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PMR-LARN – Department of Physics

University of Namur
Watching the Lab’s video

Prof. Guy Terwagne
Director
Lab’Insight « event » Brussels, 21st November 2013

Brussels – 21st November 2013

1
Applied research projects
Research
axis

Research
domains
Medical Physics

Material
sciences

Ion/Matter
interactions

Life
Science

Surface and
interface

Nuclear
Spectroscopy

Astrophysics

Tools

Clients

Plasma Assisted
deposition
(RF,AC, DC)

Industry

Particles
accelerator (2 MV)
Ion Implantor
(150 kV)
Particles detectors
-rays or X-rays
detectors
Simulations
Brussels – 21st November 2013

Hospital

University
Research
center
Students
2
Fields of expertise and industrial
targets
Ion Beam analysis techniques
• Quantitative analysis of elements in nano-materials
• Nuclear techniques (NRA, PIGE, PIXE, RBS, ERDA,…)
• non-destructive
• sensitivity (ppm)
• Depth profiling of elements (RNRA)
• surface and interface

Ion Implantation
• Modification of materials properties (IBMM)
• All species from Mendeleiev periodic table
• Implantation energies between 10keV6 MeV

Plasma assisted deposition techniques
• DC, RF,…

Brussels – 21st November 2013

3
Fields of expertise and industrial
targets
Development of 3rd generation of solar cells
• synthetized by ion implantation (Si and Ge) and annealing
• nc-Si and nc-Ge

• High efficiency (>30 %)
• based on Multiple Exiton Generation (MEG)

• Thin solar cells (30 µm)
• Flexible

DLC coatings for automotive industry
• Plasma reactive coatings
• Hard coatings

Brussels – 21st November 2013

4
ALATAÏS
Ion Beam analysis facility for research, teaching an industry

Brussels – 21st November 2013

5
Tools available at LARN
Tandetron accelerator (2 MV) equipped
• Duoplasmotron source (1H, 2D, 3He, 4He)
• SNICs source (all negative ions)
• acceleration of near all species from Mendeleev periodic Table

5 equipped beam lines
•
•
•
•
•

All purpose (RBS, ERDA, NRA, PIXE/PIGE,…)
Cells irradiation
Ion Implantation
UHV and low background detection system
Particles detection chamber

Brussels – 21st November 2013

6
Tools available at LARN
Ion Implanter
• Low energy: 5-35keV
• Ion implanter SAMES: 20-150 kV

Detectors
•
•
•
•

High efficiency (132%) HPGe detector
PIPS particles detectors
High resolution LEGe detector
Plastic scintillators

Deposition chambers and characterization
• Plasma deposition chambers
• Dektak and Pin on disc system
• Oven up to 1700°C for 3" wafers

Brussels – 21st November 2013

7
Services provided to companies
Depth profiling of ligth elements at interface
→ Na profiling at the interface (RNRA, RBS,…)
→ SnO2(F)/Glass
→ RNRA : Na depth profiling
→ RBS : localize the interface

RBS
Ep = 1.0 MeV
RNRA

23Na(p,a)20Ne

ER = 1010.5 keV
E = 1634 keV

G.Terwagne & G.Deconninck, NIM B64(1992)153-155
Brussels – 21st November 2013

8
Services provided to companies
3G Photovoltaic cells: Si/Ge quantum dots
→ Si or Ge nanocrystals embedded in a silicon-based matrix (SiO2,
Si3N4…) : “Quantum dots” (QD)
→ Multiple Exciton Generation (MEG) produced by one incident photon
→ Theoretical efficiency up to 60 %
•
•
•
•

Silicon-based cells : abundant, non toxic, stable
Thin films as active layer to reduce Si consumption
High deposition rates
Low-cost substrate (glass, metal, polymer,…)

G.Terwagne & G.Deconninck, NIM B64(1992)153-155
Brussels – 21st November 2013

9
CONTACTS LABO
University of Namur/Physics Department
Laboratoire d'Analyses par Réactions Nucléaires
www.unamur.be

Prof. Guy Terwagne
Director
guy.terwagne@unamur.be
Address :
PMR-LARN
rue de Bruxelles, 61
5000 Namur
Phone :
+32 (0)81 725478
Fax :
+32 (0)81 725474

Brussels – 21st November 2013

10

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U namur pmr larn

  • 1. PMR-LARN – Department of Physics University of Namur Watching the Lab’s video Prof. Guy Terwagne Director Lab’Insight « event » Brussels, 21st November 2013 Brussels – 21st November 2013 1
  • 2. Applied research projects Research axis Research domains Medical Physics Material sciences Ion/Matter interactions Life Science Surface and interface Nuclear Spectroscopy Astrophysics Tools Clients Plasma Assisted deposition (RF,AC, DC) Industry Particles accelerator (2 MV) Ion Implantor (150 kV) Particles detectors -rays or X-rays detectors Simulations Brussels – 21st November 2013 Hospital University Research center Students 2
  • 3. Fields of expertise and industrial targets Ion Beam analysis techniques • Quantitative analysis of elements in nano-materials • Nuclear techniques (NRA, PIGE, PIXE, RBS, ERDA,…) • non-destructive • sensitivity (ppm) • Depth profiling of elements (RNRA) • surface and interface Ion Implantation • Modification of materials properties (IBMM) • All species from Mendeleiev periodic table • Implantation energies between 10keV6 MeV Plasma assisted deposition techniques • DC, RF,… Brussels – 21st November 2013 3
  • 4. Fields of expertise and industrial targets Development of 3rd generation of solar cells • synthetized by ion implantation (Si and Ge) and annealing • nc-Si and nc-Ge • High efficiency (>30 %) • based on Multiple Exiton Generation (MEG) • Thin solar cells (30 µm) • Flexible DLC coatings for automotive industry • Plasma reactive coatings • Hard coatings Brussels – 21st November 2013 4
  • 5. ALATAÏS Ion Beam analysis facility for research, teaching an industry Brussels – 21st November 2013 5
  • 6. Tools available at LARN Tandetron accelerator (2 MV) equipped • Duoplasmotron source (1H, 2D, 3He, 4He) • SNICs source (all negative ions) • acceleration of near all species from Mendeleev periodic Table 5 equipped beam lines • • • • • All purpose (RBS, ERDA, NRA, PIXE/PIGE,…) Cells irradiation Ion Implantation UHV and low background detection system Particles detection chamber Brussels – 21st November 2013 6
  • 7. Tools available at LARN Ion Implanter • Low energy: 5-35keV • Ion implanter SAMES: 20-150 kV Detectors • • • • High efficiency (132%) HPGe detector PIPS particles detectors High resolution LEGe detector Plastic scintillators Deposition chambers and characterization • Plasma deposition chambers • Dektak and Pin on disc system • Oven up to 1700°C for 3" wafers Brussels – 21st November 2013 7
  • 8. Services provided to companies Depth profiling of ligth elements at interface → Na profiling at the interface (RNRA, RBS,…) → SnO2(F)/Glass → RNRA : Na depth profiling → RBS : localize the interface RBS Ep = 1.0 MeV RNRA 23Na(p,a)20Ne ER = 1010.5 keV E = 1634 keV G.Terwagne & G.Deconninck, NIM B64(1992)153-155 Brussels – 21st November 2013 8
  • 9. Services provided to companies 3G Photovoltaic cells: Si/Ge quantum dots → Si or Ge nanocrystals embedded in a silicon-based matrix (SiO2, Si3N4…) : “Quantum dots” (QD) → Multiple Exciton Generation (MEG) produced by one incident photon → Theoretical efficiency up to 60 % • • • • Silicon-based cells : abundant, non toxic, stable Thin films as active layer to reduce Si consumption High deposition rates Low-cost substrate (glass, metal, polymer,…) G.Terwagne & G.Deconninck, NIM B64(1992)153-155 Brussels – 21st November 2013 9
  • 10. CONTACTS LABO University of Namur/Physics Department Laboratoire d'Analyses par Réactions Nucléaires www.unamur.be Prof. Guy Terwagne Director guy.terwagne@unamur.be Address : PMR-LARN rue de Bruxelles, 61 5000 Namur Phone : +32 (0)81 725478 Fax : +32 (0)81 725474 Brussels – 21st November 2013 10