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Ryan Kim

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Very Important Characterization tool !
What is

Scanning Electron Microscopy

카이스트 신소재 공학과 09학번 김홍경

?

Pop Quiz !
1. Color

3 . Contamination
Dark image (SE ↓)
Resolution↓
X-ray absorption

2. Sample Coating
Prevention of charge-up by sampling
Sputter coating with C, Cr, or Au-Pd
N2 Blowing
Carbon tape, carbon paint, In foil
Vacuum status of the chamber
Hydrocarbon, pump, O-ring oil

Light Optical Microscope
Low Resolution ~0.2 um
4x -1000x
Small Depth of Field

Scanning Electron Microscope
High Resolution 1~10 nm
10x – 3000000x
Large Depth of Field

Scanning Electron Microscopy
A scanning electron microscope (SEM) is a type of electron
microscope that produces images with a focused beam of
electrons.
The electrons interact with electrons in the sample
Incoming electrons
Auger electrons
Secondary electrons
(이차전자)

Backscattered
electrons

Cathodoluminescence (light)

X-rays

Sample

How an Electron Beam is Produced?

Electron Gun Properties
Source
W
LaB6
C-FEG
T-FEG

Brightness
3X105
3x106
109
109

Stability(%)
~1
~2
~5
<1

Size
50mm
5mm
5nm
20nm

Energy spread
3.0(eV)
1.5
0.3
0.7

Vacuum
10-5 Torr
10-6
10-10
10-9

Main Informations
BaTiO3

5m

SE image

BSE image from flat surface of an Al
(Z=13) and Cu (Z=29) alloy

 Topography The surface features of an object and its texture.
 Morphology The shape and size of the particles making up the object
 Composition The elements and compounds that the object is composed of and the
relative amounts of them
 Topography How the grains are arranged in the object

Important SEM Controls
1. Accelerating Voltage (kV) 가속전압 ↑
High resolution
Unclear surface structure
More edge effect
More charge-up
More damage

2. Probe Current 접속렌즈 세기 ↑
Condenser Lens (C1) current ↑⇒ 𝑑 𝑝 ↓, 𝑖 𝑝 ↓
Smooth image
Deteriorated resolution
More damage

3. Aperture Size 대물 조리개 크기↑
Controls 𝛼, 전자빔의 수렴각 조절
Large current (BEI, X-ray analysis)
Low resolution
Smaller depth of field

4. Working Distance 시편 z-축 조절↑
Greater depth of field
Low resolution

Spot size ↓, Beam angle ↓ , Beam Current ↑
⇒ Trade-off exists!

Summary
1. Electron beam parameters
𝛼 𝑝 : Probe convergence angle
𝑖 𝑝 : Probe current
𝑑 𝑝 : Probe diameter
3. Signal detection &
Image formation
Detector system
Pixel vs. Magnification
Image contrast (topo, compo)

2. Specimen-beam interaction
𝑉𝑖𝑛𝑡 : Interaction volume
𝑅 𝐾−𝑂 : e – Range
Signals : SE, BSE, X-ray
0. Sample preparation

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Sem

1. Very Important Characterization tool ! What is Scanning Electron Microscopy 카이스트 신소재 공학과 09학번 김홍경 ?

2. Pop Quiz ! 1. Color 3 . Contamination Dark image (SE ↓) Resolution↓ X-ray absorption 2. Sample Coating Prevention of charge-up by sampling Sputter coating with C, Cr, or Au-Pd N2 Blowing Carbon tape, carbon paint, In foil Vacuum status of the chamber Hydrocarbon, pump, O-ring oil

3. Light Optical Microscope Low Resolution ~0.2 um 4x -1000x Small Depth of Field Scanning Electron Microscope High Resolution 1~10 nm 10x – 3000000x Large Depth of Field

4. Scanning Electron Microscopy A scanning electron microscope (SEM) is a type of electron microscope that produces images with a focused beam of electrons. The electrons interact with electrons in the sample Incoming electrons Auger electrons Secondary electrons (이차전자) Backscattered electrons Cathodoluminescence (light) X-rays Sample

5. How an Electron Beam is Produced? Electron Gun Properties Source W LaB6 C-FEG T-FEG Brightness 3X105 3x106 109 109 Stability(%) ~1 ~2 ~5 <1 Size 50mm 5mm 5nm 20nm Energy spread 3.0(eV) 1.5 0.3 0.7 Vacuum 10-5 Torr 10-6 10-10 10-9

6. Main Informations BaTiO3 5m SE image BSE image from flat surface of an Al (Z=13) and Cu (Z=29) alloy  Topography The surface features of an object and its texture.  Morphology The shape and size of the particles making up the object  Composition The elements and compounds that the object is composed of and the relative amounts of them  Topography How the grains are arranged in the object

7. Important SEM Controls 1. Accelerating Voltage (kV) 가속전압 ↑ High resolution Unclear surface structure More edge effect More charge-up More damage 2. Probe Current 접속렌즈 세기 ↑ Condenser Lens (C1) current ↑⇒ 𝑑 𝑝 ↓, 𝑖 𝑝 ↓ Smooth image Deteriorated resolution More damage 3. Aperture Size 대물 조리개 크기↑ Controls 𝛼, 전자빔의 수렴각 조절 Large current (BEI, X-ray analysis) Low resolution Smaller depth of field 4. Working Distance 시편 z-축 조절↑ Greater depth of field Low resolution Spot size ↓, Beam angle ↓ , Beam Current ↑ ⇒ Trade-off exists!

8. Summary 1. Electron beam parameters 𝛼 𝑝 : Probe convergence angle 𝑖 𝑝 : Probe current 𝑑 𝑝 : Probe diameter 3. Signal detection & Image formation Detector system Pixel vs. Magnification Image contrast (topo, compo) 2. Specimen-beam interaction 𝑉𝑖𝑛𝑡 : Interaction volume 𝑅 𝐾−𝑂 : e – Range Signals : SE, BSE, X-ray 0. Sample preparation

Sem

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