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Nanoscience and Energy
   Allen Hermann, Ph.D.
 Professor of Physics Emeritus,
     University of Colorado
 Boulder, Colorado 80309-0390
              USA


 allen.hermann@colorado.edu
Lecture 1.   Course Introduction and Definitions

             History, and examples
             in nature and man-made

             Quantum nature- theory:
             quantum confinement

             Nanomaterials:
             Dimensionality
             Chemical varieties and shapes
             Synthesis
             Top-down: Lithography
             Bottom-up: Self-assembly
             Characterization and Handling
             Measurements
             Nanotemplates
Lecture 2.   Nanocarbon
             C60, CNT’s
             Synthesis and e-beam lithography
             Graphene (synthesis, relativistic
             QM nature, transport)
Lecture 3.        Energy and Nanotechnology
             Review of Alternate Energy
             Sources
             Review of Electronic Properties of
             Solids:
             Free- electron Fermi gas
             Energy bands in Solids
             Semiconductors and doping
             pn junctions
             Amorphous semiconductors
Lecture 4. Solar cells: Motivation (examples) and Theory
        pn junctions under illumination
        Homojunctions
        Open-circuit voltage, short-
        circuit current
        IV curve, fill factor, solar-to-
        electric conversion efficiency
        Carrier generation and
        recombination
         Defects and minority carrier
         diffusion
         Current due to minority carrier
         diffusion:
         Solution to the diffusion
         differential equation under
         Spatially-homogeneous
         generation, and
         under Inhomogeneous
         generation
         Effect of an electric field
         Heterojunctions
Lecture 5.    Experiment: Types of Solar Cells

•Generation I solar cells:
Single Crystal Si, Polycrystalline Si
Growth, impurity diffusion, contacts, anti-reflection coatings
•Generation II Solar cells:
Polycrystalline thin films, crystal structure, deposition techniques
CdS/CdTe (II-VI) cells
CdS/Cu(InGa)Se2 cells
Amorphous Si:H cells
•Generation III Solar Cells:
•High-Efficiency Multijunction Concentrator Solar cells based on
III-V’s and III-V ternary analogues
•Dye-sensitized solar cell
•Organic (excitonic) cells
•Polymeric cells
•Nanostructured Solar Cells including Multicarrier per photon cells,
quantum dot and quantum-confined cells
Lecture 6.   Nanotechnology
             Fuel Cells
             Nano-composite materials
             Nanoelectronics and photonic
             Devices:
             Chemical and Biological Detectors
             Nanomedicine:
                  Disease Detection
                  Implants
                  Delivery of Therapeutics
                  Other nanomedicine
             Applications
             Risks
Lecture 7.   Other Nanotechnology Applications
             DNA sequencing
             Filtration
             Clothing and Sports
             Composites
             Other Nanomedicine Applications and Opportunities
             Other Nanotemplate-based Applications:
             Superconductors
             Magnetic Nanowires
             Ferroelectrics
             Dielectric Nanostructures and Cloaking
             The Business of Nanotechnology
Basis for Grade in the Course

Your grade in the course is based
           on 2 factors:
       1) class attendance
  2)grade earned on the paper
             assigned.
A 1-2 page paper in English is to be turned in to Prof.
 Hermann by the end of the last lecture. Both a hard
          copy and a digital copy emailed to
             allen.hermann@colorado.edu
                      are required.
       This paper should be in your own words.
The paper could contain one or more figures and/or
                         tables.
         The subject matter should be either
  1) a tutorial explaining clearly one topic from this
course (in greater detail than given in the course), or
   2) a clear description of your own research related
              to the subject of this course.
Your grade will be calculated as follows:

Attendance- 40% ( 5.71 % per class attended)
Grade for paper- 60%
Further References
1. Charles Kittel, “Introduction to Solid State Physics”, Prentice Hall
(1967 ff.)
2. S.M. Sze, “Physics of Semiconducting Devices”, John Wiley (1969,ff.)
3.Frank Larin, “Radiation Effects in Semiconducting Devices” (John
Wiley)
4. H.Y. Tada and J.R. Carter, JPL Solar cell Radiation handbook, NASA
(1977)
5. Martin Green, “Solar Cells”, Prentice Hall (1982,ff.)
6. H.J. Hovel, “Solar Cells”, in Semiconductors and Semimetals, Vol.11
(edited by R. Richardson and A. Beer, Academic Press, 1975).
7. J. Reynolds and A. Meulenberg, J.Appl. Phys. 45, 2582(1974)
Lecture 1

Course Introduction and
      Definitions
Lecture 1.   Course Introduction and Definitions

             History, and examples
             in nature and man-made

             Quantum nature- theory:
             quantum confinement

             Nanomaterials:
             Dimensionality
             Chemical varieties and shapes
             Synthesis
             Top-down: Lithography
             Bottom-up: Self-assembly
             Characterization and Handling
             Measurements
             Nanotemplates
10,000 Kilometers
1000 km
Sliding scale universe:

http://htwins.net/scale2/scale2.swf?bordercolor=white
What is Nanotechnology?

• Research and technology development at the atomic, molecular
  or macromolecular levels, in the length scale of approximately 1
  - 100 nanometers.

• Creating and using structures, devices and systems that have
  novel properties and functions because of their small and/or
  intermediate size.

• Ability to control processes at a few nm-range for advanced
  material processing and manufacturing.
The Scale of Things – Nanometers and More
   Things Natural                                                                                                         Things Manmade
                                                               10-2 m             1 cm
                                                                                  10 mm
                                                                                                                                   Head of a pin
                                                                                                                                     1-2 mm                               The Challenge

                                  Ant                                    1,000,000 nanometers =
                                ~ 5 mm                         10-3 m       1 millimeter (mm)




                                                                         Microwave
                                                                                                                                           MicroElectroMechanical
    Dust mite                                                                                                                                  (MEMS) devices
                                                                                                                                               10 -100 mm wide
     200 mm                                                    10-4 m
                                                                                  0.1 mm
                                                                                  100 mm




                                                  Microworld
                                Fly ash
   Human hair                 ~ 10-20 mm
~ 60-120 mm wide
                                                                                                                                                                                                       O
                                                                                                                                                                                                   P
                                                                                                                                                                                               O       O




                                                                  -5
                                                               10 m               0.01 mm                                                                                          O   O               O   O




                                                                                  10 mm                                                                                        O   O   O   O   O       O   O   O


                                                                                                                    Pollen grain
                                                                                                           Red blood cells
                                                                                                                                                                               O   O   O   O   O       O   O   O




                                                                         Infrared
                                                                                                                                                                               S   S   S   S   S       S   S   S



 Red blood cells
   (~7-8 mm)                                                                                                    Zone plate x-ray “lens”
                                                                                      1,000 nanometers =
                                                               10-6 m                  1 micrometer (mm)       Outer ring spacing ~35 nm
                                                                         Visible




                                                                                                                                                                           Fabricate and combine
                                                                                                                                                                           nanoscale building
                                                                                                                                                                           blocks to make useful
                                                               10-7 m             0.1 mm                                                                                   devices, e.g., a
                                                                                  100 nm                                                                                   photosynthetic reaction
                                                                         Ultraviolet




                                                                                                                                                                           center with integral
                                                                                                                                                                           semiconductor storage.
                                                  Nanoworld




                                                                                                             Self-assembled,
                                                                                  0.01 mm                    Nature-inspired structure
                                                               10-8 m                                        Many 10s of nm
       ~10 nm diameter                                                            10 nm
                                                                                                                                                Nanotube electrode
                            ATP synthase

                                                               10-9 m                  1 nanometer (nm)                                                                                         Carbon
                                                                                                                                                                                               buckyball
                                                                         Soft x-ray




                                                                                                                                                                                                 ~1 nm
                                                                                                                                                                                                diameter
                                                                                                                                                                     Carbon nanotube
                                                                                                                                                                     ~1.3 nm diameter
         DNA                                                   10-10 m                                     Quantum corral of 48 iron atoms on copper surface
                                                                                  0.1 nm
  ~2-1/2 nm diameter        Atoms of silicon                                                                   positioned one at a time with an STM tip
                          spacing ~tenths of nm                                                                         Corral diameter 14 nm
My Personal Early Nanotechnology
          Motivation
Li+




Li          PVP-I CT
      LiI
            complex
20 nm nanorods of MnO2 for positive electrodes
             in Li ion batteries
• Quantum Confinement

   • One Dimension
• Quantum Confinement

  • Three Dimensions
For absorption,
  energy of photon absorbed goes
                as 1/L2,
    smaller particle absorbs larger
 energy photon, who’s wavelength
is smaller (toward blue), and longer
 wavelength photons (toward red)
           are transmitted.
Figure 7.2. Solutions of quantum dots of varying size. Note the variation
 in color of each solution illustrating the particle size dependence of the
optical absorption for each sample. Note that the smaller particles are in
  the red solution (absorbs blue), and that the larger ones are in the blue
                               (absorbs red).
For light scattering,
 the photon wavelength must be
smaller than the particle size, and
   the smaller particles tend to
     scatter only the shorter
wavelength photons (toward blue)
.Nanomaterials
•   C.   Dimensionality
•   D.   Chemical varieties
•   E.   Shapes
•   F.   Synthesis
    – 1.      Lithography
    – 2.      self-assembly
• Synthesis

1. Lithography
Exposing
                  Radiation

                                  Polymer Resist

                                  Thin Film

                                  Substrate

  Positive                           Negative
                   Developing
                Resist                          Resist




                   Etching and
                    Stripping




Figure 1.1. Schematic of positive and negative resists.
Figure 1.6. Schematic of a focused ion beam system.
Carbon Nanotubes/Nanocones with Various Catalyst Patterning Dimensions
by E-beam Lithography




                        30
                          0n
                           40




                             m
                             0n
                  1m




                              12
                               m1



                                0n
                    m



                                 60



                                  m
                                   20




                                    60
                                    nm
                                     0n




                                       nm
                                       80
                                        m



                                          nm
                                          10
                                            0n
                                              m

                                                                  nm
                                                              100
Figure 2.1. The process of forming a self-assembled monolayer. A
substrate is immersed into a dilute solution of a surface-active
material that adsorbs onto the surface and organizes via a self-
assembly process. The result is a highly ordered and well-packed
molecular monolayer. (Adapted from Ref. 9 by permission of
American Chemical Society.)
.Characterization and Handling
    –   a. Optical Tweezers
    –   b. Electromagnetic tweezers
    –   c. In nanotemplates
    –   d. Structural Analysis by TEM, SEM, X-ray, etc.
Ballistic Nanotube MOS Transistors (Chen,Hastings)


Placement of Nanotubes by E-Field
       D                                                 Nanotube Field-Effect Transistor(FET)
                  (The first-demo)                                  Al-Gate     SWNT
L                                                                                         Drain
                                                          Source
              d                                                                                   HfO2
                          W


                                                                               L
                                                               Ti
                                                                              SiO2     L~20 nm



                                          E-Beam Lithography
• Measurements
Coarse approach
                           mechanism
                                                        Reference
                                   S
                                   c
                                   a   feedback
                                   n
                                   n data
                                                    -
                                   e
                                   r
                                              Signa l
                          Sensor

                                     Sample

                     Figur e 3.1. Schematic showing all major
                     components of an SPM. In this example,
                     feedback is used major components
                                      all to move the sensor
Figure 3.1. Schematic showingmaintain a constant signa l. of an SPM.     In
                     vertically to
this example, feedback is used to movethe sensor is taken
                     Vertical displacement of the sensor vertically to
                     as topograph ical data.
maintain a constant signal. Vertical displacement of the sensor is
taken as topographical data
Clean Room
                                                    Major equipment
Photolithography                                                                                                          Plasma
                                                                                                                          Enhanced
        •    Focused Ion Beam System (FIB) (scheduled for installation in mid 2007)                                       Chemical
        •    Atomic Layer Deposition System (ALD)
                                                                                                                          Vapor
        •    Rapid Thermal Processing System (RTP)
        •    Plasma Enhanced Chemical Vapor Deposition System (PECVD)                                                     Deposition
        •    Standard Resolution Electron Beam Lithography (EBL)
        •    Atomic Force Microscope for Nanopatterning, and Manipulation (AFM)
        •    Atomic Force Microscope for Atomic Resolution Imaging (AFM)
        •    Quartz Crystal Microbalance (QCM)
        •    4-furnace bank of 3-zone oxidation, dopant diffusion, and annealing furnaces
        •    Class 100 Clean Room
        •    Spin-Coating Station
        •    Photolithography System
        •    Surface Profiler                                                                                       Reactive Ion Etching
        •    Chemical Treatment Station (cleaning, etching, and functionalization)
        •    Ion Milling System
        •    Plasma Cleaning/Oxidation System
        •    Gas Cabinet Bank
        •    Experimental Materials Thermal Evaporator
        •    Standard Materials Thermal Evaporator
        •    Electron-Beam Evaporator
        •    Multi-target Sputtering System
        •    Probe Station and Device Characterization System
        •    Four-Point Resistance Measurement System                                                  Atomic
        •    Ellipsometer                                                                              Layer
        •    Optical Microscopes                                                                       Deposition
        •    Dicing Saw                                                        Quartz MicroBalance
        •    Equipment Cooling Systems (3)
        •    Inductive Coupled Plasma (ICP) Etching System (scheduled for installation in Feb. 2006)
        •    Experimental materials sputtering system (scheduled for installation in mid 2006)
        •    Ultra-High Resolution EBL and SEM System


                                                                                                                    Rapid Thermal
                                                                                                                    Processing
IV. Nanotemplates
• G. Inorganic
• H. Organic
Fig.2 (a) Nanostructure of anodically formed Al2O3 template. (b) its cross-section,
(c) catalyst deposited at the bottom of the pores, (e) vertically aligned nanotubes, and (f) TEM
                                     image of a nanotube.
Nano-scale Material Research
      (Chen, Singh, DeLong, Saito, Yang, Bhattacharyya, and Sumanasekeras)
      The first vertically aligned nanotubes on silicon substrates using templates

                                200nm                                        (b)
200 nm
                                                                                   (d)


                               Nano-template Catalyst


(a)                                                                          (c)

                  Hexagonal Cells

                                                   SiO2                       Al
                                                             SiO2
                                                                                    Vertically aligned MWNTs
Horizontally
aligned                                                                            embedded in AAO insulator
                   SiO2



                                    Si substrate          Carbon nanotubes
• Fig. 3 Schematic representing the helix-coil transitions within the pore of a
  Poly-L-Glutamic Acid functionalized membrane (a) random-coil formation at
  PH > 5.5 , (b) helix formation at low pH ( <4 ).

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2012 tus lecture 1

  • 1. Nanoscience and Energy Allen Hermann, Ph.D. Professor of Physics Emeritus, University of Colorado Boulder, Colorado 80309-0390 USA allen.hermann@colorado.edu
  • 2. Lecture 1. Course Introduction and Definitions History, and examples in nature and man-made Quantum nature- theory: quantum confinement Nanomaterials: Dimensionality Chemical varieties and shapes Synthesis Top-down: Lithography Bottom-up: Self-assembly Characterization and Handling Measurements Nanotemplates
  • 3. Lecture 2. Nanocarbon C60, CNT’s Synthesis and e-beam lithography Graphene (synthesis, relativistic QM nature, transport)
  • 4. Lecture 3. Energy and Nanotechnology Review of Alternate Energy Sources Review of Electronic Properties of Solids: Free- electron Fermi gas Energy bands in Solids Semiconductors and doping pn junctions Amorphous semiconductors
  • 5. Lecture 4. Solar cells: Motivation (examples) and Theory pn junctions under illumination Homojunctions Open-circuit voltage, short- circuit current IV curve, fill factor, solar-to- electric conversion efficiency Carrier generation and recombination Defects and minority carrier diffusion Current due to minority carrier diffusion: Solution to the diffusion differential equation under Spatially-homogeneous generation, and under Inhomogeneous generation Effect of an electric field Heterojunctions
  • 6. Lecture 5. Experiment: Types of Solar Cells •Generation I solar cells: Single Crystal Si, Polycrystalline Si Growth, impurity diffusion, contacts, anti-reflection coatings •Generation II Solar cells: Polycrystalline thin films, crystal structure, deposition techniques CdS/CdTe (II-VI) cells CdS/Cu(InGa)Se2 cells Amorphous Si:H cells •Generation III Solar Cells: •High-Efficiency Multijunction Concentrator Solar cells based on III-V’s and III-V ternary analogues •Dye-sensitized solar cell •Organic (excitonic) cells •Polymeric cells •Nanostructured Solar Cells including Multicarrier per photon cells, quantum dot and quantum-confined cells
  • 7. Lecture 6. Nanotechnology Fuel Cells Nano-composite materials Nanoelectronics and photonic Devices: Chemical and Biological Detectors Nanomedicine: Disease Detection Implants Delivery of Therapeutics Other nanomedicine Applications Risks
  • 8. Lecture 7. Other Nanotechnology Applications DNA sequencing Filtration Clothing and Sports Composites Other Nanomedicine Applications and Opportunities Other Nanotemplate-based Applications: Superconductors Magnetic Nanowires Ferroelectrics Dielectric Nanostructures and Cloaking The Business of Nanotechnology
  • 9. Basis for Grade in the Course Your grade in the course is based on 2 factors: 1) class attendance 2)grade earned on the paper assigned.
  • 10. A 1-2 page paper in English is to be turned in to Prof. Hermann by the end of the last lecture. Both a hard copy and a digital copy emailed to allen.hermann@colorado.edu are required. This paper should be in your own words. The paper could contain one or more figures and/or tables. The subject matter should be either 1) a tutorial explaining clearly one topic from this course (in greater detail than given in the course), or 2) a clear description of your own research related to the subject of this course.
  • 11. Your grade will be calculated as follows: Attendance- 40% ( 5.71 % per class attended) Grade for paper- 60%
  • 12.
  • 13. Further References 1. Charles Kittel, “Introduction to Solid State Physics”, Prentice Hall (1967 ff.) 2. S.M. Sze, “Physics of Semiconducting Devices”, John Wiley (1969,ff.) 3.Frank Larin, “Radiation Effects in Semiconducting Devices” (John Wiley) 4. H.Y. Tada and J.R. Carter, JPL Solar cell Radiation handbook, NASA (1977) 5. Martin Green, “Solar Cells”, Prentice Hall (1982,ff.) 6. H.J. Hovel, “Solar Cells”, in Semiconductors and Semimetals, Vol.11 (edited by R. Richardson and A. Beer, Academic Press, 1975). 7. J. Reynolds and A. Meulenberg, J.Appl. Phys. 45, 2582(1974)
  • 14. Lecture 1 Course Introduction and Definitions
  • 15. Lecture 1. Course Introduction and Definitions History, and examples in nature and man-made Quantum nature- theory: quantum confinement Nanomaterials: Dimensionality Chemical varieties and shapes Synthesis Top-down: Lithography Bottom-up: Self-assembly Characterization and Handling Measurements Nanotemplates
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  • 34. What is Nanotechnology? • Research and technology development at the atomic, molecular or macromolecular levels, in the length scale of approximately 1 - 100 nanometers. • Creating and using structures, devices and systems that have novel properties and functions because of their small and/or intermediate size. • Ability to control processes at a few nm-range for advanced material processing and manufacturing.
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  • 40. The Scale of Things – Nanometers and More Things Natural Things Manmade 10-2 m 1 cm 10 mm Head of a pin 1-2 mm The Challenge Ant 1,000,000 nanometers = ~ 5 mm 10-3 m 1 millimeter (mm) Microwave MicroElectroMechanical Dust mite (MEMS) devices 10 -100 mm wide 200 mm 10-4 m 0.1 mm 100 mm Microworld Fly ash Human hair ~ 10-20 mm ~ 60-120 mm wide O P O O -5 10 m 0.01 mm O O O O 10 mm O O O O O O O O Pollen grain Red blood cells O O O O O O O O Infrared S S S S S S S S Red blood cells (~7-8 mm) Zone plate x-ray “lens” 1,000 nanometers = 10-6 m 1 micrometer (mm) Outer ring spacing ~35 nm Visible Fabricate and combine nanoscale building blocks to make useful 10-7 m 0.1 mm devices, e.g., a 100 nm photosynthetic reaction Ultraviolet center with integral semiconductor storage. Nanoworld Self-assembled, 0.01 mm Nature-inspired structure 10-8 m Many 10s of nm ~10 nm diameter 10 nm Nanotube electrode ATP synthase 10-9 m 1 nanometer (nm) Carbon buckyball Soft x-ray ~1 nm diameter Carbon nanotube ~1.3 nm diameter DNA 10-10 m Quantum corral of 48 iron atoms on copper surface 0.1 nm ~2-1/2 nm diameter Atoms of silicon positioned one at a time with an STM tip spacing ~tenths of nm Corral diameter 14 nm
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  • 43. My Personal Early Nanotechnology Motivation
  • 44. Li+ Li PVP-I CT LiI complex
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  • 47. 20 nm nanorods of MnO2 for positive electrodes in Li ion batteries
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  • 50. • Quantum Confinement • One Dimension
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  • 56. • Quantum Confinement • Three Dimensions
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  • 58. For absorption, energy of photon absorbed goes as 1/L2, smaller particle absorbs larger energy photon, who’s wavelength is smaller (toward blue), and longer wavelength photons (toward red) are transmitted.
  • 59. Figure 7.2. Solutions of quantum dots of varying size. Note the variation in color of each solution illustrating the particle size dependence of the optical absorption for each sample. Note that the smaller particles are in the red solution (absorbs blue), and that the larger ones are in the blue (absorbs red).
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  • 61. For light scattering, the photon wavelength must be smaller than the particle size, and the smaller particles tend to scatter only the shorter wavelength photons (toward blue)
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  • 63. .Nanomaterials • C. Dimensionality • D. Chemical varieties • E. Shapes • F. Synthesis – 1. Lithography – 2. self-assembly
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  • 69. Exposing Radiation Polymer Resist Thin Film Substrate Positive Negative Developing Resist Resist Etching and Stripping Figure 1.1. Schematic of positive and negative resists.
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  • 71. Figure 1.6. Schematic of a focused ion beam system.
  • 72. Carbon Nanotubes/Nanocones with Various Catalyst Patterning Dimensions by E-beam Lithography 30 0n 40 m 0n 1m 12 m1 0n m 60 m 20 60 nm 0n nm 80 m nm 10 0n m nm 100
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  • 81. Figure 2.1. The process of forming a self-assembled monolayer. A substrate is immersed into a dilute solution of a surface-active material that adsorbs onto the surface and organizes via a self- assembly process. The result is a highly ordered and well-packed molecular monolayer. (Adapted from Ref. 9 by permission of American Chemical Society.)
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  • 87. .Characterization and Handling – a. Optical Tweezers – b. Electromagnetic tweezers – c. In nanotemplates – d. Structural Analysis by TEM, SEM, X-ray, etc.
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  • 91. Ballistic Nanotube MOS Transistors (Chen,Hastings) Placement of Nanotubes by E-Field D Nanotube Field-Effect Transistor(FET) (The first-demo) Al-Gate SWNT L Drain Source d HfO2 W L Ti SiO2 L~20 nm E-Beam Lithography
  • 93. Coarse approach mechanism Reference S c a feedback n n data - e r Signa l Sensor Sample Figur e 3.1. Schematic showing all major components of an SPM. In this example, feedback is used major components all to move the sensor Figure 3.1. Schematic showingmaintain a constant signa l. of an SPM. In vertically to this example, feedback is used to movethe sensor is taken Vertical displacement of the sensor vertically to as topograph ical data. maintain a constant signal. Vertical displacement of the sensor is taken as topographical data
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  • 95. Clean Room Major equipment Photolithography Plasma Enhanced • Focused Ion Beam System (FIB) (scheduled for installation in mid 2007) Chemical • Atomic Layer Deposition System (ALD) Vapor • Rapid Thermal Processing System (RTP) • Plasma Enhanced Chemical Vapor Deposition System (PECVD) Deposition • Standard Resolution Electron Beam Lithography (EBL) • Atomic Force Microscope for Nanopatterning, and Manipulation (AFM) • Atomic Force Microscope for Atomic Resolution Imaging (AFM) • Quartz Crystal Microbalance (QCM) • 4-furnace bank of 3-zone oxidation, dopant diffusion, and annealing furnaces • Class 100 Clean Room • Spin-Coating Station • Photolithography System • Surface Profiler Reactive Ion Etching • Chemical Treatment Station (cleaning, etching, and functionalization) • Ion Milling System • Plasma Cleaning/Oxidation System • Gas Cabinet Bank • Experimental Materials Thermal Evaporator • Standard Materials Thermal Evaporator • Electron-Beam Evaporator • Multi-target Sputtering System • Probe Station and Device Characterization System • Four-Point Resistance Measurement System Atomic • Ellipsometer Layer • Optical Microscopes Deposition • Dicing Saw Quartz MicroBalance • Equipment Cooling Systems (3) • Inductive Coupled Plasma (ICP) Etching System (scheduled for installation in Feb. 2006) • Experimental materials sputtering system (scheduled for installation in mid 2006) • Ultra-High Resolution EBL and SEM System Rapid Thermal Processing
  • 96. IV. Nanotemplates • G. Inorganic • H. Organic
  • 97.
  • 98. Fig.2 (a) Nanostructure of anodically formed Al2O3 template. (b) its cross-section, (c) catalyst deposited at the bottom of the pores, (e) vertically aligned nanotubes, and (f) TEM image of a nanotube.
  • 99. Nano-scale Material Research (Chen, Singh, DeLong, Saito, Yang, Bhattacharyya, and Sumanasekeras) The first vertically aligned nanotubes on silicon substrates using templates 200nm (b) 200 nm (d) Nano-template Catalyst (a) (c) Hexagonal Cells SiO2 Al SiO2 Vertically aligned MWNTs Horizontally aligned embedded in AAO insulator SiO2 Si substrate Carbon nanotubes
  • 100. • Fig. 3 Schematic representing the helix-coil transitions within the pore of a Poly-L-Glutamic Acid functionalized membrane (a) random-coil formation at PH > 5.5 , (b) helix formation at low pH ( <4 ).