1. KEALII M.G. RIBAO  808.269.0522
kealii.ribao@gmail.com
 2 3 7 5 Lakeshore Driv e
Klam ath Falls, OR 9 7 6 01
MECOP Project List
Lam ResearchCorporationMECOP InternshipProject List
1. One-Touch-Fitting Solution
-Created a solution for the many failing 1/8” one-touch pneumatic fittings that were failing
in the field, which led to critical down times
2. Sending/Retrieving
- Retrieved parts from receiving and vendors, shipped and delivered parts to customers
and suppliers, usually for expedited orders
3. De-gas Box Testing
- Used a data acquisition system (DAQ) to test the rate of diffusion of helium and argon
through the TFE tubing in the newly designed de-gas box
4. De-gas Box Ferrell Design
- Designed a new ferrell to prevent pinching the 1/16” TFE tubing in the degas box that
connects the gas source to the TFE tubing within the de-gas box
5. Pro-Engineer CFD Nitride Shower Head (SHD) Assemblies
- Created three different assemblies to make up an upgrade kit for a customer to prevent
breakage of the fragile ceramic SHD and radio frequency (RF) connectors during
installation
6. RF Strap Design
- Designed a copper RF strap used to connect the RF signal from the RF generator thought
the shower head. The newly designed copper RF strap was a component of the upgrade kit
assembly in (5.) above.
7. CKD Valve Bank Upgrade Kit
- Modified electrical housing and valve bank assemblies for a costumer upgrade kit. Rev
rolled multiple BOM’s and drawings that report to the upgrade kit.
7. Design Threads on Collar and Parasitic Plasma Suppression Plates
- Created threads on models and drawings indicating the mounting mechanism for the
parasitic plasma suppression upgrade kit assembly
8. Ceramic Tennis Racket Robotic Wafer Transfer Arm
- Designed two typed of difference ceramic transfer arms used to transfer wafer’s from
station to station by the control of a robot
9. Plugged ULV Shower Head with Aluminum
- Used wound aluminum to plug a ULV showerhead into hexagonal pattern and then tested
the hexagonal pattern on the R&D tool in the App’s Lab.
10. Test Convexity and Concavity of Showerheads
- Tested different areas of showerheads Manufactured by different vendors to see compare
results, and to confirm that showerhead are designed within tolerance and meet Lam specs.
11. Showerhead External Edge Flow Modulator
- Test fit showerhead external edge flow modulator with vendor manufacture. This design
was to modulate the secondary purge flow around the showerhead by increasing the
effective diameter but retaining the RF capacitance of the showerhead by using a non-

2. KEALII M.G. RIBAO  808.269.0522
kealii.ribao@gmail.com
 2 3 7 5 Lakeshore Driv e
Klam ath Falls, OR 9 7 6 01
conductive engineered plastic, Ultem 1000. This design allowed for only one variable, flow
rather than affecting flow and RF had we made the ring from metal.
12. Heated Pedestal Temperature Analysis
-Took 49 data points evenly distributed on a heated pedestal and recorded the
temperatures at each point to determine if the temperature is uniform throughout the
heated pedestal.
13. Update and Release SIRF Cover
- ECR released the rev roll of the SIRF convert to be VXL and VXT compatible
14. SSR Control Box Remount
- Designed a new bracket and extended the cables connecting to the SSR control box to
enable the door of the box to open greater than 90 degrees. Performed FEA in Pro-Engineer
Mechanica to validate proper load analysis.
Tested and installed the cables and bracket myself in the Apps Lab.
15. Create OEM Spec Sheets
- Created OEM spec sheets for 1/8” 90 degree pneumatic one-touch-fitting and
M5 X 0.5-6H hex nut
16. AMPDS Vacuum Switch Relocation
- Designed an upgrade kit moving the vacuum switch (verifies vacuum draw to carry toxins
away) down the stream of the flow to prevent pressure spikes that would shut the tool
down for unrealistic reasons.
17. PR Reduction Plan
- Extensive daily tasks of conducting statistical PR data analysis in Microsoft Access, Excel,
and PowerPoint to create a plan to prevent PR’s from being generated, and reduce the
overall amount PR’s in backlog. Worked very closely with directors, upper level
management, and the vice-president of engineering to reduce the amount of PR’s in the
Deposition Product Group (DPG).