1. MEMS: The New Dimension of the
Advanced Analog World
Moderator: Benedetto Vigna, Group Vice President &
General Manager of MEMS & Sensors, Transceivers & Healthcare Division
June 3, 13:45
2. MEMS: The New Dimension of the
Advanced Analog World
Moderator
Benedetto Vigna, Group Vice President &
General M
G l Manager of MEMS & S
f Sensors Transceivers &
T i
Healthcare Division, STMicroelectronics
Panel
Volker Herbig, Manager Strategic Marketing,
X-FAB Semiconductor Foundries AG
David R ffi
D id Ruffieux, E Expert RF & A l
t Analog IC Design, Microelectronics, CSEM (Swiss
D i Mi l t i (S i
Center for Electronics & Microtechnology)
Dr. Massimo Sivilotti, Chief Scientist, Tanner EDA
Steve Wainwright, General Manager EMEA, Vice President Sales & Marketing,
g , g , g,
Freescale Semiconductor
4. MEMS is no longer an Emerging
Technology
Mobile
Phones
PMP
DSC
Game
Controllers PC/HDD
PND
Remote
Controllers
5. H
EW
LE Millions of Dollars
TE TT
XA
S PA
C
1,000
0
100
200
300
400
500
600
700
800
IN 900
ST K A
R R
R U D
ST O M
M BE E
IC R NT
R T
O BO S
EL
E S
CT CH
R
O
N
IC
C
AN S
LE O N
X
SE M
AR
IK K
O
EP
FR S
AV EE ON
S
AG C
O AL
TE D E
C EN
S
IN
AN HN
O O
A LO
FI LO
N G G
EO
D IE
N EV S
(i n IC
cl
.S E
en S
Open
FO so
R
M no
r)
FA
CT
O
SE R
N
Captive
PA SAT
N A
AS
O
N
IC
Almost $5B by 15 MEMS suppliers
Foundry
Source: MEMS Competitive Landscape Tool, 2009, iSupply
6. Potentially high-volume, high-growth
industry with a large customer base
Other Emerging MEMS
9,000 Micro Fuel Cells
Flow Sensors
8,000
Thermopiles
7,000 Optical MEMS for Telecom
Microfluidic Chips
Millions of Dollars
s
6,000
RF MEMS Oscillators
MEMS Sw itches
5,000
BAW Filters
4,000 Microbolometers
MEMS Microphones
3,000
Optical MEMS for Displays
2,000 MEMS Wafer Probes
Gyroscopes
1,000 Pressure Sensors
Inkjet Print heads
0
2006 2007 2008 2009 2010 2011 2012 2013 Accelerometers
Source: Q1 2009 MEMS market tracker, iSupply
Sensors grow faster than Actuators
7. MEMS Accelerometers and
Gyroscopes
MEMS Motion Sensors* Market
MEMS Motion Sensors* Market for CE and Mobile Phones
US$M 2008-2013
US$M
10.1% CAGR
1,800
, 1200 1600
1,600 1400
1000
1,400 1200
Millions of units
1%
1,200 CAGR
9.8% CAGR 800
1000
1,000
1 000
600 800
800 7%
600
600 CAGR 400
19%
CAGR 400
400
16% 200
200
200 CAGR
0 0
0
2008 2013 2008 2013 2006 2007 2008 2009 2010 2011 2012 2013
Accelerometers Gyroscopes
Accelero revenue Gyro revenue
Cell phones and CE Automotive Others Accelero Units Gyro Units
* MEMS Accelerometers & Gyroscopes
Automotive Market is larger than Consumer Market but
Consumer Market has higher CAGR
Source – iSuppli, Q1 2009
8. Very soon 1 BUnits will be in the
consumer market
Accelerometers and Gyroscopes
35 mm2
25 mm2 20 mm2 15 mm2 < 9 mm2
9. Moore? Who is he?
MEMS means Micro Electro Mechanical Systems … taking advantage of the
mechanical AND electrical properties of silicon
Two key elements:
Micron-sized Transducer realized through a specific process
called Micro-Machining
An Advanced Analog Chip with embedded smart functionalities
and a lot of libraries and dedicated IPs
+ =
No common technology platform across the industry
10. STMicroelectronics point of view
MEMS is a long term committment
Some MEMS product families are foundamental to excel in
Advanced Analog World
Reason of ST Leadership in MEMS Consumer Market as per
iSupply Dec 2008:
Management of entire supply chain
Closeness of technology and Design
gy g
Leading products (look at latest born LIS331DLH)
Blend of State of the art 8” Manufacturing and Product
Innovation
Quality f Service
Q lit of S i
Nimble team
….Trust of the customers
12. MEMS Market for Foundries
MEMS devices are ubiquitous
Automotive
- TPMS ESP Navigation
TPMS, ESP,
Consumer
- MEMS Microphones, Game Controllers, …
- Inkjet (captive)
- DLP (captive)
High-volume consumer applications
g pp
in addition to Inkjet are starting to drive
MEMS market growth
The MEMS market is significant
6B USD in 2009 but small in comparison to the SC market
The MEMS market is and will be served by foundries
13. Challenges for MEMS foundries
MEMS technology enables new sensors and actuators beyond
CMOS
MEMS technologies are the logical extension of the current
CMOS-based analog/mixed-signal processes
MEMS technology enables sensors to transform analog
pressure and inertial signals in electrical signals
Current Challenges
Technology
- N standards (1 product = 1 process)
No t d d d t )
- CMOS compatibility issues
Business Model
- Many small volume apps
- Silicon content
- SOC vs. SIP
14. Trends in the MEMS foundries space
Fabless analog-mixed/signal companies are entering the
MEMS market to compete with the analog-mixed/signal
IDMs in high-volume applications such as TPMS, gyro or
MEMS microphone
Emphasis on CMOS compatibility to achieve synergies
with high-volume CMOS production
Integration of 0.35 µm CMOS with MEMS
6
6” to 8 transition for high-volume production to ensure
8” high volume
cost competiveness
15. MEMS FOR NEW VERSATILE TIMING AND SHORT
RANGE WIRELESS CONNECTIVITY SOLUTIONS
David
D id @ CSEM
16. Quartz XTALs vs Silicon MEMS
Quartz XTALs Silicon MEMS
Null 1st, 2nd order TCFs Large thermal drift !
by proper rotation Electro-static actuation
Piezoelectric material or piezo thin film
p
Low cost process but Synergies with ICs
Small substrates (1.5’’) Similar processes
Old technologies (wet)
t h l i ( t) Large substrates
L b t t
Expensive packaging Wafer scale packaging
Metal cans or ceramic Single device for any
1 frequency, 1 device frequency by electronic
Individual trimming Miniature & lower cost
17. Low power SiRes compensation scheme
Temperature Thermal Comp. Calibration
No PLL but Sensor State Machine Data
Fractional d
l div. 32768Hz
÷M,M+1
Freq. Interp. modulator
32Hz
3µA @ 1V ÷1024
÷1024
Qi>S
DC=S/1024
df/dT≈‐30ppm/°C
pp
∆fHL
uency
dc=100% dc=0%
÷N-1
Frequ
÷N
÷N+1
fCOMP
Temperature
18. Low-Cost Packaging with Sn-Au
CAP plated MEMS chip stacked
with Sn-Au above IC die
(dummy or
IC wafer)
Assembly
cross-sect.
after reflow
ft fl
AlN-driven
resonator
with back
cap & UBM
19. Generation of Any Clock Frequency and
High Performance Transceiver with MEMS
BAW
COMBINE
LNA BB
RF BAWs ULP RTC
LF SiRes RX DATA Mode
PA
RF CMOS & CLK
÷N C
CHANNEL
SiRes
SiR
SELECT
Ultra fast
÷P RTC wake-up
TX DATA
÷Q PROG SYS
TEMP COMP AD CLOCK
SENS ALGO PLL BAW
DCO
Above-IC BAWs or
Ultra Miniature
Ultra-Miniature SIP
21. Characteristics of MEMS Designs
Innovative technology
Differentiator
May involve process / product codesign
Often involves novel / custom packaging
Multi disciplinary
Multi-disciplinary design
Unique Switching Electrodes for
Culture shift Heart Implants
Chip on a Pill Drug
Monitoring and Telemetry
Proteus Raisin - Ingestible IC
Networked Lead Enabled by ChipSkin
Technology
22. MEMS “Market” is Highly Fragmented
Rapid Growth but
Growth, but…
Broad technology range, e.g.:
- Bulk Si
- S f
Surface Si
- CMOS-compatible MEMS
- Non-Si MEMS
- µfluidics
- optics
- Nanomaterials & quantum
Process innovation is ongoing at a rapid pace
24. MEMS CAD Tool Requirements
Flexible
Programmable
(User) Configurable
Data exchange / I
D h Interoperability
bili
Emerging: “DFM”
Verification (DRC, “LVS”)
Capture of physical process variability data
25. Where are we Going?
Will MEMS design follow the maturity curve of
microelectronics?
Will MEMS design become commoditized?
27. MEMS Market Drivers
MEMS: The 1st pillar of “Embedded System Control”
Sense – Compute - Actuate
MEMS devices have proliferated in virtually every market
segment
MEMS now part of almost every major semiconductor
supplier
“Consumer” MEMS demand driven
Consumer
by a new way of interacting with
object: Elimination of
complex user interfaces
“Automotive” MEMS demand
driven by stringent safety
& emission legislation
S.Wainwright, Freescale
28. MEMS Market Size and Trends
The exponential units demand
MEMS revenues ($M)
$9,000
$7,500
CAGR09-13: +10.2% Historical revenues peaked
$6,000 Others
Oth
in 2007
2008/09 revenue decline
Industrial
$4,500 Data processing
$3,000
Automotive
Consumer & Wireless
impacted by global
$1,500
$ economic downturn
downturn,
$0
especially automotive
2007 2008 2009 2010 2011 2012 2013
MEMS units demand to
MEMS unit shipment (Munits)
7,000
CAGR09-13: +20.7%
double between 2009 and
6,000 Others
RF MEMS oscillators
2013 to more than 6 billion
5,000
Gyroscopes units
4,000 Pressure sensors
3,000
MEMS sw itches
i h
Inkjet printheads
Consumer, wireless and
C i l d
2,000
BAW filters automotive driving the
demand
MEMS microphones
1,000 Accelerometers
0
2007 2008 2009 2010 2011 2012 2013
Source: iSupply MEMS Market Tracker H1-2009
S.Wainwright, Freescale
29. Conclusion
MEMS products evolving from standalone devices to
“ubiquitous sensing solutions” – (SiP / SoC)
MEMS technologies will enable:
Proliferation of context awareness capabilities
User interface revolution, human body monitoring,
energy saving,
Next generation of automotive safety applications
Fusion
F sion of accele omete s angular rate and other
accelerometers, ang la ate othe
sensor technologies (radar, vision) for predictive
safety applications.
Endless applications only limited by
YOUR creativity
And by the way, Freescale passed the 1 billion MEMS units shipped!
S.Wainwright, Freescale
31. $4.5B – 5B concentrated in 15 MEMS
suppliers
1,000
900 Open Captive Foundry
800 • 8” transition
t iti
700 • Silicon Foundry or IDM
Millions of Dollars
600 • Automotive SC Evolution
500 • Future below $100M
400 • Partnerships
300
200
100
0
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EW
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XA
IC
O
AG
M
H
TE
N
ST
FI
AV
IN
Source: MEMS Competitive Landscape Tool, 2009, iSupply
32. Is 8” silicon Wafer the only profitable
path to future MEMS manufacturing?
STMicroelectronics, Freescale, Omron and
Texas Instruments are all using 8” Fab.
MEMS shipments breakout by wafer size
8”
4
4'' 6
6'' 8
8''
%
6”
2008 2013
5YP 8” Wafer Evolution 8” MEMS Wafer from STMicroelectonics
Source: Q1 2009 MEMS market tracker, iSupply
33. Silicon Fundry or IDM?
Some IDMs starts to externalize consumer MEMS to foundries
ADI and others....
d h
CMOS foundries like bees around MEMS honey pot: TSMC, UMC,
Tower/Jazz, Magnachip, Dongbu…
IDM to silicon Foundry is not straightforward:
No Technology platform across the industry
Closeness of Design and Technology team for yield improvement
Need to reinvent the technology platform for decent pargin
Silicon Foundry:Volumes appeal
IDM:
IDM MEMS Process IP protection
P t ti
When New Comer Silicon Foundry will pass $100M threshold?
In which field?
34. Till when automotive MEMS Captive
Model will be alive?
First bloodletting in automotive
Systron Donner Automotive closes
S D A i l
Infineon sells Sensonor
Efforts to leverage greater economies of scale
Automotive MEMS suppliers expand in consumer: ADI, Bosch,
Freescale…
Freescale
Consumer MEMS suppliers to expand into automotive:
STMicroelectronics, ...
35. The threshold of $100M and the
Partnership Model
Economic crisis accelerates transformation of the MEMS
industry
Some companies with sales around $100M are failing, even
being part of bigger corporation
Consumer and mobile markets grow at 16.5% from 2008 2013
16 5% 2008-2013
and overtake automotive in 2010
Commoditization of the market in favour of consumer MEMS
suppliers which will start supplying to automotive in next 2
years
High volume MEMS foundry and CMOS foundries
Headcount reduction at number of foundries and forced leave at
number of IDM
36. The threshold of $100M and the
Partnership Model
How MEMS start-ups can survive in this market? Is there
any chance for them to skyrocket like analog companies in
the past?
Which product family a start-up could address most
start up
probably?
Does an Analog Semiconductor Company need to have MEMS
g p y
in its portfolio to sustain its growth?
Do you see partnerships happening on the horizon? Is it a
viable Model
38. MEMS accelerometer become #1
market by 2013
Source: Q1 2009 MEMS market tracker, iSupply
1,800 Military & Civil
1,600 Aerospace
rs
Medical
Millions of US Dollar
1,400
1 400
Electronics
1,200
Industrial
1,000
800
s
Automotive
600
400 Mobile handsets
200 and CE
0
2006 2007 2008 2009 2010 2011 2012 2013
Mobile and CE applications Automotive market 2013
to overtake automotive in =2007
2007
2009 Airbag market shrinks
$1B in 2013 Low-g accelerometers
Cell phone = automotive growth with ESC
in 2013
What’s the technology biggest technical challenge in
Accelerometer field?
40. Smart Sensors Provide New Business
Opportunities?
MEMS
RF
BUILDING
FACTORY
FACTORY LOGISTICS
AUTOMATION HEALTHCARE
SPORT & WELLNESS
41. The Smart Sensor Evolution
Smart Sensor Challenges
Pr
roprietary Sub 1GHz – 2.4 G
MEMS
ACCELEROMETER
Blueto
LOW POWER RADIO
MEMS
CO
SM
GYROSCOPE
W
MART SIG
ONDITION
y:
ooth Low Energy
MAGNETOMETER
GNAL
NING
R
MEMS
PRESSURE
SENSOR
GHz
TEMPERATURE
SENSOR
POWER MANAGEMENT