK
                                            ÷N   C
                                                 CHANNEL
   SiRes
   SiR
                                                 SELECT
                                                            Ultra fast
                   ÷P         RTC                           wake-up
                                                 TX DATA
                                            ÷Q   PROG SYS
           TEMP   COMP        AD                 CLOCK
           SENS   ALGO        PLL     BAW
                                      DCO


                          Above-IC BAWs or
                          Ultra Miniature
                          Ultra-Miniature SIP
Massimo @ Tanner
M   i     T
EDA
Characteristics of MEMS Designs

      Innovative technology
         Differentiator
         May involve process / product codesign
         Often involves novel / custom packaging
      Multi disciplinary
      Multi-disciplinary design
      Unique                                 Switching Electrodes for
      Culture shift                          Heart Implants


Chip on a Pill Drug
Monitoring and Telemetry




Proteus Raisin - Ingestible IC
                                       Networked Lead Enabled by ChipSkin
                                                  Technology
MEMS “Market” is Highly Fragmented



Rapid Growth but
      Growth, but…
  Broad technology range, e.g.:
    - Bulk Si
    - S f
      Surface Si
    - CMOS-compatible MEMS
    - Non-Si MEMS
    - µfluidics
    - optics
    - Nanomaterials & quantum

  Process innovation is ongoing at a rapid pace
MEMSIC Souvenir Olympic Torch
MEMS CAD Tool Requirements



Flexible
Programmable
(User) Configurable
Data exchange / I
D        h        Interoperability
                            bili
Emerging: “DFM”
   Verification (DRC, “LVS”)
   Capture of physical process variability data
Where are we Going?



Will MEMS design follow the maturity curve of
microelectronics?
Will MEMS design become commoditized?
Steve @ Freescale
St      F      l
MEMS Market Drivers


MEMS: The 1st pillar of “Embedded System Control”
   Sense – Compute - Actuate
MEMS devices have proliferated in virtually every market
segment
MEMS now part of almost every major semiconductor
supplier
“Consumer” MEMS demand driven
 Consumer
by a new way of interacting with
object: Elimination of
complex user interfaces
 “Automotive” MEMS demand
driven by stringent safety
& emission legislation


                                                    S.Wainwright, Freescale
MEMS Market Size and Trends
                                                             The exponential units demand

                              MEMS revenues ($M)
         $9,000


         $7,500
                        CAGR09-13: +10.2%                                                    Historical revenues peaked
         $6,000                                                       Others
                                                                      Oth
                                                                                             in 2007
                                                                                             2008/09 revenue decline
                                                                      Industrial
         $4,500                                                       Data processing

         $3,000
                                                                      Automotive
                                                                      Consumer & Wireless
                                                                                             impacted by global
         $1,500
         $                                                                                   economic downturn
                                                                                                        downturn,
               $0
                                                                                             especially automotive
                     2007 2008 2009 2010 2011 2012 2013

                                                                                             MEMS units demand to
                      MEMS unit shipment (Munits)
         7,000
                      CAGR09-13: +20.7%
                                                                                             double between 2009 and
         6,000                                                         Others
                                                                       RF MEMS oscillators
                                                                                             2013 to more than 6 billion
         5,000
                                                                       Gyroscopes            units
         4,000                                                         Pressure sensors


         3,000
                                                                       MEMS sw itches
                                                                               i h
                                                                       Inkjet printheads
                                                                                             Consumer, wireless and
                                                                                             C           i l       d
         2,000
                                                                       BAW filters           automotive driving the
                                                                                             demand
                                                                       MEMS microphones

         1,000                                                         Accelerometers


               0
                    2007 2008        2009     2010 2011   2012 2013
Source: iSupply MEMS Market Tracker H1-2009



                                                                                                                 S.Wainwright, Freescale
Conclusion


    MEMS products evolving from standalone devices to
    “ubiquitous sensing solutions” – (SiP / SoC)

    MEMS technologies will enable:

       Proliferation of context awareness capabilities
          User interface revolution, human body monitoring,
          energy saving,
       Next generation of automotive safety applications
          Fusion
          F sion of accele omete s angular rate and other
                    accelerometers, ang la ate         othe
          sensor technologies (radar, vision) for predictive
          safety applications.


      Endless applications only limited by
      YOUR creativity

And by the way, Freescale passed the 1 billion MEMS units shipped!

                                                               S.Wainwright, Freescale
Panel
P    l
Discussion
$4.5B – 5B concentrated in 15 MEMS
                                  suppliers

                          1,000

                           900                                  Open     Captive   Foundry

                           800                            • 8” transition
                                                               t    iti
                           700                            • Silicon Foundry or IDM
    Millions of Dollars




                           600                            • Automotive SC Evolution
                           500                            • Future below $100M
                           400                            • Partnerships
                           300

                           200

                           100

                             0
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                                           Source: MEMS Competitive Landscape Tool, 2009, iSupply
Is 8” silicon Wafer the only profitable
                                path to future MEMS manufacturing?
                      STMicroelectronics, Freescale, Omron and
                        Texas Instruments are all using 8” Fab.


                    MEMS shipments breakout by wafer size




                                       8”
                                                            4
                                                            4''   6
                                                                  6''   8
                                                                        8''
%
             6”



             2008                     2013


            5YP 8” Wafer Evolution                           8” MEMS Wafer from STMicroelectonics

Source: Q1 2009 MEMS market tracker, iSupply
Silicon Fundry or IDM?


Some IDMs starts to externalize consumer MEMS to foundries
  ADI and others....
        d h
  CMOS foundries like bees around MEMS honey pot: TSMC, UMC,
  Tower/Jazz, Magnachip, Dongbu…

IDM to silicon Foundry is not straightforward:
  No Technology platform across the industry
  Closeness of Design and Technology team for yield improvement
  Need to reinvent the technology platform for decent pargin
  Silicon Foundry:Volumes appeal
  IDM:
  IDM MEMS Process IP protection
               P            t ti

When New Comer Silicon Foundry will pass $100M threshold?
In which field?
Till when automotive MEMS Captive
               Model will be alive?


First bloodletting in automotive
   Systron Donner Automotive closes
   S       D        A      i  l
   Infineon sells Sensonor



Efforts to leverage greater economies of scale
   Automotive MEMS suppliers expand in consumer: ADI, Bosch,
   Freescale…
   Freescale
   Consumer MEMS suppliers to expand into automotive:
   STMicroelectronics, ...
The threshold of $100M and the
                Partnership Model


Economic crisis accelerates transformation of the MEMS
industry
   Some companies with sales around $100M are failing, even
   being part of bigger corporation
   Consumer and mobile markets grow at 16.5% from 2008 2013
                                            16 5%        2008-2013
   and overtake automotive in 2010
   Commoditization of the market in favour of consumer MEMS
   suppliers which will start supplying to automotive in next 2
   years
   High volume MEMS foundry and CMOS foundries
   Headcount reduction at number of foundries and forced leave at
   number of IDM
The threshold of $100M and the
              Partnership Model


How MEMS start-ups can survive in this market? Is there
any chance for them to skyrocket like analog companies in
the past?

Which product family a start-up could address most
                       start up
probably?

Does an Analog Semiconductor Company need to have MEMS
                g                      p y
in its portfolio to sustain its growth?



Do you see partnerships happening on the horizon? Is it a
viable Model
Key Success Factors?


Skilled peopls with
Industrial experience




                        Close Partnerships & Cooperation
                                with Customers
MEMS accelerometer become #1
                                               market by 2013
                                                                             Source: Q1 2009 MEMS market tracker, iSupply
                         1,800                                                                     Military & Civil
                         1,600                                                                     Aerospace
                    rs




                                                                                                   Medical
Millions of US Dollar




                         1,400
                         1 400
                                                                                                   Electronics
                         1,200
                                                                                                    Industrial
                         1,000
                          800
       s




                                                                                                   Automotive
                          600
                          400                                                                      Mobile handsets
                          200                                                                      and CE
                            0
                                 2006   2007   2008   2009   2010   2011   2012   2013

                           Mobile and CE applications           Automotive market 2013
                           to overtake automotive in            =2007
                                                                  2007
                           2009                                     Airbag market shrinks
                               $1B in 2013                          Low-g accelerometers
                               Cell phone = automotive              growth with ESC
                               in 2013
                                  What’s the technology biggest technical challenge in
                                                 Accelerometer field?
What’s next?


                                                                                                 Other Emerging MEMS
                      9,000                                                                      Micro Fuel Cells
                                                                                                 Flow Sensors
                      8,000
                                                                                                 Thermopiles
                      7,000                                                                      Optical MEMS for Telecom
                                                                                                 Microfluidic Chips
Millions of Dollars
                  s




                      6,000
                                                                                                 RF MEMS Oscillators
                                                                                                 MEMS Sw itches
                      5,000
                                                                                                 BAW Filters
                      4,000                                                                      Microbolometers
                                                                                                 MEMS Microphones
                      3,000
                                                                                                 Optical MEMS for Displays

                      2,000                                                                      MEMS Wafer Probes
                                                                                                 Gyroscopes
                      1,000                                                                      Pressure Sensors
                                                                                                 Inkjet Print heads
                         0
                              2006   2007    2008   2009   2010   2011   2012     2013           Accelerometers

                                                                     Source: Q1 2009 MEMS market tracker, iSupply

                                            Sensors grow faster than Actuators
Smart Sensors Provide New Business
                   Opportunities?

                   MEMS
                                  RF




                                                     BUILDING




                       FACTORY 
                       FACTORY         LOGISTICS
                     AUTOMATION                    HEALTHCARE
SPORT & WELLNESS
The Smart Sensor Evolution

Smart Sensor Challenges




                                  Pr
                                   roprietary Sub 1GHz – 2.4 G
       MEMS
   ACCELEROMETER




                                      Blueto

                                         LOW POWER RADIO
      MEMS




                   CO
                   SM
    GYROSCOPE




                                            W
                    MART SIG
                    ONDITION




                                            y:
                                            ooth Low Energy
   MAGNETOMETER




                           GNAL
                           NING




                                                    R
       MEMS
     PRESSURE
      SENSOR




                                                             GHz
    TEMPERATURE
      SENSOR



    POWER MANAGEMENT
Thank you

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MEMS Panel - GSA &amp; IET Forum 2009

  • 1. MEMS: The New Dimension of the Advanced Analog World Moderator: Benedetto Vigna, Group Vice President & General Manager of MEMS & Sensors, Transceivers & Healthcare Division June 3, 13:45
  • 2. MEMS: The New Dimension of the Advanced Analog World Moderator Benedetto Vigna, Group Vice President & General M G l Manager of MEMS & S f Sensors Transceivers & T i Healthcare Division, STMicroelectronics Panel Volker Herbig, Manager Strategic Marketing, X-FAB Semiconductor Foundries AG David R ffi D id Ruffieux, E Expert RF & A l t Analog IC Design, Microelectronics, CSEM (Swiss D i Mi l t i (S i Center for Electronics & Microtechnology) Dr. Massimo Sivilotti, Chief Scientist, Tanner EDA Steve Wainwright, General Manager EMEA, Vice President Sales & Marketing, g , g , g, Freescale Semiconductor
  • 3. OUTLINE Introduction (20’) Discussion (40’) Q&A (10’)
  • 4. MEMS is no longer an Emerging Technology Mobile Phones PMP DSC Game Controllers PC/HDD PND Remote Controllers
  • 5. H EW LE Millions of Dollars TE TT XA S PA C 1,000 0 100 200 300 400 500 600 700 800 IN 900 ST K A R R R U D ST O M M BE E IC R NT R T O BO S EL E S CT CH R O N IC C AN S LE O N X SE M AR IK K O EP FR S AV EE ON S AG C O AL TE D E C EN S IN AN HN O O A LO FI LO N G G EO D IE N EV S (i n IC cl .S E en S Open FO so R M no r) FA CT O SE R N Captive PA SAT N A AS O N IC Almost $5B by 15 MEMS suppliers Foundry Source: MEMS Competitive Landscape Tool, 2009, iSupply
  • 6. Potentially high-volume, high-growth industry with a large customer base Other Emerging MEMS 9,000 Micro Fuel Cells Flow Sensors 8,000 Thermopiles 7,000 Optical MEMS for Telecom Microfluidic Chips Millions of Dollars s 6,000 RF MEMS Oscillators MEMS Sw itches 5,000 BAW Filters 4,000 Microbolometers MEMS Microphones 3,000 Optical MEMS for Displays 2,000 MEMS Wafer Probes Gyroscopes 1,000 Pressure Sensors Inkjet Print heads 0 2006 2007 2008 2009 2010 2011 2012 2013 Accelerometers Source: Q1 2009 MEMS market tracker, iSupply Sensors grow faster than Actuators
  • 7. MEMS Accelerometers and Gyroscopes MEMS Motion Sensors* Market MEMS Motion Sensors* Market for CE and Mobile Phones US$M 2008-2013 US$M 10.1% CAGR 1,800 , 1200 1600 1,600 1400 1000 1,400 1200 Millions of units 1% 1,200 CAGR 9.8% CAGR 800 1000 1,000 1 000 600 800 800 7% 600 600 CAGR 400 19% CAGR 400 400 16% 200 200 200 CAGR 0 0 0 2008 2013 2008 2013 2006 2007 2008 2009 2010 2011 2012 2013 Accelerometers Gyroscopes Accelero revenue Gyro revenue Cell phones and CE Automotive Others Accelero Units Gyro Units * MEMS Accelerometers & Gyroscopes Automotive Market is larger than Consumer Market but Consumer Market has higher CAGR Source – iSuppli, Q1 2009
  • 8. Very soon 1 BUnits will be in the consumer market Accelerometers and Gyroscopes 35 mm2 25 mm2 20 mm2 15 mm2 < 9 mm2
  • 9. Moore? Who is he? MEMS means Micro Electro Mechanical Systems … taking advantage of the mechanical AND electrical properties of silicon Two key elements: Micron-sized Transducer realized through a specific process called Micro-Machining An Advanced Analog Chip with embedded smart functionalities and a lot of libraries and dedicated IPs + = No common technology platform across the industry
  • 10. STMicroelectronics point of view MEMS is a long term committment Some MEMS product families are foundamental to excel in Advanced Analog World Reason of ST Leadership in MEMS Consumer Market as per iSupply Dec 2008: Management of entire supply chain Closeness of technology and Design gy g Leading products (look at latest born LIS331DLH) Blend of State of the art 8” Manufacturing and Product Innovation Quality f Service Q lit of S i Nimble team ….Trust of the customers
  • 11. Volker V lk @ XFab XF b
  • 12. MEMS Market for Foundries MEMS devices are ubiquitous Automotive - TPMS ESP Navigation TPMS, ESP, Consumer - MEMS Microphones, Game Controllers, … - Inkjet (captive) - DLP (captive) High-volume consumer applications g pp in addition to Inkjet are starting to drive MEMS market growth The MEMS market is significant 6B USD in 2009 but small in comparison to the SC market The MEMS market is and will be served by foundries
  • 13. Challenges for MEMS foundries MEMS technology enables new sensors and actuators beyond CMOS MEMS technologies are the logical extension of the current CMOS-based analog/mixed-signal processes MEMS technology enables sensors to transform analog pressure and inertial signals in electrical signals Current Challenges Technology - N standards (1 product = 1 process) No t d d d t ) - CMOS compatibility issues Business Model - Many small volume apps - Silicon content - SOC vs. SIP
  • 14. Trends in the MEMS foundries space Fabless analog-mixed/signal companies are entering the MEMS market to compete with the analog-mixed/signal IDMs in high-volume applications such as TPMS, gyro or MEMS microphone Emphasis on CMOS compatibility to achieve synergies with high-volume CMOS production Integration of 0.35 µm CMOS with MEMS 6 6” to 8 transition for high-volume production to ensure 8” high volume cost competiveness
  • 15. MEMS FOR NEW VERSATILE TIMING AND SHORT RANGE WIRELESS CONNECTIVITY SOLUTIONS David D id @ CSEM
  • 16. Quartz XTALs vs Silicon MEMS Quartz XTALs Silicon MEMS Null 1st, 2nd order TCFs Large thermal drift ! by proper rotation Electro-static actuation Piezoelectric material or piezo thin film p Low cost process but Synergies with ICs Small substrates (1.5’’) Similar processes Old technologies (wet) t h l i ( t) Large substrates L b t t Expensive packaging Wafer scale packaging Metal cans or ceramic Single device for any 1 frequency, 1 device frequency by electronic Individual trimming Miniature & lower cost
  • 17. Low power SiRes compensation scheme Temperature Thermal Comp. Calibration  No PLL but Sensor State Machine Data Fractional d l div. 32768Hz ÷M,M+1  Freq. Interp. modulator 32Hz 3µA @ 1V ÷1024  ÷1024 Qi>S DC=S/1024 df/dT≈‐30ppm/°C pp ∆fHL uency dc=100% dc=0% ÷N-1 Frequ ÷N ÷N+1 fCOMP Temperature
  • 18. Low-Cost Packaging with Sn-Au CAP plated MEMS chip stacked with Sn-Au above IC die (dummy or IC wafer) Assembly cross-sect. after reflow ft fl AlN-driven resonator with back cap & UBM
  • 19. Generation of Any Clock Frequency and High Performance Transceiver with MEMS BAW COMBINE LNA BB RF BAWs ULP RTC LF SiRes RX DATA Mode PA RF CMOS & CLK ÷N C CHANNEL SiRes SiR SELECT Ultra fast ÷P RTC wake-up TX DATA ÷Q PROG SYS TEMP COMP AD CLOCK SENS ALGO PLL BAW DCO Above-IC BAWs or Ultra Miniature Ultra-Miniature SIP
  • 21. Characteristics of MEMS Designs Innovative technology Differentiator May involve process / product codesign Often involves novel / custom packaging Multi disciplinary Multi-disciplinary design Unique Switching Electrodes for Culture shift Heart Implants Chip on a Pill Drug Monitoring and Telemetry Proteus Raisin - Ingestible IC Networked Lead Enabled by ChipSkin Technology
  • 22. MEMS “Market” is Highly Fragmented Rapid Growth but Growth, but… Broad technology range, e.g.: - Bulk Si - S f Surface Si - CMOS-compatible MEMS - Non-Si MEMS - µfluidics - optics - Nanomaterials & quantum Process innovation is ongoing at a rapid pace
  • 24. MEMS CAD Tool Requirements Flexible Programmable (User) Configurable Data exchange / I D h Interoperability bili Emerging: “DFM” Verification (DRC, “LVS”) Capture of physical process variability data
  • 25. Where are we Going? Will MEMS design follow the maturity curve of microelectronics? Will MEMS design become commoditized?
  • 27. MEMS Market Drivers MEMS: The 1st pillar of “Embedded System Control” Sense – Compute - Actuate MEMS devices have proliferated in virtually every market segment MEMS now part of almost every major semiconductor supplier “Consumer” MEMS demand driven Consumer by a new way of interacting with object: Elimination of complex user interfaces “Automotive” MEMS demand driven by stringent safety & emission legislation S.Wainwright, Freescale
  • 28. MEMS Market Size and Trends The exponential units demand MEMS revenues ($M) $9,000 $7,500 CAGR09-13: +10.2% Historical revenues peaked $6,000 Others Oth in 2007 2008/09 revenue decline Industrial $4,500 Data processing $3,000 Automotive Consumer & Wireless impacted by global $1,500 $ economic downturn downturn, $0 especially automotive 2007 2008 2009 2010 2011 2012 2013 MEMS units demand to MEMS unit shipment (Munits) 7,000 CAGR09-13: +20.7% double between 2009 and 6,000 Others RF MEMS oscillators 2013 to more than 6 billion 5,000 Gyroscopes units 4,000 Pressure sensors 3,000 MEMS sw itches i h Inkjet printheads Consumer, wireless and C i l d 2,000 BAW filters automotive driving the demand MEMS microphones 1,000 Accelerometers 0 2007 2008 2009 2010 2011 2012 2013 Source: iSupply MEMS Market Tracker H1-2009 S.Wainwright, Freescale
  • 29. Conclusion MEMS products evolving from standalone devices to “ubiquitous sensing solutions” – (SiP / SoC) MEMS technologies will enable: Proliferation of context awareness capabilities User interface revolution, human body monitoring, energy saving, Next generation of automotive safety applications Fusion F sion of accele omete s angular rate and other accelerometers, ang la ate othe sensor technologies (radar, vision) for predictive safety applications. Endless applications only limited by YOUR creativity And by the way, Freescale passed the 1 billion MEMS units shipped! S.Wainwright, Freescale
  • 30. Panel P l Discussion
  • 31. $4.5B – 5B concentrated in 15 MEMS suppliers 1,000 900 Open Captive Foundry 800 • 8” transition t iti 700 • Silicon Foundry or IDM Millions of Dollars 600 • Automotive SC Evolution 500 • Future below $100M 400 • Partnerships 300 200 100 0 AN S BO S D EV S CT CH IC EE ON r) E R en S O IC NT K A LE O N IE R no AL E O N AR S PA SAT N ST K A S IC S G E CT O EN so C O EP LO M M R C S AS FA N D U X PA C O O T D SE R .S N M R AN HN IK E FR G cl TT R BE EL SE LO (i n FO IN C LE O O TE A N S R R EW EO XA IC O AG M H TE N ST FI AV IN Source: MEMS Competitive Landscape Tool, 2009, iSupply
  • 32. Is 8” silicon Wafer the only profitable path to future MEMS manufacturing? STMicroelectronics, Freescale, Omron and Texas Instruments are all using 8” Fab. MEMS shipments breakout by wafer size 8” 4 4'' 6 6'' 8 8'' % 6” 2008 2013 5YP 8” Wafer Evolution 8” MEMS Wafer from STMicroelectonics Source: Q1 2009 MEMS market tracker, iSupply
  • 33. Silicon Fundry or IDM? Some IDMs starts to externalize consumer MEMS to foundries ADI and others.... d h CMOS foundries like bees around MEMS honey pot: TSMC, UMC, Tower/Jazz, Magnachip, Dongbu… IDM to silicon Foundry is not straightforward: No Technology platform across the industry Closeness of Design and Technology team for yield improvement Need to reinvent the technology platform for decent pargin Silicon Foundry:Volumes appeal IDM: IDM MEMS Process IP protection P t ti When New Comer Silicon Foundry will pass $100M threshold? In which field?
  • 34. Till when automotive MEMS Captive Model will be alive? First bloodletting in automotive Systron Donner Automotive closes S D A i l Infineon sells Sensonor Efforts to leverage greater economies of scale Automotive MEMS suppliers expand in consumer: ADI, Bosch, Freescale… Freescale Consumer MEMS suppliers to expand into automotive: STMicroelectronics, ...
  • 35. The threshold of $100M and the Partnership Model Economic crisis accelerates transformation of the MEMS industry Some companies with sales around $100M are failing, even being part of bigger corporation Consumer and mobile markets grow at 16.5% from 2008 2013 16 5% 2008-2013 and overtake automotive in 2010 Commoditization of the market in favour of consumer MEMS suppliers which will start supplying to automotive in next 2 years High volume MEMS foundry and CMOS foundries Headcount reduction at number of foundries and forced leave at number of IDM
  • 36. The threshold of $100M and the Partnership Model How MEMS start-ups can survive in this market? Is there any chance for them to skyrocket like analog companies in the past? Which product family a start-up could address most start up probably? Does an Analog Semiconductor Company need to have MEMS g p y in its portfolio to sustain its growth? Do you see partnerships happening on the horizon? Is it a viable Model
  • 37. Key Success Factors? Skilled peopls with Industrial experience Close Partnerships & Cooperation with Customers
  • 38. MEMS accelerometer become #1 market by 2013 Source: Q1 2009 MEMS market tracker, iSupply 1,800 Military & Civil 1,600 Aerospace rs Medical Millions of US Dollar 1,400 1 400 Electronics 1,200 Industrial 1,000 800 s Automotive 600 400 Mobile handsets 200 and CE 0 2006 2007 2008 2009 2010 2011 2012 2013 Mobile and CE applications Automotive market 2013 to overtake automotive in =2007 2007 2009 Airbag market shrinks $1B in 2013 Low-g accelerometers Cell phone = automotive growth with ESC in 2013 What’s the technology biggest technical challenge in Accelerometer field?
  • 39. What’s next? Other Emerging MEMS 9,000 Micro Fuel Cells Flow Sensors 8,000 Thermopiles 7,000 Optical MEMS for Telecom Microfluidic Chips Millions of Dollars s 6,000 RF MEMS Oscillators MEMS Sw itches 5,000 BAW Filters 4,000 Microbolometers MEMS Microphones 3,000 Optical MEMS for Displays 2,000 MEMS Wafer Probes Gyroscopes 1,000 Pressure Sensors Inkjet Print heads 0 2006 2007 2008 2009 2010 2011 2012 2013 Accelerometers Source: Q1 2009 MEMS market tracker, iSupply Sensors grow faster than Actuators
  • 40. Smart Sensors Provide New Business Opportunities? MEMS RF BUILDING FACTORY  FACTORY LOGISTICS AUTOMATION HEALTHCARE SPORT & WELLNESS
  • 41. The Smart Sensor Evolution Smart Sensor Challenges Pr roprietary Sub 1GHz – 2.4 G MEMS ACCELEROMETER Blueto LOW POWER RADIO MEMS CO SM GYROSCOPE W MART SIG ONDITION y: ooth Low Energy MAGNETOMETER GNAL NING R MEMS PRESSURE SENSOR GHz TEMPERATURE SENSOR POWER MANAGEMENT